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1. 发明申请

US20080236755A1 Single-wafer type substrate processing apparatus having a carry-in port provided with first and second placement tables arranged in a line 审中-公开
标题翻译：具有输入端口的单晶片型基板处理装置，该输入端口设置有一列排列的第一和第二布置台
公开(公告)号：US20080236755A1
公开(公告)日：2008-10-02
申请号：US12076975
申请日：2008-03-26
申请人： Keisuke Kondoh , Shin Osada
发明人： Keisuke Kondoh , Shin Osada
IPC分类号： H01L21/306 , B05C13/02 , B05C11/00
CPC分类号： H01L21/67775
摘要： A single-wafer type substrate processing apparatus includes: a plurality of process modules connected to a substrate transfer chamber; a carry-in port having a plurality of first placement tables arranged in a horizontal direction so that a substrate carrier is placed thereon; a second placement table installed on the left or right of an area where the first placement tables are arranged in the horizontal direction so that the substrate carrier is temporarily placed thereon; and a transfer mechanism transferring the substrate carrier from the second placement table to one of the first placement tables. When viewed in a direction perpendicular to the horizontal direction, an outer end of the second placement table in the horizontal direction is inside one of a maintenance area and a footprint area of the plurality of single-wafer type process modules as a whole, which one area is larger than the other in the horizontal direction.
摘要翻译：单晶片型基板处理装置包括：连接到基板传送室的多个处理模块; 具有沿水平方向布置的多个第一放置台的携带口，使得基板载体位于其上; 安装在第一放置台沿水平方向布置的区域的左侧或右侧的第二放置台，使得基板载体暂时放置在其上; 以及将所述基板载体从所述第二放置台传递到所述第一放置台之一的传送机构。当沿垂直于水平方向的方向观察时，第二放置台的水平方向的外端在整个多个单晶片型处理模块的维护区域和覆盖区域之一内，其中一个区域在水平方向大于另一个。

2. 发明申请

US20090087289A1 Structure for storing a substrate and semiconductor manufacturing apparatus 审中-公开
标题翻译：用于存储基板和半导体制造装置的结构
公开(公告)号：US20090087289A1
公开(公告)日：2009-04-02
申请号：US12284095
申请日：2008-09-17
申请人： Shin Osada
发明人： Shin Osada
IPC分类号： B65H1/04 , B65G1/12
CPC分类号： H01L21/67769 , H01L21/67386
摘要： The present invention provides a structure for storing a substrate that can be downsized compared to conventional techniques and is capable of suppressing an increase in footprint. The structure for storing a substrate pertaining to the present invention includes a holding section for holding a substrate horizontally, an inner component positioned around the holding section, which has a loading and unloading section for loading and unloading the substrate from the holding section in a horizontal direction, and an outer component positioned around the inner component, which has an opening corresponding to the loading and unloading section, wherein the inner component and the outer component are able to rotate independently of each other and a rotation axis of the inner component and a rotation axis of the outer component are orthogonal to a face of the substrate.
摘要翻译：本发明提供了一种用于存储与常规技术相比可以减小尺寸的基板的结构，并且能够抑制占地面积的增加。用于存储本发明的基板的结构包括用于水平地保持基板的保持部分，位于保持部分周围的内部部件，该内部部件具有装载和卸载部分，该装载和卸载部分从保持部分以水平方式装载和卸载基板方向和围绕所述内部部件定位的外部部件，所述外部部件具有对应于所述装载和卸载部分的开口，其中所述内部部件和所述外部部件能够彼此独立地旋转，并且所述内部部件的旋转轴线和外部部件的旋转轴线正交于基板的表面。

3. 发明授权

US07490010B2 Data collection method, substrate processing apparatus, and substrate processing system 有权
标题翻译：数据采集方法，基板处理装置和基板处理系统
公开(公告)号：US07490010B2
公开(公告)日：2009-02-10
申请号：US11774777
申请日：2007-07-09
申请人： Shin Osada
发明人： Shin Osada
IPC分类号： G06F19/00 , G01N1/00
CPC分类号： G05B19/41875 , G05B2219/32179 , G05B2219/32199 , G05B2219/45031 , H01J37/32935 , Y02P90/22
摘要： When measurement data collected with a specific sampling cycle by MCs from measuring instrument units are stored into a data storage apparatus, a sampling controller adjusts the sampling cycle to a longer setting if the apparatus state is other than a substrate processing execution state (e.g., an idling state) compared to the sampling cycle set in the substrate processing execution state, so as to minimize the volume of data stored into the data storage apparatus.
摘要翻译：当通过来自测量仪器单元的MC采集特定采样周期的测量数据被存储到数据存储设备中时，如果设备状态不是衬底处理执行状态，则采样控制器将采样周期调整到更长的设置（例如，空闲状态）与在基板处理执行状态中设置的采样周期相比较，以便最小化存储到数据存储装置中的数据量。

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