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    • 3. 发明授权
    • Semiconductor device with improved planarity and reduced parasitic
capacitance
    • 具有改善的平面性和降低的寄生电容的半导体器件
    • US06153918A
    • 2000-11-28
    • US138017
    • 1998-08-21
    • Hiroshi KawashimaMasakazu OkadaKeiichi YamadaKeiichi Higashitani
    • Hiroshi KawashimaMasakazu OkadaKeiichi YamadaKeiichi Higashitani
    • H01L21/762H01L21/8234H01L29/00
    • H01L21/76237H01L21/823475
    • In a semiconductor device and a method of manufacturing the same, a dummy region which can suppress occurrence of a parasitic capacity can be provided for reducing a difference in level without increasing manufacturing steps in number. A semiconductor substrate is provided at its main surface with an isolation region formed by a trench, and a dummy region leaving the main surface is formed in the isolation region for the purpose of reducing an influence by the difference in level in a later step. The dummy region includes p- and n-type impurity regions each extending a predetermined depth from the surface. Since a pn junction occurs at the bottom of the impurity region, a depletion layer spreads in the pn junction, and thereby reduces a parasitic capacity between the dummy region and a conductive interconnection located in a crossing direction at a higher position. The impurity regions and source/drain regions of p- and n-channel transistors in active regions are simultaneously formed by impurity implantation.
    • 在半导体器件及其制造方法中,可以提供能够抑制寄生电容的发生的虚拟区域,以减少水平差而不增加数量的制造步骤。 半导体衬底在其主表面上设置有由沟槽形成的隔离区域,并且在隔离区域中形成了离开主表面的虚拟区域,以便减少后续步骤中的电平差的影响。 虚拟区域包括各自从表面延伸预定深度的p型和n型杂质区。 由于在杂质区域的底部发生pn结,所以在pn结中扩散耗尽层,从而降低位于较高位置处的交叉方向上的虚设区域和导电配线之间的寄生电容。 有源区中的p沟道晶体管和n沟道晶体管的杂质区和源/漏区同时由杂质注入形成。
    • 9. 发明授权
    • Superconducting coil apparatus
    • 超导线圈设备
    • US08818471B2
    • 2014-08-26
    • US12631368
    • 2009-12-04
    • Hiroshi Kawashima
    • Hiroshi Kawashima
    • H01B12/00
    • H01F6/065H01F6/04H01F6/06H01F27/303H02J15/00Y02E40/67Y02P90/50
    • It is desired to perform assemble, disassemble, maintenance and the like, especially of a large site superconducting coil device, in a short time. The superconducting coil device includes a plurality of coil units arranged in a circle circumference to form a toroidal shape. Each of the plurality of coil units includes a cryostat and a superconducting coil stored in the cryostat, and has a first surface parallel with a radius of the circle circumference and a second surface parallel with the radius of the circle circumference and arranged in a first direction side of the circle circumference to the first surface. The first surface contacts with the second surface of a coil unit adjacent in one direction among the plurality of coil units. The second surface contacts with the first surface of a coil unit adjacent in other direction among the plurality of coil units.
    • 期望在短时间内进行组装,拆卸,维护等,特别是大型现场超导线圈装置。 超导线圈装置包括多个绕圆周布置以形成环形形状的线圈单元。 多个线圈单元中的每一个包括低温恒温器和存储在低温恒温器中的超导线圈,并且具有平行于圆周半径的第一表面和与圆周半径平行的第二表面,并且沿第一方向 圆周的一侧到第一表面。 第一表面与多个线圈单元中的一个方向相邻的线圈单元的第二表面接触。 第二表面与多个线圈单元中的另一个方向相邻的线圈单元的第一表面接触。