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    • 8. 发明授权
    • Evaporation apparatus
    • 蒸发装置
    • US06911094B2
    • 2005-06-28
    • US10838812
    • 2004-05-04
    • Hirotoshi IwaseSeizo KatoMasatoshi OchiaiTetsuro Endo
    • Hirotoshi IwaseSeizo KatoMasatoshi OchiaiTetsuro Endo
    • H05B33/10C23C14/24C23C14/26H01L51/50C23C14/00
    • C23C14/26C23C14/243Y10T117/10
    • An evaporation apparatus comprises an elongated crucible having an upper opening and storing an evaporation material, an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating the evaporation material stored in the crucible, and has an opening through which the evaporation material which is vaporized by heating can pass through, and a fixing member for pressing and fixing the electric heater onto the elongated crucible. Further, between the fixing member and the electric heater, an angle member having surface portions respectively fitting onto an edge portion of the upper surface and an upper portion of the side surface of the elongated crucible is provided along the longitudinal direction of the elongated crucible. A pressing force from the fixing member is made to exert onto the electric heater via the angle member to bring the electric heater into close contact with the elongated crucible.
    • 蒸发装置包括具有上开口并存储蒸发材料的细长坩埚,覆盖细长坩埚的上开口的电加热器,通过使电流流入其中以加热存储在坩埚中的蒸发材料而产生热量,以及 具有通过加热蒸发的蒸发材料可以通过的开口,以及用于将电加热器按压并固定到细长坩埚上的固定构件。 此外,在固定构件和电加热器之间,沿着细长坩埚的长度方向设置有具有分别配合在上表面的边缘部分和细长坩埚的侧表面的上部的表面部分的角部件。 使来自固定部件的按压力经由角部件施加到电加热器上,使电加热器与细长的坩埚紧密接触。