会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明申请
    • HEATING APPARATUS, VACUUM-HEATING METHOD AND METHOD FOR MANUFACTURING THIN FILM
    • 加热装置,真空加热方法和制造薄膜的方法
    • US20130189424A1
    • 2013-07-25
    • US13820141
    • 2012-06-28
    • Sadayuki OkazakiKazuyoshi Honda
    • Sadayuki OkazakiKazuyoshi Honda
    • H01M10/04
    • H01M10/04C23C14/24C23C14/243C23C14/562
    • Provided is a heating apparatus including: an object to be heated under vacuum; a heating body separable from the object to be heated, the heating body being configured so that a gap is formed between the heating body itself and the object to be heated; and a gas introduction channel for introducing a heat transfer gas into the gap. The object to be heated is heated by the heating body via the heat transfer gas. An example of the heating apparatus is a deposition apparatus 30. An example of the object to be heated is a storage container 9 that holds a deposition material and that has an opening for allowing the deposition material that has been vaporized to pass therethrough. An example of the heating body is a heating container 10 that detachably accommodates the storage container 9 and that has a heater 20 for heating the deposition material in the storage container 9. An example of the gas introduction channel is the gas introduction tube 11.
    • 本发明提供一种加热装置,包括:真空加热对象物; 加热体,其与被加热物体分离,所述加热体构造成在所述加热体本体与被加热体之间形成间隙, 以及用于将传热气体引入到间隙中的气体导入通道。 待加热物体由加热体通过传热气体加热。 加热装置的一个实例是沉积装置30.被加热物体的一个实例是保持沉积材料的储存容器9,并且具有允许已被蒸发的沉积材料通过的开口。 加热体的一个实例是可拆卸地容纳储存容器9的加热容器10,并且具有用于加热储存容器9中的沉积材料的加热器20.气体导入通道的一个例子是气体导入管11。