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    • 5. 发明授权
    • Apparatus for forming laminated thin films or layers
    • 用于形成叠层薄膜或层的装置
    • US06251188B1
    • 2001-06-26
    • US09473682
    • 1999-12-29
    • Tsuyoshi HashimotoKimihiro MatsuseKazuya OkuboTsuyoshi Takahashi
    • Tsuyoshi HashimotoKimihiro MatsuseKazuya OkuboTsuyoshi Takahashi
    • C23C1600
    • C23C16/45565C23C16/4404C23C16/4405C23C16/45561
    • Pre-coating films are formed in a pretreatment by supplying first film-forming gases into a process chamber of a process vessel while heating the process chamber so as to form a first pre-coating film on the inner surface of the process vessel exposed to the process chamber, followed by supplying second film-forming gases into the process chamber to form a second pre-coating film on the first pre-coating film. A semiconductor wafer is loaded into the process chamber. Then, the first gases are supplied into the process chamber while heating the process chamber so as to form a first layer on the wafer, followed by supplying the second gases into the process chamber so as to form a second layer on the first layer. A silane gas is supplied into the process chamber to permit silicon material to be deposited on the surface of the second layer stacked on the first layer. Finally, the wafer having the first and second multi-film is unloaded out of the process vessel.
    • 在预处理中,通过将第一成膜气体提供到处理容器的处理室中,同时加热处理室以在暴露于该处理容器的处理容器的内表面上形成第一预涂膜,从而在预处理中形成预涂膜 处理室,然后将第二成膜气体供应到处理室中,以在第一预涂膜上形成第二预涂膜。 将半导体晶片装载到处理室中。 然后,在加热处理室的同时,将第一气体供给到处理室中,以在晶片上形成第一层,然后将第二气体供应到处理室中,以在第一层上形成第二层。 将硅烷气体供应到处理室中以允许硅材料沉积在堆叠在第一层上的第二层的表面上。 最后,将具有第一和第二多层膜的晶片从处理容器中卸载出来。
    • 9. 发明申请
    • BIOLOGICAL SAMPLE MEASURING DEVICE AND METHOD FOR MEASURING BIOLOGICAL SAMPLE USING SAME
    • 生物样品测量装置和使用其测量生物样品的方法
    • US20130337571A1
    • 2013-12-19
    • US14003090
    • 2012-05-10
    • Daiki MizuokaHiroyuki TokunagaTsuyoshi Takahashi
    • Daiki MizuokaHiroyuki TokunagaTsuyoshi Takahashi
    • G01N33/66
    • G01N33/66G01N27/3273G01N27/3274Y10T436/144444
    • With this biological sample measuring device, the determination section performs measurement at specific intervals in a first measurement period from the start of measurement until a first time, and performs measurement at specific intervals in a second measurement period that comes after the first measurement period, calculates the difference between the measurement values in corresponding specific periods, and finds a plurality of first difference determination values, on the basis of a plurality of current values measured in the first measurement period and a plurality of current values measured in the second measurement period, finds a second difference determination value by finding the difference at specific intervals in the plurality of first difference determination values, and determines whether or not a reagent movement error and/or exposure error of the biological sample measurement sensor has occurred, on the basis of the first and second difference determination values.
    • 在该生物样本测定装置中,决定部在从开始测量直到第一次的第一测量期间内以特定间隔进行测量,并且在第一测定周期之后的第二测定期间内,以规定间隔进行测定, 基于在第一测量周期中测量的多个电流值和在第二测量周期中测量的多个电流值,在相应的特定周期中的测量值之间的差异,并且找到多个第一差分确定值,找到 第二差分确定值,通过在多个第一差分确定值中以特定间隔找到差异,并且基于第一差异确定值确定生物样本测量传感器的试剂移动误差和/或曝光误差是否已经发生 和第二差分确定值。