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1. 发明授权

US07300881B2 Plasma etching method 有权
标题翻译：等离子蚀刻法
公开(公告)号：US07300881B2
公开(公告)日：2007-11-27
申请号：US10935103
申请日：2004-09-08
申请人： Kazuya Kato , Katsuhiko Ono , Hideki Mizuno , Masahiro Ogasawara , Akinori Kitamura , Noriyuki Kobayashi , Yasushi Inata , Shin Okamoto
发明人： Kazuya Kato , Katsuhiko Ono , Hideki Mizuno , Masahiro Ogasawara , Akinori Kitamura , Noriyuki Kobayashi , Yasushi Inata , Shin Okamoto
IPC分类号： H01L21/302 , H01L21/3065
CPC分类号： H01J37/32082 , H01L21/31116 , H01L21/31138
摘要： A plasma etching is performed on a substrate having a pattern wherein an interval between neighboring openings formed on a resist mask is equal to or less than 200 nm, wherein the etching is performed by converting a processing gas comprising an active species generating gas which includes a compound having carbon and fluorine, and a nonreactive gas which includes xenon gas into a plasma. The nonreactive gas further includes argon gas.
摘要翻译：在具有图案的基板上进行等离子体蚀刻，其中形成在抗蚀剂掩模上的相邻开口之间的间隔等于或小于200nm，其中通过将包括活性物质产生气体的处理气体转化为包括具有碳和氟的化合物，以及包含氙气进入等离子体的非反应性气体。非反应性气体还包括氩气。

2. 发明申请

US20050101137A1 Plasma etching method 有权
标题翻译：等离子蚀刻法
公开(公告)号：US20050101137A1
公开(公告)日：2005-05-12
申请号：US10935103
申请日：2004-09-08
申请人： Kazuya Kato , Katsuhiko Ono , Hideki Mizuno , Masahiro Ogasawara , Akinori Kitamura , Noriyuki Kobayashi , Yasushi Inata , Shin Okamoto
发明人： Kazuya Kato , Katsuhiko Ono , Hideki Mizuno , Masahiro Ogasawara , Akinori Kitamura , Noriyuki Kobayashi , Yasushi Inata , Shin Okamoto
IPC分类号： H01L21/28 , H01L21/3065 , H01L21/311 , H01L21/768 , H01L21/302 , H01L21/461
CPC分类号： H01J37/32082 , H01L21/31116 , H01L21/31138
摘要： A plasma etching is performed on a substrate having a pattern wherein an interval between neighboring openings formed on a resist mask is equal to or less than 200 nm, wherein the etching is performed by converting a processing gas comprising an active species generating gas which includes a compound having carbon and fluorine, and a nonreactive gas which includes xenon gas into a plasma. The nonreactive gas further includes argon gas.
摘要翻译：在具有图案的基板上进行等离子体蚀刻，其中形成在抗蚀剂掩模上的相邻开口之间的间隔等于或小于200nm，其中通过将包括活性物质产生气体的处理气体转化为包括具有碳和氟的化合物，以及包含氙气进入等离子体的非反应性气体。非反应性气体还包括氩气。

3. 发明申请

US20080156441A1 PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTING BODY, AND SHIELD RING THEREOF 审中-公开
标题翻译：等离子体处理装置和电极板，电极支撑体及其护环
公开(公告)号：US20080156441A1
公开(公告)日：2008-07-03
申请号：US12040523
申请日：2008-02-29
申请人： Masahiro Ogasawara , Kazuya Kato , Toshifumi Nagaiwa , Kosuke Imafuku , Koichi Kazama
发明人： Masahiro Ogasawara , Kazuya Kato , Toshifumi Nagaiwa , Kosuke Imafuku , Koichi Kazama
IPC分类号： H01L21/306
CPC分类号： H01J37/32009 , H01J37/32082 , H01J37/32532 , H01J37/32623 , H01L21/3065
摘要： In a plasma apparatus 1 for performing plasma processing on a substrate W to be processed, an upper electrode 21, which faces opposite a susceptor 5 which is a lower electrode, has an electrode supporting body 22 and an electrode plate 23. In the center on the side of the electrode supporting body at the boundary between the two, a hollow 62, the dimensions of which are determined such that a resonance is generated at a frequency of supplied high-frequency electric power and an electric field orthogonal to the electrode plate 23 is generated inside, is provided. Furthermore, a shield ring which surrounds the electrode plate 23 has a shape in which the lower surface is in the same level as the electrode plate 23, and it is made of a material that is not easily eroded by the plasma. By this, processing small features becomes possible with uniform distribution of plasma and in less degradation due to change over time.
摘要翻译：在用于对待处理的基板W进行等离子体处理的等离子体装置1中，与作为下部电极的基座5相对的上部电极21具有电极支撑体22和电极板23。在两个边界处的电极支撑体侧的中心处，确定空腔62的尺寸，使得在提供的高频电力的频率和正交于设置电极板23。此外，围绕电极板23的屏蔽环具有下表面与电极板23处于相同水平面的形状，并且其由不容易被等离子体侵蚀的材料制成。由此，通过等离子体的均匀分布和由于随时间的变化而降低的劣化，处理小特征成为可能。

4. 发明授权

US06878234B2 Plasma processing device and exhaust ring 有权
标题翻译：等离子处理装置和排气环
公开(公告)号：US06878234B2
公开(公告)日：2005-04-12
申请号：US10416235
申请日：2001-11-02
申请人： Masahiro Ogasawara , Kazuya Kato
发明人： Masahiro Ogasawara , Kazuya Kato
IPC分类号： H05H1/46 , B01J19/08 , C23C16/00 , C23C16/509 , H01J37/32 , H01L21/00 , H01L21/205 , H01L21/302 , H01L21/3065 , C23F1/00 , C23C16/455 , H01L21/306
CPC分类号： H01J37/32834 , H01J37/3244 , H01L21/67069
摘要： A plasma processing apparatus having an evacuation ring with high plasma resistance and capable of minimizing abnormal discharge is provided. A processing chamber 100 includes a ceiling unit 110 at which an upper electrode 112 is provided and a container unit 120 having a lower electrode 122 provided to face opposite the upper electrode 112, on which a substrate can be placed. An evacuation ring 126 is provided around the lower electrode 122 so as to divide the space in the processing chamber 100 into a plasma processing space 102 and an evacuation space 104. At the evacuation ring 126, through holes 126a and blind holes 126b which are fewer than the through holes 126a and open toward the plasma processing space 102 are formed. An insulation coating constituted of Y2O3 is applied onto the surface of the evacuation ring 126 towards the plasma processing space 102.
摘要翻译：提供了一种具有高等离子体电阻并能够使异常放电最小化的排气环的等离子体处理装置。处理室100包括设置有上电极112的天花板单元110和具有设置成与上电极112相对设置的下电极122的容器单元120，可以放置基板。在下部电极122周围设置有排气环126，以将处理室100中的空间分成等离子体处理空间102和排气空间104.在排气环126处，通气孔126a和盲孔126b较少形成贯通孔126a并朝向等离子体处理空间102开口。将由Y 2 O 3构成的绝缘涂层施加到排气环126的表面上朝向等离子体处理空间102。

5. 发明申请

US20050126488A1 Plasma processing apparatus and evacuation ring 有权
标题翻译：等离子处理装置和疏散环
公开(公告)号：US20050126488A1
公开(公告)日：2005-06-16
申请号：US11047595
申请日：2005-02-02
申请人： Masahiro Ogasawara , Kazuya Kato
发明人： Masahiro Ogasawara , Kazuya Kato
IPC分类号： H05H1/46 , B01J19/08 , C23C16/00 , C23C16/509 , H01J37/32 , H01L21/00 , H01L21/205 , H01L21/302 , H01L21/3065
CPC分类号： H01J37/32834 , H01J37/3244 , H01L21/67069
摘要： A plasma processing apparatus having an evacuation ring with high plasma resistance and capable of minimizing abnormal discharge is provided. A processing chamber 100 includes a ceiling unit 110 at which an upper electrode 112 is provided and a container unit 120 having a lower electrode 122 provided to face opposite the upper electrode 112, on which a substrate can be placed. An evacuation ring 126 is provided around the lower electrode 122 so as to divide the space in the processing chamber 100 into a plasma processing space 102 and an evacuation space 104. At the evacuation ring 126, through holes 126a and blind holes 126b which are fewer than the through holes 126a and open toward the plasma processing space 102 are formed. An insulation coating constituted of Y2O3 is applied onto the surface of the evacuation ring 126 towards the plasma processing space 102.
摘要翻译：提供了一种具有高等离子体电阻并能够使异常放电最小化的排气环的等离子体处理装置。处理室100包括设置有上电极112的天花板单元110和具有设置成与上电极112相对设置的下电极122的容器单元120，可以放置基板。在下电极122周围设置有排气环126，以将处理室100中的空间分成等离子体处理空间102和抽空空间104。在排气环126处形成通孔126a和盲孔126b，盲孔126b比通孔126a少并且朝向等离子体处理空间102开口。由排气环126的表面向等离子体处理空间102施加由Y 2 O 3 3构成的绝缘涂层。

6. 发明授权

US07255773B2 Plasma processing apparatus and evacuation ring 有权
标题翻译：等离子处理装置和疏散环
公开(公告)号：US07255773B2
公开(公告)日：2007-08-14
申请号：US11047595
申请日：2005-02-02
申请人： Masahiro Ogasawara , Kazuya Kato
发明人： Masahiro Ogasawara , Kazuya Kato
IPC分类号： H01L21/3065 , C23C16/00 , C23C16/455
CPC分类号： H01J37/32834 , H01J37/3244 , H01L21/67069
摘要： A plasma processing apparatus having an evacuation ring with high plasma resistance and capable of minimizing abnormal discharge is provided. A processing chamber 100 includes a ceiling unit 110 at which an upper electrode 112 is provided and a container unit 120 having a lower electrode 122 provided to face opposite the upper electrode 112, on which a substrate can be placed. An evacuation ring 126 is provided around the lower electrode 122 so as to divide the space in the processing chamber 100 into a plasma processing space 102 and an evacuation space 104. At the evacuation ring 126, through holes 126a and blind holes 126b which are fewer than the through holes 126a and open toward the plasma processing space 102 are formed. An insulation coating constituted of Y2O3 is applied onto the surface of the evacuation ring 126 towards the plasma processing space 102.
摘要翻译：提供了一种具有高等离子体电阻并能够使异常放电最小化的排气环的等离子体处理装置。处理室100包括设置有上电极112的天花板单元110和具有设置成与上电极112相对设置的下电极122的容器单元120，可以放置基板。在下电极122周围设置有排气环126，以将处理室100中的空间分成等离子体处理空间102和抽空空间104。在排气环126处形成通孔126a和盲孔126b，盲孔126b比通孔126a少并且朝向等离子体处理空间102开口。由排气环126的表面向等离子体处理空间102施加由Y 2 O 3 3构成的绝缘涂层。

7. 发明申请

US20130234533A1 Wireless Power Transmission System 有权
标题翻译：无线传输系统
公开(公告)号：US20130234533A1
公开(公告)日：2013-09-12
申请号：US13871067
申请日：2013-04-26
申请人： Kazuya Kato , Kazuaki Higashibata
发明人： Kazuya Kato , Kazuaki Higashibata
IPC分类号： H04B5/00
CPC分类号： H04B5/0037 , H01G5/04 , H02J7/0044 , H02J7/025 , H02J17/00 , H02J50/12 , H02J50/90
摘要： A wireless power transmission system that includes a power transmission apparatus including a passive electrode and an active electrode and a power reception apparatus including passive electrodes and active electrode. When the power reception apparatus is longitudinally placed on the power transmission apparatus, the active electrodes are opposed to each other to cause electric power to be transmitted from the power transmission apparatus to the power reception apparatus. A facing area between the active electrodes in lateral placement of the power reception apparatus on the power transmission apparatus is made substantially equal to a facing area between the active electrodes in the longitudinal placement of the power reception apparatus on the power transmission apparatus.
摘要翻译：一种无线电力传输系统，其包括包括无源电极和有源电极的电力传输装置和包括无源电极和有源电极的电力接收装置。当电力接收装置纵向放置在电力传输装置上时，有源电极彼此相对，从而将电力从电力传输装置传送到电力接收装置。功率接收装置在动力传递装置上的侧向放置的有源电极之间的面对区域在动力传递装置的受电装置的纵向放置中基本上等于有源电极之间的相对面积。

8. 发明申请

US20100121590A1 TRAVEL SUPPORT SYSTEM, METHOD, AND PROGRAM 有权
标题翻译：旅行支持系统，方法和程序
公开(公告)号：US20100121590A1
公开(公告)日：2010-05-13
申请号：US12613778
申请日：2009-11-06
申请人： Kazuya Kato
发明人： Kazuya Kato
IPC分类号： G01R31/36
CPC分类号： B60W50/08 , B60L1/00 , B60L11/14 , B60L11/1816 , B60L11/1851 , B60L11/1861 , B60L2240/12 , B60L2240/62 , B60L2240/642 , B60L2240/645 , B60L2250/16 , B60L2260/54 , B60W10/26 , B60W10/30 , B60W50/14 , B60W2510/244 , B60W2550/402 , Y02T10/70 , Y02T10/7005 , Y02T10/7044 , Y02T10/705 , Y02T10/7072 , Y02T10/7077 , Y02T10/7291 , Y02T90/14 , Y02T90/16 , Y02T90/162
摘要： A travel support system for a vehicle includes: a required power amount obtaining unit determining a required power amount in a rechargeable battery required for travel of a predetermined section of a route; a remaining power amount obtaining unit determining a remaining power amount as the amount of power currently remaining in the rechargeable battery; an excess power amount obtaining unit determining an excess power amount as a portion of the remaining power amount in the rechargeable battery in excess of the required power amount; and a communication unit notifying a user of the vehicle of information indicating the availability of an electrical component of the vehicle in traveling the predetermined section, based on the excess power amount.
摘要翻译：一种用于车辆的旅行支持系统包括：所需电力获取单元，确定路线的预定部分行进所需的可再充电电池中所需的电力量; 剩余电量获取单元确定剩余电量作为可再充电电池中当前剩余的电量; 超过电力量获取单元，确定超过所述电力量的可再充电电池中剩余电量的一部分的过剩电量; 以及通信单元，其基于所述多余的功率量，向所述车辆的用户通知指示在所述预定部分行驶中所述车辆的电气部件的可用性的信息。

9. 发明申请

US20100032088A1 Method for production of a pressure-sensitive adhesive sheet 有权
标题翻译：压敏粘合片的制造方法
公开(公告)号：US20100032088A1
公开(公告)日：2010-02-11
申请号：US12588229
申请日：2009-10-08
申请人： Kiichiro Kato , Kazuya Kato , Takashi Takemoto
发明人： Kiichiro Kato , Kazuya Kato , Takashi Takemoto
IPC分类号： B32B38/04
CPC分类号： C09J7/20 , C09J2201/20 , Y10T156/1056 , Y10T428/24273
摘要： The present invention relates to a pressure sensitive adhesive sheet 1 comprising a base material 11 and a pressure sensitive adhesive layer 12 wherein a plurality of through holes 2 passing through one face of the pressure sensitive adhesive sheet 1 to the other face are formed. The hole diameter of the through holes 2 is 0.1 to 300 μm and the hole density is 30 to 50,000/100 cm2. It is preferable to form the through holes 2 using a laser beam machining. According the pressure sensitive adhesive sheet 1, an air trapping or a blister can be prevented or removed without disfiguring the pressure sensitive adhesive sheet and while securing a sufficient adhesive strength.
摘要翻译：本发明涉及一种压敏粘合片1，其包括基材11和压敏粘合剂层12，其中形成有多个穿过压敏粘合片1的一面的通孔2到另一个面。通孔2的孔径为0.1〜300μm，空穴密度为30〜50,000 / 100cm 2。优选使用激光束加工形成通孔2。根据压敏粘合片1，可以防止或去除空气捕获或起泡，而不会使压敏粘合片变形，同时确保足够的粘合强度。

10. 发明申请

US20100010697A1 VEHICULAR DISPLAY DEVICE, METHOD OF CONTROLLING THE SAME, PROGRAM, AND STORAGE MEDIUM HAVING PROGRAM STORED THEREIN 有权
标题翻译：车辆显示装置，控制其的方法，存储有程序的程序和存储介质
公开(公告)号：US20100010697A1
公开(公告)日：2010-01-14
申请号：US12310438
申请日：2007-07-12
申请人： Takaya Soma , Toshiaki Niwa , Kazuya Kato
发明人： Takaya Soma , Toshiaki Niwa , Kazuya Kato
IPC分类号： B60W20/00 , G01C21/36
CPC分类号： B60W40/10 , B60K6/445 , B60L7/14 , B60L11/123 , B60L11/14 , B60L11/1851 , B60L11/1861 , B60L2240/12 , B60L2240/14 , B60L2240/62 , B60L2240/642 , B60L2240/68 , B60L2240/72 , B60L2250/16 , B60L2260/26 , B60L2260/52 , B60L2260/54 , B60W10/04 , B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , B60W30/182 , B60W50/082 , B60W50/14 , B60W2540/04 , B60W2550/402 , B60Y2200/90 , G01C21/3469 , G01C21/3676 , G01C21/3697 , G08G1/096838 , G08G1/096866 , Y02T10/6217 , Y02T10/6239 , Y02T10/6286 , Y02T10/7005 , Y02T10/7044 , Y02T10/705 , Y02T10/7077 , Y02T10/7291 , Y02T90/16 , Y02T90/161 , Y02T90/162 , Y02T90/163
摘要： A vehicle has a plurality of traveling modes. A display device for the vehicle comprises: a display unit displaying map information; and a control unit causing the display unit to display recognizably, at a portion of roads in the map information, traveling modes that correspond to the roads. Preferably, the control unit sets a destination in response to an instruction received from an operator, searches for a traveling route extending from a starting point to the destination, divides the traveling route into segments, and associates one of the traveling modes with each of the segments. More preferably, the control unit causes the display unit to display the plurality of candidate traveling routes, each with the traveling mode overlaid thereon, and selects in response to an instruction of the operator one traveling route planned to be taken among the plurality of candidate traveling routes.
摘要翻译：车辆具有多个行驶模式。一种用于车辆的显示装置，包括：显示单元，显示地图信息; 以及控制单元，其使得所述显示单元在所述地图信息中的道路的一部分处可识别地显示与所述道路相对应的行驶模式。优选地，控制单元响应于从操作者接收到的指令来设置目的地，搜索从起点延伸到目的地的行进路线，将行驶路线划分成段，并将行驶模式之一与每个行驶路线细分。更优选地，控制单元使显示单元显示多个候选行进路线，每个候选行驶路线各自具有重叠的行驶模式，并且响应于操作者的指令选择在多个候选行驶中计划采取的行驶路线路线。

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