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    • 2. 发明授权
    • Device and method for inspecting photomasks and products fabricated using the same
    • 用于检查光掩模和使用其制造的产品的装置和方法
    • US07424145B2
    • 2008-09-09
    • US10607039
    • 2003-06-27
    • Tsutomu HorieKazutoshi Ohta
    • Tsutomu HorieKazutoshi Ohta
    • G06K9/00G06F9/45
    • G06T7/0006G01N21/95607G03F1/84G06T2207/30148
    • An inspection device for photomasks and products fabricated using the same, capable of reducing the time from inspection to repair. A reference data generator generates reference data that is based on design data and includes sensitivity class codes that differentiate designated pattern functions such as signal lines and power supply lines by means of inspection sensitivity. Then an inspection sensitivity setter allocates the desired inspection sensitivity for each sensitivity class code. An image acquiring unit photographs a subject of inspection (e.g., photomask or wafer), and a comparator detects a defect by comparing the photographed image with the reference data. When a defect is found, a reference data extractor extracts the region of the reference data that corresponds to the defect location. A defect registration determinator refers to the sensitivity class codes for the region and determines whether to register the defect. This reduces the number of defects that are registered.
    • 一种用于光掩模和使用其制造的产品的检查装置,能够减少从检查到修理的时间。 参考数据生成器生成基于设计数据的参考数据,并且包括通过检测灵敏度来区分诸如信号线和电源线的指定图案功能的灵敏度等级代码。 然后检查灵敏度设置器为每个灵敏度类别代码分配所需的检查灵敏度。 图像获取单元拍摄检查对象(例如,光掩模或晶片),并且比较器通过将拍摄的图像与参考数据进行比较来检测缺陷。 当发现缺陷时,参考数据提取器提取与缺陷位置相对应的参考数据的区域。 缺陷登记确定器是指区域的敏感度类别代码,并确定是否注册缺陷。 这减少了注册的缺陷数量。
    • 6. 发明授权
    • Elevator control apparatus
    • 电梯控制装置
    • US4653611A
    • 1987-03-31
    • US819807
    • 1986-01-17
    • Kazutoshi OhtaMinoru Nakata
    • Kazutoshi OhtaMinoru Nakata
    • B66B1/06B66B5/00B66B5/02G01V1/00
    • B66B5/022
    • A period of time required since the output signal of an acceleration detector for detecting an earthquake exceeds a first set level, until it reaches a second set level greater in value than the first set level, is measured, and a calculation is executed on the basis of the measured value thereby to predict the scale of the earthquake, and a resetting period of time since an elevator is brought to a stoppage operation due to the earthquake, until the stoppage operation is released, is calculated on the basis of the predicted scale of the earthquake. Thus, the period of time till the reset is automatically set is variable according to the scale of the earthquake.
    • 测量用于检测地震的加速度检测器的输出信号所需的时间超过第一设定水平,直到达到比第一设定水平高的第二设定水平,并且基于 的测量值,从而预测地震的规模,并且基于由于地震引起的电梯到停止操作的直到停止操作被释放的重置时间段是基于预测的 地震 因此,直到复位的时间段自动设定是根据地震的规模而变化的。
    • 9. 发明授权
    • Damper device for elevator rope
    • 电梯绳索减震装置
    • US4079816A
    • 1978-03-21
    • US738744
    • 1976-11-03
    • Kazutoshi Ohta
    • Kazutoshi Ohta
    • F16F15/02B66B7/06F16F15/04
    • B66B7/06
    • A dynamic damper device includes a damping rod traversing several parallel hoisting ropes for an elevator car adjacent to the car and projecting beyond the outermost ropes. All the ropes are fixed to the damping rod by means of two opposite push plates, and fastening bolts. The rod has one of the projecting end portions longer than the other of the projecting end portions and is provided at the extremity with an additional weight. Thus the device has the center of gravity offset from the mid-point between the outermost ropes.
    • 一种动态阻尼器装置包括一个阻尼杆,该阻尼杆穿过几个平行的提升绳索,用于邻近轿厢的电梯轿厢并突出超出最外面的绳索。 所有的绳索通过两个相对的推板和紧固螺栓固定到阻尼杆上。 杆具有比另一个突出端部长的突出端部中的一个,并且在末端设置有额外的重量。 因此,该装置的重心偏离最外面的绳索之间的中点。
    • 10. 发明授权
    • Method and apparatus for verifying mask pattern data according to given rules
    • 根据给定规则验证掩模图案数据的方法和装置
    • US06708323B2
    • 2004-03-16
    • US09778075
    • 2001-02-07
    • Kazutoshi OhtaTsutomu Horie
    • Kazutoshi OhtaTsutomu Horie
    • G06F1750
    • G03F1/70G03F7/70433
    • Pattern data of a designed circuit, including a plurality of feature data is verified according to given rules (S2). If feature data not meeting the rules exists, contents of the feature data are outputted as an error (S3), and if a designer considers the error is not problematic (false error) in view of characteristics of the circuit (S5), he inputs the error information indicating the error is false to add it to a file including the pattern data (S8). The file is read to perform processing on feature data to obtain exposure data for manufacturing a mask, and the feature data processed is verified according to given rules. If any feature data not meeting the rule exists, it is judged whether the contents of the feature data are included in the error information. If it is judged to be included, further judged whether the error is false. If false, the process is continued to repeat for the rest data.
    • 根据给定的规则(S2)验证包括多个特征数据的设计电路的模式数据。 如果存在不符合规则的特征数据,则特征数据的内容作为错误输出(S3),并且如果设计者鉴于电路特性(S5)考虑了误差(假错误)(S5),则他输入 指示错误的错误信息为假,将其添加到包括图案数据的文件(S8)。 读取该文件以对特征数据执行处理以获得用于制造掩模的曝光数据,并且根据给定的规则验证处理的特征数据。 如果存在不符合规则的特征数据,则判断特征数据的内容是否包含在错误信息中。 如果判断为包含,则进一步判断错误是否为假。 如果为false,则继续对剩余数据重复该过程。