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    • 4. 发明授权
    • DC or HF ion source
    • DC或HF离子源
    • US5369337A
    • 1994-11-29
    • US104899
    • 1993-08-12
    • Kenichi YanagiMitsuo KatoKazuya TsurusakiToshio TaguchiKenji AtarashiyaTadashi RokkakuIchiro Yamashita
    • Kenichi YanagiMitsuo KatoKazuya TsurusakiToshio TaguchiKenji AtarashiyaTadashi RokkakuIchiro Yamashita
    • H01J27/08H01J27/18H01J37/08H01J37/317H01J27/02
    • H01J27/08H01J27/18H01J37/08H01J37/3178H01J2237/0822
    • A DC or high frequency ion source comprising a hollow cathode and a substantially hollow anode for applying a DC or alternating voltage; a gas inlet disposed at a first side of the cathode for supplying a discharge gas into the cathode; a cathode heater disposed between the anode and the cathode; a magnet disposed adjacent the anode to thereby improve the uniformity of a plasma; an ion extraction outlet disposed at a second side of the cathode opposite to the gas inlet and having an elongated rectangular shape; and an ion extraction electrode and an acceleration electrode for controlling the energy of extracted ions. Both the anode and cathode comprise substantially hollow boxes. The cathode includes an elongated rectangular cross section and is disposed inside the substantially hollow anode. The ion extraction electrode and the acceleration electrode have an elongated rectangular shape and an opening coextensive with the ion extraction outlet. The ion extraction electrode and the acceleration electrode are disposed adjacent, and aligned with, the ion extraction outlet. The ion source can be formed with an arcuate shape to accommodate round objects. The ion source can also be formed integrally with a sputtering device.
    • 一种DC或高频离子源,包括中空阴极和用于施加DC或交流电压的基本中空的阳极; 设置在阴极的第一侧的气体入口,用于向阴极供应放电气体; 设置在阳极和阴极之间的阴极加热器; 设置在阳极附近的磁体,从而提高等离子体的均匀性; 离子提取出口,设置在与气体入口相对的阴极的第二侧,并且具有细长的矩形形状; 以及用于控制提取的离子的能量的离子提取电极和加速电极。 阳极和阴极都包括基本上空心的盒子。 阴极包括细长的矩形横截面并且设置在基本上空心的阳极内。 离子提取电极和加速电极具有细长的矩形形状和与离子提取出口共同延伸的开口。 离子提取电极和加速电极被设置成与离子提取出口相邻并对齐。 离子源可以形成为弓形以容纳圆形物体。 离子源也可以与溅射装置一体地形成。