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    • 1. 发明授权
    • Polishing apparatus
    • 抛光设备
    • US07021991B2
    • 2006-04-04
    • US10670499
    • 2003-09-26
    • Kazuo ShimizuShinro OhtaAkihiro Tsukada
    • Kazuo ShimizuShinro OhtaAkihiro Tsukada
    • B24B49/00
    • B24B37/013B23H5/08B24B37/046B24B49/12G01B11/0625
    • A polishing apparatus has a polishing table having a polishing surface, a top ring for holding a workpiece to be polished and pressing the workpiece against the polishing surface on the polishing table, and a film thickness measuring device embedded in the polishing table. The film thickness measuring device includes a light source for applying light having a predetermined wavelength to a surface of the workpiece, a spectroscope for separating light reflected from the surface of the workpiece, and a charge coupled device array for capturing light separated by the spectroscope. The polishing apparatus also has a controller operable to analyze information captured by the charge coupled device array over the entire surface of the workpiece to obtain a film thickness at a desired point on the surface of the workpiece.
    • 抛光装置具有:具有研磨面的研磨台,用于保持待研磨的工件的顶环,并将工件压靠在研磨台上的研磨面上,以及嵌入在研磨台中的膜厚测量装置。 膜厚测量装置包括:用于将一个具有预定波长的光施加到工件的表面的光源,用于分离从工件表面反射的光的分光器和用于捕获由分光镜分离的光的电荷耦合器件阵列。 抛光装置还具有控制器,其可操作以分析由电荷耦合器件阵列在工件的整个表面上捕获的信息,以在工件表面上的期望点处获得膜厚度。
    • 2. 发明授权
    • Image processor and image processing method
    • 图像处理器和图像处理方法
    • US08107725B2
    • 2012-01-31
    • US12325444
    • 2008-12-01
    • Akihiro Tsukada
    • Akihiro Tsukada
    • G06K9/00
    • G06K9/4652G06K9/4671
    • An image processor according to the present invention is configured to generate a plurality of multiresolution images of different resolutions from an input image (S16), to set a correlation evaluation function for each multiresolution image, calculate a correlation value between the correlation evaluation function and each pixel in the multiresolution image, and extract a position of a local region on the basis of the correlation value (S18), and to set a size of the local region according to the resolution of the multiresolution image (S22), and to detect an object in the local region. This enables extraction of the local region at an appropriate position and in an appropriate range for a characteristic portion of the input image. For this reason, a target range is appropriately limited and detection of the object is quickly carried out without deterioration of accuracy.
    • 根据本发明的图像处理器被配置为从输入图像生成不同分辨率的多个多分辨率图像(S16),以设置每个多分辨率图像的相关性评估函数,计算相关评估函数和每个 并且基于相关值提取局部区域的位置(S18),并根据多分辨率图像的分辨率设置局部区域的大小(S22),并且检测多个分辨率图像的分辨率 在当地的对象。 这使得能够在输入图像的特征部分的适当位置和适当范围内提取局部区域。 因此,适当地限制目标范围,并且在不会降低准确性的情况下快速进行物体的检测。
    • 4. 发明申请
    • IMAGE PROCESSOR AND IMAGE PROCESSING METHOD
    • 图像处理器和图像处理方法
    • US20090154799A1
    • 2009-06-18
    • US12325444
    • 2008-12-01
    • Akihiro Tsukada
    • Akihiro Tsukada
    • G06K9/64G06K9/00
    • G06K9/4652G06K9/4671
    • An image processor according to the present invention is configured to generate a plurality of multiresolution images of different resolutions from an input image (S16), to set a correlation evaluation function for each multiresolution image, calculate a correlation value between the correlation evaluation function and each pixel in the multiresolution image, and extract a position of a local region on the basis of the correlation value (S18), and to set a size of the local region according to the resolution of the multiresolution image (S22), and to detect an object in the local region. This enables extraction of the local region at an appropriate position and in an appropriate range for a characteristic portion of the input image. For this reason, a target range is appropriately limited and detection of the object is quickly carried out without deterioration of accuracy.
    • 根据本发明的图像处理器被配置为从输入图像生成不同分辨率的多个多分辨率图像(S16),以设置每个多分辨率图像的相关性评估函数,计算相关评估函数和每个 并且基于相关值提取局部区域的位置(S18),并根据多分辨率图像的分辨率设置局部区域的大小(S22),并且检测多个分辨率图像的分辨率 在当地的对象。 这使得能够在输入图像的特征部分的适当位置和适当范围内提取局部区域。 因此,适当地限制目标范围,并且在不会降低准确性的情况下快速进行物体的检测。