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    • 1. 发明授权
    • Method of manufacturing carbon nanotubes and/or fullerenes, and manufacturing apparatus for the same
    • 碳纳米管和/或富勒烯的制造方法及其制造装置
    • US06884404B2
    • 2005-04-26
    • US09863291
    • 2001-05-24
    • Kazunori AnazawaKei ShimotaniHiroyuki WatanabeMasaaki Shimizu
    • Kazunori AnazawaKei ShimotaniHiroyuki WatanabeMasaaki Shimizu
    • B82B3/00C01B31/02D01F9/12
    • B82Y30/00B82Y40/00C01B32/152C01B32/166D01F9/12Y10S977/844
    • The method of manufacturing carbon nanotubes and/or fullerenes reduces the pressure inside a system to 1.3 Pa or lower, supplies a carboniferous liquid state material to raise the pressure inside the system to at least 1.3 kPa to 93.3 kPa, generates arc discharges, supplies the carboniferous liquid state material in discharge plasma created by the arc discharges, and disintegrates or excites the carboniferous liquid state material, thereby producing the carbon nanotubes and/or the fullerenes. And, the manufacturing apparatus is equipped with at least a pair of electrodes that generate arc discharges into a vacuum chamber to create discharge plasma, a gas supply unit capable of supplying a carrier gas into the vacuum chamber, and a raw material supply unit capable of supplying a carboniferous liquid state material in the discharge plasma through an introduction tube. Thus, the invention provides the manufacturing method and manufacturing apparatus that allow continuous production of high purity carbon nanotubes and/or fullerenes with high production efficiency.
    • 制造碳纳米管和/或富勒烯的方法将系统内的压力降低至1.3Pa以下,供给含磷液态物质,将系统内的压力提高至至少1.3kPa至93.3kPa,产生电弧放电, 通过电弧放电产生的放电等离子体中的含磷液态物质,并且分解或激发含磷液态物质,从而制造碳纳米管和/或富勒烯。 并且,制造装置配备有至少一对电极,其产生电弧放电到真空室中以产生放电等离子体,能够将载气供应到真空室中的气体供给单元和能够 通过导入管在放电等离子体中供给含磷液态物质。 因此,本发明提供了能够以高生产效率连续生产高纯度碳纳米管和/或富勒烯的制造方法和制造装置。