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    • 4. 发明授权
    • Bright and dark field switching device and microscope
    • 明暗现场切换装置及显微镜
    • US06373626B1
    • 2002-04-16
    • US09708626
    • 2000-11-09
    • Shoichi TanakaHidekazu SanoHitoshi Isobe
    • Shoichi TanakaHidekazu SanoHitoshi Isobe
    • G02B2106
    • G02B21/125
    • A bright and dark field switching device, according to the present invention, comprises a glare-proof filter 31 and a condenser lens 32 for a dark field, a guide mechanism 40, and a switching mechanism 60. The glare-proof filter 31 and the condenser lens 32 for a dark field are arranged on both sides with an optical path L of an illuminating optical system interposed therebetween. The guide mechanism 40 holds the glare-proof filter 31 and the condenser lens 32 for a dark field such that they can be moved to the optical path L and can be returned from the optical path L. The switching mechanism 60 moves the glare-proof filter 31 and the condenser lens 32 for a dark field to the optical path L and returns them from the optical path L. Further, the switching mechanism 60 moves the glare-proof filter 31 together so as to position the same on the optical path L only when returning the condenser lens 32 for a dark field from the optical path L.
    • 根据本发明的明暗场切换装置包括防眩光滤光器31和用于暗场的聚光透镜32,引导机构40和切换机构60.防眩光滤光器31和 用于暗场的聚光透镜32布置在其两侧的照射光学系统的光路L的两侧。 引导机构40保持用于暗场的防眩光滤光器31和聚光透镜32,使得它们能够移动到光路L并且可以从光路L返回。切换机构60移动防眩光 滤光器31和用于暗场的聚光透镜32到光路L,并从光路L返回。此外,切换机构60将防眩光滤光器31一起移动,以将其定位在光路L上 仅当从光路L返回用于暗场的聚光透镜32时。
    • 6. 发明授权
    • Distance measuring apparatus capable of measuring plural distance data
for calculated angle ranges
    • 能够测量计算出的角度范围的多个距离数据的距离测量装置
    • US5691725A
    • 1997-11-25
    • US609904
    • 1996-02-29
    • Shoichi Tanaka
    • Shoichi Tanaka
    • G01C3/06G01S7/32G01S7/481G01S7/487G01S7/497G01S13/08G01S17/36G01S17/42G01S17/46G01S17/93G08G1/16G01S13/06
    • G01S17/42G01S13/08G01S17/36G01S17/46G01S7/4817G01S7/487G01S7/497
    • In a distance measuring apparatus, a large number of distance data within a certain calculation angle region are acquired so as to obtain distance data with high reliability. The distance measuring apparatus is comprised of: a transmitter/receiver device including at least one of a transmitter for projecting electromagnetic waves while scanning the electromagnetic waves, and a receiver for receiving reflection waves of the electromagnetic waves reflected from an object while scanning the reflection waves; an angle detecting apparatus for detecting at least one of an angle when the electromagnetic waves are projected and an angle when the reflection waves are received; a distance calculating apparatus for calculating a distance up to the object corresponding to the angle based upon a relationship between the electromagnetic waves and the reflection waves, and for using a calculation result as detection data; and a data processing apparatus for acquiring distance data in a calculation angle region corresponding to a plurality of the distance calculations based upon the detection data obtained during a plurality of distance calculations.
    • 在距离测量装置中,获取一定计算角度区域内的大量距离数据,以获得高可靠性的距离数据。 距离测量装置包括:发射器/接收器装置,其包括用于在扫描电磁波的同时投射电磁波的发射器中的至少一个;以及接收器,用于在扫描反射波期间接收从物体反射的电磁波的反射波 ; 角度检测装置,用于检测当电磁波投射时的角度和接收反射波时的角度中的至少一个; 距离计算装置,用于根据电磁波和反射波之间的关系计算与该角度对应的物体的距离,并使用计算结果作为检测数据; 以及数据处理装置,用于基于在多个距离计算期间获得的检测数据来获取与多个距离计算相对应的计算角度区域中的距离数据。
    • 8. 发明授权
    • Process simulation system
    • 过程模拟系统
    • US07657410B2
    • 2010-02-02
    • US10578241
    • 2004-11-09
    • Kazuaki SerizawaShoichi TanakaKatsuyoshi Ishida
    • Kazuaki SerizawaShoichi TanakaKatsuyoshi Ishida
    • G06F9/45
    • G05B19/41885G05B2219/32341G05B2219/32346G06Q10/04Y02P90/12Y02P90/26Y02P90/86
    • A tabular form element arrangement data describing the arrangement of various component elements constituting a production system along the work flow in a combination of process identification names with component element names, is prepared. Element definition files describing programs for simulating the operations of various component elements are prepared. A program preparation unit sequentially reads component element names combined with process identification names from the element arrangement data and sequentially reads the element definition files corresponding to the read component element names. A variable array containing variables described in respective element definition files is prepared simultaneously along with an initial process program array containing programs described in respective definition files and a simulation program array. The initial process programs contained in the initial process program array are executed to correspond variables referring to each other and the operations of various component elements constituting a production system are simulated.
    • 准备了以过程识别名称与组件元素名称的组合来描述沿着工作流程构成生产系统的各种组成元素的布置的表格形式元素排列数据。 描述描述用于模拟各种组件元素的操作的程序的元素定义文件。 程序准备单元从元件排列数据顺序地读取与处理标识名称组合的组成元件名称,并且顺序地读取与读取的组件元件名称对应的元素定义文件。 包含相应元件定义文件中描述的变量的变量数组与包含各自定义文件中描述的程序的初始过程程序阵列以及模拟程序阵列同时准备。 执行包含在初始处理程序阵列中的初始处理程序以对应于彼此参考的变量,并且模拟构成生产系统的各种组成元素的操作。
    • 9. 发明申请
    • Laser processing apparatus
    • 激光加工设备
    • US20090283506A1
    • 2009-11-19
    • US12453613
    • 2009-05-15
    • Kenji OkabeShoichi TanakaMasashi Kurokawa
    • Kenji OkabeShoichi TanakaMasashi Kurokawa
    • B23K26/38B23K26/42
    • B23K26/0613B23K26/0604B23K26/066B23K2101/36
    • A laser processing apparatus is provided with a first laser oscillator for laser CVD and a second laser oscillator for laser repair in a laser oscillation section. Either one of the first or second laser beam is irradiated by switching the first and second laser oscillators by a laser oscillator switch portion of a main body section. An optical path forming member is disposed such that the first or second laser beam, whichever is irradiated, will take the same optical path and reach a sample, after passing a common slit, to perform laser processing on the sample. Further, an objective lens is configured to be switched to an objective lens having a magnification corresponding to a wavelength of the laser beam irradiated from the laser oscillation section by an objective lens switch section of an objective lens section.
    • 激光加工装置设置有用于激光CVD的第一激光振荡器和用于激光振荡部分中的激光修复的第二激光振荡器。 通过主体部分的激光振荡器开关部分切换第一和第二激光振荡器来照射第一或第二激光束中的任一个。 光路形成部件被设置为使得第一激光束或第二激光束(以照射者为准)在通过公共狭缝之后将采取相同的光路并到达样品,以对样品进行激光处理。 此外,物镜被配置为通过物镜部的物镜切换部切换到具有与从激光振荡部照射的激光束的波长相对应的倍率的物镜。