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    • 1. 发明授权
    • Optical waveguide circuit module
    • 光波导电路模块
    • US06591044B2
    • 2003-07-08
    • US09961371
    • 2001-09-25
    • Kazuhisa KashiharaKazutaka NaraTunetoshi SaitoTakeshi Nakajima
    • Kazuhisa KashiharaKazutaka NaraTunetoshi SaitoTakeshi Nakajima
    • G02B610
    • G02B6/12014G02B6/12023G02B6/1203G02B6/126
    • An optical waveguide circuit module of the invention is a highly reliable optical waveguide circuit module where cracks are not generated in an optical waveguide circuit chip housed even under a high temperature and high humidity environment. An optical waveguide circuit chip (25) comprises a waveguide forming region (10) formed on a substrate (1). The waveguide forming region (10) has a waveguide configuration sequentially connecting optical input waveguides (2), a first slab waveguide (3), an arrayed waveguide (4) made of a plurality of channel waveguides (4a) arranged side by side, the channel waveguides having a different length each other, a second slab waveguide (5), and a plurality of optical output waveguides (6) arranged side by side.
    • 本发明的光波导电路模块是即使在高温高湿环境下也容纳的光波导电路芯片中也不产生裂纹的高可靠性的光波导路模块。 光波导电路芯片(25)包括形成在基板(1)上的波导形成区域(10)。 波导形成区域(10)具有顺序地连接光输入波导(2),第一平板波导(3),由并排布置的多个通道波导(4a)构成的阵列波导(4)的波导结构, 具有彼此不同长度的通道波导,第二平板波导(5)和并排布置的多个光学输出波导(6)。
    • 2. 发明授权
    • Optical waveguide circuit device
    • 光波导电路器件
    • US06829418B2
    • 2004-12-07
    • US09955120
    • 2001-09-19
    • Kazuhisa KashiharaYoshinobu NekadoKazutaka NaraTunetoshi Saito
    • Kazuhisa KashiharaYoshinobu NekadoKazutaka NaraTunetoshi Saito
    • G02B626
    • G02B6/12011G02B6/12014G02B6/1203
    • An optical waveguide circuit device strong in impact strength in dropping, etc. is provided. A waveguide pattern is formed on a silicon substrate in this optical waveguide circuit device. For example, this waveguide pattern has an optical input waveguide, a first slab waveguide, an arrayed waveguide including a plurality of channel waveguides having lengths different from each other and arranged side by side, a second slab waveguide, and a plurality of optical output waveguides arranged side by side. The first slab waveguide is separated on a cross separating face crossing an optical path passing the first slab waveguide. A temperature dependence in light transmission central wavelength of an arrayed waveguide grating is reduced by sliding and moving a separating slab waveguide side by a slide moving member along the separating face depending on temperature. The cross separating face and a noncross separating face communicated with this cross separating face are set to faces not conformed to a cleavage plane of the substrate.
    • 提供了一种在下降时具有强冲击强度的光波导电路装置。 在该光波导路电路装置中,在硅基板上形成波导图案。 例如,该波导图案具有光输入波导,第一平板波导,包括具有彼此长度不同并且并排布置的多个通道波导的阵列波导,第二平板波导和多个光输出波导 并排排列 第一平板波导在交叉穿过第一平板波导的光路的交叉分离面上分离。 阵列波导光栅的透光中心波长的温度依赖性通过滑动移动部件沿着分离面滑动并移动,根据温度而减小。 交叉分离面和与该交叉分离面连通的非交叉分离面被设定为不符合基板的解理面。
    • 4. 发明授权
    • Optical waveguide circuit
    • 光波导电路
    • US06501896B2
    • 2002-12-31
    • US09964684
    • 2001-09-28
    • Kazutaka NaraTakeshi NakajimaKazuhisa Kashihara
    • Kazutaka NaraTakeshi NakajimaKazuhisa Kashihara
    • G02B610
    • G02B6/126G02B6/105G02B6/12023G02B6/1203G02B6/132
    • The present invention relates to an optical waveguide circuit such as an arrayed waveguide grating, etc. A lower cladding is formed on a silicon substrate. A core having the following waveguide construction is formed thereon. That is, an input side slab waveguide is connected to the emission side of a plurality of incidence waveguides, a plurality of arrayed waveguides having different lengths form each other are juxtaposed at and connected to the emission side thereof, an output side slab waveguide is further connected to the emission side thereof, and a plurality of emission waveguides are connected to the emission side thereof, thereby causing the abovementioned waveguide construction. The upper cladding covers up the core. The cladding and core are made of silica-based glass, wherein the value B of birefringence occurring in said optical waveguide portion is |B|≦5.34×10−5, and &agr;s−2.0×10−7≦&agr;g ≦&agr;s+2.0×10−7 is established where it is assumed that the thermal expansion coefficient of the upper cladding is &agr;g, and the thermal expansion coefficient of a silicon substrate is &agr;s.
    • 本发明涉及诸如阵列波导光栅等的光波导电路。在硅衬底上形成下包层。 在其上形成具有以下波导结构的芯。 也就是说,输入侧平板波导连接到多个入射波导的发射侧,彼此不同长度的多个阵列波导并置并连接到发射侧,输出侧平板波导进一步 连接到其发射侧,并且多个发射波导连接到其发射侧,从而引起上述波导结构。 上部包层覆盖核心。 包层和芯由二氧化硅基玻璃制成,其中在所述光波导部分中出现的双折射值B为| B | <= 5.34×10-5,而α≤2.0×10-7 <= alphag <= alphas + 2.0 建立了x10-7,其中假定上包层的热膨胀系数为alphag,硅衬底的热膨胀系数为α。
    • 5. 发明授权
    • Optical waveguide circuit
    • 光波导电路
    • US06539158B2
    • 2003-03-25
    • US09778814
    • 2001-02-08
    • Kazuhisa KashiharaKazutaka NaraHiroyuki KoshiTakeshi Nakajima
    • Kazuhisa KashiharaKazutaka NaraHiroyuki KoshiTakeshi Nakajima
    • G02B610
    • G02B6/12023G02B6/105G02B6/1203G02B6/132
    • An optical waveguide circuit capable of controlling polarization crosstalk is provided. An under cladding is formed on a silicon substrate (11). A core is formed on the under cladding and has a waveguide structure in which one or more optical input waveguides (12) arranged side by side are connected at their exit ends with a first slab guide (13), which is connected at its exit end with an arrayed waveguide (14) composed of plural channel waveguides (14a) that are different in length with the difference preset, and the arrayed waveguide (14) is connected at its exit end with a second slab waveguide (15), which is connected at its exit end with a plurality of optical output waveguides (16). The top of the core is covered with an over cladding to form an optical waveguide portion (10) composed of the under and over claddings and the core. A plurality of light beams having different wavelengths are entered to the core in the multiplexed manner, and the entered light beams are outputted separately on the basis of the wavelength. The claddings and the core are formed from silica glass. The birefringence B in the optical waveguide portion (10) is set so as to satisfy |B|≧1.2×10−4 to reduce polarization crosstalk to −20 dB or less.
    • 提供了能够控制偏振串扰的光波导电路。 在硅衬底(11)上形成下包层。 在下包层上形成有芯,并且具有波导结构,其中并排布置的一个或多个光输入波导(12)在其出口端处连接有第一板引导件(13),其在其出口端连接 具有由多个不同长度与差异预定的多个通道波导(14a)组成的阵列波导(14),并且阵列波导(14)的出口端与第二平板波导(15)连接,第二平板波导(15)被连接 在其出口端具有多个光输出波导(16)。 芯的顶部覆盖有外包层,以形成由下包层和芯层组成的光波导部分(10)。 具有不同波长的多个光束以复用方式输入到核心,并且基于波长分离地输入输入的光束。 包层和芯由石英玻璃形成。 光波导部分(10)中的双折射B被设定为满足| B |> = 1.2×10 -4,以将极化串扰降低到-20dB或更小。
    • 6. 发明授权
    • Arrayed waveguide grating and method for compensating optical transmitting center wavelength of light traveling through the same
    • 阵列波导光栅和用于补偿光传播中心波长的光的传播方法
    • US06490395B1
    • 2002-12-03
    • US09667563
    • 2000-09-22
    • Kazutaka NaraTakeshi NakajimaTsunetoshi SaitoKazuhisa Kashihara
    • Kazutaka NaraTakeshi NakajimaTsunetoshi SaitoKazuhisa Kashihara
    • G02B626
    • G02B6/12014G02B6/1203
    • An arrayed waveguide grating including at least one first optical waveguide, a first slab waveguide, a plurality of arrayed waveguides, a second slab waveguide, and a plurality of second optical waveguides. The plurality of arrayed waveguides are connected to the at least one first optical waveguide via the first slab waveguide. Each of the plurality of arrayed waveguides has a different length. The plurality of second optical waveguides are connected to the plurality of arrayed waveguides via the second slab waveguide. At least one of the first and second slab waveguides is partitioned to first and second segments at a partition surface intersecting a path of light which travels through the arrayed waveguide grating. At least one of the first and second segments is configured to be slid along the partition surface to compensate an optical transmitting center wavelength of the light according to a temperature of the arrayed waveguide grating.
    • 阵列波导光栅,包括至少一个第一光波导,第一平板波导,多个阵列波导,第二平板波导和多个第二光波导。 多个阵列波导通过第一平板波导连接到至少一个第一光波导。 多个阵列波导中的每一个具有不同的长度。 多个第二光波导通过第二平板波导连接到多个阵列波导。 第一和第二平板波导中的至少一个在与穿过阵列波导光栅的光的路径相交的分隔表面处分隔成第一和第二段。 第一和第二段中的至少一个被配置为沿着分隔表面滑动,以根据阵列波导光栅的温度补偿光的透光中心波长。
    • 10. 发明授权
    • Arrayed waveguide grating type optical multiplexer/demultiplexer and a method of manufacturing the same
    • 阵列波导光栅型光复用器/多路分解器及其制造方法
    • US06456763B2
    • 2002-09-24
    • US09741792
    • 2000-12-22
    • Kazuhisa KashiharaKazutaka NaraYoshinobu Nekado
    • Kazuhisa KashiharaKazutaka NaraYoshinobu Nekado
    • G02B634
    • G02B6/12014G02B6/1203
    • An arrayed waveguide grating type optical multiplexer/demultiplexer in which a light transmission central wavelength is independent of temperature. A substrate is formed on a waveguide forming region in which optical input waveguides, a first slab waveguide, an arrayed waveguide including a plurality of channel waveguides that are arranged side by side, a second slab waveguide, and a plurality of optical output waveguides arranged side by side are sequentially connected. Dividing lines are set to divide the first slab waveguide into two by intersecting dividing planes that intersect with a route of light traveling along the first slab waveguide. A position shifting member is fixed so as to be secured in a waveguide forming region at its one end and in a waveguide forming region on its other end. The position shifting member fixes to a base the waveguide forming region on the side of a divided slab waveguide and slides the waveguide forming region on the side of another divided slab waveguide. An arrayed waveguide grating is then divided at the dividing lines, separating the first and second waveguide forming regions from each other.
    • 阵列波导光栅类型的光复用器/解复用器,其中光透射中心波长与温度无关。 基板形成在波导形成区域中,其中光输入波导,第一平板波导,包括并排布置的多个通道波导的阵列波导,第二平板波导和布置在侧面的多个光输出波导 依次连接。 分割线被设置为通过与沿着第一平板波导行进的光的路线相交的交叉分割平面将第一平板波导分成两个。 位置移动构件被固定成固定在其一端的波导形成区域和另一端的波导形成区域中。 位置偏移构件将分离的平板波导侧的波导形成区域的基座固定在另一个分开的板状波导侧的波导形成区域。 然后将阵列波导光栅在分割线处分开,将第一和第二波导形成区域彼此分离。