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1. 发明授权

US08629396B2 Uncooled infrared imaging element and manufacturing method thereof 有权
标题翻译：未冷却的红外成像元件及其制造方法
公开(公告)号：US08629396B2
公开(公告)日：2014-01-14
申请号：US13235388
申请日：2011-09-18
申请人： Masako Ogata , Ikuo Fujiwara , Hiroto Honda , Kazuhiro Suzuki , Honam Kwon , Risako Ueno , Hitoshi Yagi , Masaki Atsuta , Koichi Ishii , Keita Sasaki , Hideyuki Funaki
发明人： Masako Ogata , Ikuo Fujiwara , Hiroto Honda , Kazuhiro Suzuki , Honam Kwon , Risako Ueno , Hitoshi Yagi , Masaki Atsuta , Koichi Ishii , Keita Sasaki , Hideyuki Funaki
IPC分类号： H01L27/146
CPC分类号： H01L27/14649 , H01L27/14632 , H01L27/14687
摘要： An uncooled infrared imaging element includes a pixel region, a device region, and a support substrate. The pixel region includes heat-sensitive pixels. The heat-sensitive pixels are arranged in a matrix and change current-voltage characteristics thereof in accordance with receiving amounts of infrared. The device region includes at least one of a drive circuit and a readout circuit which includes a MOS transistor. The drive circuit drives the heat-sensitive pixels. The readout circuit detects signals of the heat-sensitive pixels. The support substrate is provided with a cavity region to be under pixel region and the MOS transistor.
摘要翻译：非制冷红外成像元件包括像素区域，器件区域和支撑衬底。像素区域包括热敏像素。热敏像素被布置成矩阵并且根据接收到的红外线量来改变其电流 - 电压特性。器件区域包括驱动电路和包括MOS晶体管的读出电路中的至少一个。驱动电路驱动热敏像素。读出电路检测热敏像素的信号。支撑基板设置有在像素区域下方的空腔区域和MOS晶体管。

2. 发明申请

US20120007205A1 INFRARED IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：红外成像装置及其制造方法
公开(公告)号：US20120007205A1
公开(公告)日：2012-01-12
申请号：US12883732
申请日：2010-09-16
申请人： Kazuhiro Suzuki , Ikuo Fujiwara , Keita Sasaki , Honam Kwon , Hitoshi Yagi , Hiroto Honda , Koichi Ishii , Masako Ogata , Risako Ueno , Hideyuki Funaki
发明人： Kazuhiro Suzuki , Ikuo Fujiwara , Keita Sasaki , Honam Kwon , Hitoshi Yagi , Hiroto Honda , Koichi Ishii , Masako Ogata , Risako Ueno , Hideyuki Funaki
IPC分类号： H01L31/101 , H01L31/18
CPC分类号： G01J5/02 , G01J5/023 , G01J5/024 , H04N5/33
摘要： Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.
摘要翻译：某些实施例提供了一种红外成像装置，包括：SOI结构，其被放置在离基板一定距离处，并且包括：热敏二极管，其检测红外线并将红外线转换成热; 以及将热敏二极管彼此分离的STI区域; 堆叠在SOI结构上的层间绝缘膜; 以及连接到热敏二极管的支撑腿和设置在热敏二极管的外周区域中的垂直信号线。每个支撑腿包括：将信号传输到垂直信号线的互连单元; 以及层叠绝缘层，夹着所述互连单元，所述层间绝缘层的每个底侧位于比所述SOI结构更高的位置。

3. 发明授权

US08304848B2 Infrared imaging device and method of manufacturing the same 有权
标题翻译：红外成像装置及其制造方法
公开(公告)号：US08304848B2
公开(公告)日：2012-11-06
申请号：US12883732
申请日：2010-09-16
申请人： Kazuhiro Suzuki , Ikuo Fujiwara , Keita Sasaki , Honam Kwon , Hitoshi Yagi , Hiroto Honda , Koichi Ishii , Masako Ogata , Risako Ueno , Hideyuki Funaki
发明人： Kazuhiro Suzuki , Ikuo Fujiwara , Keita Sasaki , Honam Kwon , Hitoshi Yagi , Hiroto Honda , Koichi Ishii , Masako Ogata , Risako Ueno , Hideyuki Funaki
IPC分类号： H01L31/00 , H01L31/04
CPC分类号： G01J5/02 , G01J5/023 , G01J5/024 , H04N5/33
摘要： Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.
摘要翻译：某些实施例提供了一种红外成像装置，包括：SOI结构，其被放置在离基板一定距离处，并且包括：热敏二极管，其检测红外线并将红外线转换成热; 以及将热敏二极管彼此分离的STI区域; 堆叠在SOI结构上的层间绝缘膜; 以及连接到热敏二极管的支撑腿和设置在热敏二极管的外周区域中的垂直信号线。每个支撑腿包括：将信号传输到垂直信号线的互连单元; 以及层叠绝缘层，夹着所述互连单元，所述层间绝缘层的每个底侧位于比所述SOI结构更高的位置。

4. 发明授权

US08415622B2 Infrared imaging element 有权
标题翻译：红外成像元件
公开(公告)号：US08415622B2
公开(公告)日：2013-04-09
申请号：US13414941
申请日：2012-03-08
申请人： Kazuhiro Suzuki , Hiroto Honda , Ikuo Fujiwara , Hideyuki Funaki , Hitoshi Yagi , Keita Sasaki , Honam Kwon , Koichi Ishii , Masako Ogata , Risako Ueno
发明人： Kazuhiro Suzuki , Hiroto Honda , Ikuo Fujiwara , Hideyuki Funaki , Hitoshi Yagi , Keita Sasaki , Honam Kwon , Koichi Ishii , Masako Ogata , Risako Ueno
IPC分类号： H01L25/00
CPC分类号： H01L27/14618 , G01J5/024 , H01L27/1461 , H01L27/14636 , H01L27/1464 , H01L27/14649 , H01L2924/0002 , H01L2924/00
摘要： An infrared imaging element according to an embodiment includes: a semiconductor substrate including a stacked structure of a silicon first substrate, and a first insulation film, first cavities being provided on a surface of the first substrate; an infrared detection unit provided in the semiconductor substrate and including, detection cells provided respectively over the first cavities, each of the detection cells having diodes and a second insulation film, the first insulation film converting incident infrared rays to heat, the diodes converting the heat obtained by the first insulation film to an electric signal, a third insulation film having a top face located at a greater distance from the semiconductor substrate as compared with a top face of the second insulation film; and a second substrate provided over the third insulation film. A second cavity is formed between the second substrate and the infrared detection unit.
摘要翻译：根据实施例的红外成像元件包括：包括硅第一基板的堆叠结构的半导体基板和第一绝缘膜，在第一基板的表面上设置有第一空腔; 红外线检测单元，设置在所述半导体基板中，并且包括分别设置在所述第一空腔上的检测单元，每个所述检测单元具有二极管和第二绝缘膜，所述第一绝缘膜将入射红外线转换成加热，由所述第一绝缘膜获得的电信号;第三绝缘膜，其具有与所述第二绝缘膜的顶面相比位于距所述半导体基板更远的距离的顶面; 以及设置在所述第三绝缘膜上的第二基板。在第二基板和红外线检测单元之间形成第二空腔。

5. 发明申请

US20120228497A1 INFRARED IMAGING ELEMENT 有权
标题翻译：红外成像元件
公开(公告)号：US20120228497A1
公开(公告)日：2012-09-13
申请号：US13414941
申请日：2012-03-08
申请人： Kazuhiro SUZUKI , Hiroto Honda , Ikuo Fujiwara , Hideyuki Funaki , Hitoshi Yagi , Keita Sasaki , Honam Kwon , Koichi Ishii , Masako Ogata , Risako Ueno
发明人： Kazuhiro SUZUKI , Hiroto Honda , Ikuo Fujiwara , Hideyuki Funaki , Hitoshi Yagi , Keita Sasaki , Honam Kwon , Koichi Ishii , Masako Ogata , Risako Ueno
IPC分类号： H01L27/146
CPC分类号： H01L27/14618 , G01J5/024 , H01L27/1461 , H01L27/14636 , H01L27/1464 , H01L27/14649 , H01L2924/0002 , H01L2924/00
摘要： An infrared imaging element according to an embodiment includes: a semiconductor substrate including a stacked structure of a silicon first substrate, and a first insulation film, first cavities being provided on a surface of the first substrate; an infrared detection unit provided in the semiconductor substrate and including, detection cells provided respectively over the first cavities, each of the detection cells having diodes and a second insulation film, the first insulation film converting incident infrared rays to heat, the diodes converting the heat obtained by the first insulation film to an electric signal, a third insulation film having a top face located at a greater distance from the semiconductor substrate as compared with a top face of the second insulation film; and a second substrate provided over the third insulation film. A second cavity is formed between the second substrate and the infrared detection unit.
摘要翻译：根据实施例的红外成像元件包括：包括硅第一基板的堆叠结构的半导体基板和第一绝缘膜，在第一基板的表面上设置有第一空腔; 红外线检测单元，设置在所述半导体基板中，并且包括分别设置在所述第一空腔上的检测单元，每个所述检测单元具有二极管和第二绝缘膜，所述第一绝缘膜将入射红外线转换成加热，由所述第一绝缘膜获得的电信号;第三绝缘膜，其具有与所述第二绝缘膜的顶面相比位于距所述半导体基板更远的距离的顶面; 以及设置在所述第三绝缘膜上的第二基板。在第二基板和红外线检测单元之间形成第二空腔。

6. 发明授权

US07705611B2 Sensor device, and portable communication terminal and electronic device using the sensor device 失效
标题翻译：传感器装置，以及使用传感器装置的便携式通信终端和电子装置
公开(公告)号：US07705611B2
公开(公告)日：2010-04-27
申请号：US11858822
申请日：2007-09-20
申请人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
发明人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
IPC分类号： G01R27/26
CPC分类号： H03K17/955 , G01D5/2417 , H03K2217/960755
摘要： A sensor device for detecting a positional relationship between a first member and a second member, includes a first charge-holding electrode provided on a surface of the first member and holding a charge, a second charge-holding electrode provided on the surface of the first member and holding a charge differing from the charge held by the first charge-holding electrode, a first charge-induced electrode provided on a surface of the second member, the first charge-induced electrode having a charge induced therein in accordance with the charge held by the first charge-holding electrode, when the first charge-holding electrode approaches the first charge-induced electrode, a second charge-induced electrode provided on the surface of the second member, the second charge-induced electrode having a charge induced therein in accordance with the charge held by the second charge-holding electrode, when the second charge-holding electrode approaches the second charge-induced electrode.
摘要翻译：一种用于检测第一构件和第二构件之间的位置关系的传感器装置，包括设置在第一构件的表面上并保持电荷的第一电荷保持电极，设置在第一构件和第二构件的表面上的第二电荷保持电极并且保持与第一电荷保持电极所保持的电荷不同的电荷，设置在第二部件的表面上的第一电荷感应电极，第一电荷感应电极根据电荷保持在其中诱导电荷通过第一电荷保持电极，当第一电荷保持电极接近第一电荷感应电极时，设置在第二元件的表面上的第二电荷感应电极，其中在其中引入电荷的第二电荷感应电极根据第二电荷保持电极保持的电荷，当第二电荷保持电极接近第二电荷感应电极时。

7. 发明申请

US20100231246A1 SENSOR APPARATUS FOR DETECTING A POSITIONAL RELATIONSHIP BETWEEN TWO MEMBERS AND METHOD USED FOR THE SENSOR APPARATUS 有权
标题翻译：用于检测两个成员之间的位置关系的传感器装置和用于传感器装置的方法
公开(公告)号：US20100231246A1
公开(公告)日：2010-09-16
申请号：US12717579
申请日：2010-03-04
申请人： Masako Ogata , Hideyuki Funaki , Kazuhiro Suzuki
发明人： Masako Ogata , Hideyuki Funaki , Kazuhiro Suzuki
IPC分类号： G01R27/08
CPC分类号： H03K17/975 , E05Y2800/748 , H03K2017/9613
摘要： A sensor apparatus for detecting a positional relationship includes a first electrode, an applying unit applying a charging signal with a first cycle period to the first electrode, a second electrode, a selecting unit selecting the first or second cycle period which have overlapped segment periods, an output unit outputting electrical signals supplied from the second electrode with the first cycle period, if the first cycle period is selected, and parts of the electrical signals during the segment periods, if the second cycle period is selected, a comparator comparing an amplitude of the electrical signals with a threshold value and generating a first or second comparison signal and a controller generating a proximity and non-proximity signal in response to the first and second comparison signal, respectively, so that the selecting unit selects the first and second cycle period in response to the proximity and non-proximity signal, respectively.
摘要翻译：用于检测位置关系的传感器装置包括第一电极，向第一电极施加具有第一周期的充电信号的施加单元，第二电极，选择具有重叠段周期的第一或第二周期周期的选择单元，输出单元，如果选择了第一周期周期，则输出从第二电极提供的电信号，如果选择了第一周期周期，则在段周期内输出部分电信号，如果选择了第二周期周期，则比较器比较所述电信号具有阈值并且分别响应于所述第一和第二比较信号产生第一或第二比较信号和控制器产生接近和非接近信号，使得所述选择单元选择所述第一和第二周期周期分别响应于接近和非接近信号。

8. 发明授权

US08299806B2 Sensor apparatus for detecting a positional relationship between two members and method used for the sensor apparatus 有权
标题翻译：用于检测两个构件之间的位置关系的传感器装置和用于传感器装置的方法
公开(公告)号：US08299806B2
公开(公告)日：2012-10-30
申请号：US12717579
申请日：2010-03-04
申请人： Masako Ogata , Hideyuki Funaki , Kazuhiro Suzuki
发明人： Masako Ogata , Hideyuki Funaki , Kazuhiro Suzuki
IPC分类号： G01R27/26
CPC分类号： H03K17/975 , E05Y2800/748 , H03K2017/9613
摘要： A sensor apparatus for detecting a positional relationship includes a first electrode, an applying unit applying a charging signal with a first cycle period to the first electrode, a second electrode, a selecting unit selecting the first or second cycle period which have overlapped segment periods, an output unit outputting electrical signals supplied from the second electrode with the first cycle period, if the first cycle period is selected, and parts of the electrical signals during the segment periods, if the second cycle period is selected, a comparator comparing an amplitude of the electrical signals with a threshold value and generating a first or second comparison signal and a controller generating a proximity and non-proximity signal in response to the first and second comparison signal, respectively, so that the selecting unit selects the first and second cycle period in response to the proximity and non-proximity signal, respectively.
摘要翻译：用于检测位置关系的传感器装置包括第一电极，向第一电极施加具有第一周期的充电信号的施加单元，第二电极，选择具有重叠段周期的第一或第二周期周期的选择单元，输出单元，如果选择了第一周期周期，则输出从第二电极提供的电信号，如果选择了第一周期周期，则在段周期内输出部分电信号，如果选择了第二周期周期，所述电信号具有阈值并且分别响应于所述第一和第二比较信号产生第一或第二比较信号和控制器产生接近和非接近信号，使得所述选择单元选择所述第一和第二周期周期分别响应于接近和非接近信号。

9. 发明授权

US08041534B2 Sensor device, and sensor system and electronic device using the sensor device 有权
标题翻译：传感器装置，以及使用传感器装置的传感器系统和电子装置
公开(公告)号：US08041534B2
公开(公告)日：2011-10-18
申请号：US12234732
申请日：2008-09-22
申请人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
发明人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
IPC分类号： G01R15/00 , G01R23/00 , G01R19/00
CPC分类号： G01D5/2417 , H03K17/975 , H04M1/0245
摘要： A sensor device which detects a positional relationship between an first member and second member, includes a signal source generating an electrical signal, a first electrode receiving the electrical signal and storing an electrical charge at a first part on the first member, a second electrode inducing an electrical charge at the second part on the second member, a third electrode inducing an electrical charge at the third part on the second member, a fourth electrode inducing an electrical charge at the fourth part on the first member, a reference electrode disposed at a fifth part on the second member to be connected to a reference voltage point, a fifth electrode inducing an electrical charge at the sixth part on the first member, and a differential amplifier amplifying a voltage difference between the fourth electrode and the fifth electrode and outputting a difference signal.
摘要翻译：检测第一构件和第二构件之间的位置关系的传感器装置包括产生电信号的信号源，接收电信号的第一电极和在第一构件的第一部分处存储电荷的第二电极，在第二构件上的第二部分处的电荷，在第二构件上的第三部分处引起电荷的第三电极，在第一构件的第四部分处引起电荷的第四电极，设置在第二构件上的参考电极要连接到参考电压点的第二构件的第五部分，在第一构件的第六部分处引起电荷的第五电极和放大第四电极和第五电极之间的电压差的差分放大器，并输出差分信号。

10. 发明授权

US07876105B2 Sensor device and display apparatus 有权
标题翻译：传感器装置和显示装置
公开(公告)号：US07876105B2
公开(公告)日：2011-01-25
申请号：US12211843
申请日：2008-09-17
申请人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
发明人： Masako Ogata , Kazuhiro Suzuki , Hideyuki Funaki , Kazuhiko Itaya
IPC分类号： G01R27/26
CPC分类号： G01V3/088 , H03K17/962 , H03K2217/960755
摘要： A sensor device according to an embodiment of the present invention includes an electrode array having plural electrodes arranged in an array manner, a signal generator configured to generate a first signal having a first frequency, and apply the first signal to the plural electrodes, and a detection unit configured to, when the first signal is applied to the plural electrodes, and a second signal having a second frequency is applied to an object to be detected, detect a distance between each electrode included in the electrode array and the surface of the object, using an interference wave between the first signal applied to each electrode and the second signal applied to the object, or detect irregularities on the surface of the object, using a signal generated by using the interference wave outputted from one electrode and the interference wave outputted from another electrode.
摘要翻译：根据本发明实施例的传感器装置包括具有以阵列方式布置的多个电极的电极阵列，信号发生器，被配置为产生具有第一频率的第一信号，并将第一信号施加到多个电极，以及检测单元，被配置为当第一信号被施加到多个电极时，并且具有第二频率的第二信号被施加到待检测的对象，检测电极阵列中包括的每个电极与物体的表面之间的距离使用施加到每个电极的第一信号和施加到对象的第二信号之间的干涉波，或者使用通过使用从一个电极输出的干扰波产生的信号和输出的干扰波来检测物体的表面上的不规则从另一个电极。

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