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    • 7. 发明授权
    • Flexible tube and method of manufacturing the same
    • 柔性管及其制造方法
    • US06382258B1
    • 2002-05-07
    • US09661970
    • 2000-09-14
    • Kazuaki Tanaka
    • Kazuaki Tanaka
    • F16L1108
    • F16L11/082B29C53/582B29C53/827
    • A flexible tube having high flexibility and high resistance to pressure and causing little twist and elongation when subjected to a high internal pressure. A flexible tube 21 has an inner tubular layer 11 made of a soft resin, an inner spiral reinforcement 1 made of a hard resin and helically wound around the inner tubular layer 11, an intermediate tubular layer 12 made of a soft resin and surrounding the inner spiral reinforcement 1, and an outer spiral reinforcement 4 made of a hard resin and helically wound around the intermediate tubular layer 12 in the direction opposite to the winding direction of the inner spiral reinforcement 1. As the direction of the helix of the inner and outer spiral reinforcements 1 and 4 are opposite to each other, forces due to internal pressure acting to twist the helixes are canceled out.
    • 柔性管具有高柔韧性和高耐压性,并且当受到高内压时几乎没有扭转和伸长。 柔性管21具有由软质树脂制成的内部管状层11,由硬质树脂制成并螺旋缠绕在内部管状层11上的内部螺旋形加强件1,由软质树脂制成的中间管状层12, 螺旋加强件1和由硬质树脂制成的外螺旋形加强件4,并且沿着与内螺旋加强件1的卷绕方向相反的方向螺旋缠绕在中间管状层12上。作为内外螺旋的方向 螺旋增强件1和4彼此相对,由于作用于扭转螺旋的内部压力的力被抵消。
    • 10. 发明申请
    • Multi-column type electron beam exposure apparatus
    • 多列式电子束曝光装置
    • US20080049204A1
    • 2008-02-28
    • US11897501
    • 2007-08-30
    • Hidefumi YabaraKenichi MiyazawaTomohiro SakazakiKazuaki Tanaka
    • Hidefumi YabaraKenichi MiyazawaTomohiro SakazakiKazuaki Tanaka
    • G03B27/42
    • H01J37/3177B82Y10/00B82Y40/00H01J2237/31762H01J2237/31774
    • A multi-column type electron beam exposure apparatus includes: plural column cells disposed over a wafer, each including an electron gun, deflector for deflecting an electron beam emitted by the electron gun, and exposure data receiving unit for receiving exposure data; and correction computing unit for calculating the exposure data for use in the column cells. The correction computing unit includes exposure data controlling unit and exposure data transmitting unit for each of the column cells. The exposure data transmitting unit encodes the exposure data corrected by the exposure data controlling unit to convert the data into serial data, converts the serial data into a light signal, and transmits the light signal. The exposure data receiving unit converts the light signal into an electric signal, and decodes the encoded exposure data to convert the data into parallel data.
    • 多列型电子束曝光装置包括:设置在晶片上的多个列单元,每个包括电子枪,用于偏转由电子枪发射的电子束的偏转器和用于接收曝光数据的曝光数据接收单元; 以及校正计算单元,用于计算用于列单元格的曝光数据。 校正计算单元包括用于每个列单元的曝光数据控制单元和曝光数据发送单元。 曝光数据发送单元对由曝光数据控制单元校正的曝光数据进行编码,将数据转换为串行数据,将串行数据转换为光信号,并发送光信号。 曝光数据接收单元将光信号转换为电信号,并对编码的曝光数据进行解码以将数据转换为并行数据。