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    • 10. 发明授权
    • Semiconductor photodetector device and manufacturing method thereof
    • 半导体光电探测器及其制造方法
    • US06800914B2
    • 2004-10-05
    • US10224115
    • 2002-08-19
    • Kazuhiro ItoShigehisa TanakaSumiko FujisakiYasunobu MatsuokaTakashi Toyonaka
    • Kazuhiro ItoShigehisa TanakaSumiko FujisakiYasunobu MatsuokaTakashi Toyonaka
    • H01L31107
    • H01L31/107
    • Reducing a dark current in a semiconductor photodetector provided with a second mesa including an regrown layer around a first mesa. An n-type buffer layer, a n-type multiplication layer, a p-type field control layer, a p-type absorption layer, a cap layer made of p-type InAlAs crystal, and a p-type contact layer 107 are made to grow on a main surface of a n-type substrate. Thereafter the p-type contact layer, the p-type cap layer, the p-type absorption layer and the p-type field control layer are patterned to form a first mesa. Next, after making a p-type regrown layer selectively grow around the first mesa or by forming a groove in the regrow layer located in a vicinity of the p-type cap type during a step of the selective growth, the p-type cap layer containing Al and the regrow layer are separated owing to the groove such that no current path is formed between both layers.
    • 在具有围绕第一台面的重新生长层的第二台面的半导体光电检测器中减小暗电流。 制作n型缓冲层,n型倍增层,p型场控制层,p型吸收层,由p型InAlAs晶体制成的覆盖层和p型接触层107 在n型衬底的主表面上生长。 此后,对p型接触层,p型覆盖层,p型吸收层和p型场控制层进行图案化以形成第一台面。 接下来,在选择性生长的步骤中,使p型再生长层选择性地生长在第一台面周围或者通过在位于p型帽类型附近的再生层中形成沟槽,p型覆盖层 含有Al并且再生层由于槽而分离,使得在两层之间不形成电流路径。