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1. 发明申请

US20070205787A1 Wafer holder, and heater unit and wafer prober provided therewith 审中-公开
标题翻译：晶片支架，加热器单元和提供的晶圆探测器
公开(公告)号：US20070205787A1
公开(公告)日：2007-09-06
申请号：US11701416
申请日：2007-02-02
申请人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
发明人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R1/18 , G01R31/2875
摘要： A wafer holder with which probing can be performed with little or virtually no noise due to the wafer being shielded from electromagnetic waves; and a wafer prober on which the wafer holder is mounted. The wafer holder of the present invention includes a chuck top for mounting a wafer, and a resistance heat generator for heating the chuck top. At least part of the resistance heat generator is covered by an insulating layer, and an electrically conductive layer is present on an opposite side of the resistance heat generator having the insulating layer. The electrically conductive layer blocks electromagnetic waves that adversely affect inspection. The insulating layer preferably covers the entire surface of the resistance heat generator, and the electrically conductive layer preferably covers the entire surface of the resistance heat generator comprising the insulating layer.
摘要翻译：晶片保持器，由于晶片被电磁波屏蔽，可以进行很少或几乎没有噪声的探测; 以及安装晶片保持器的晶片探测器。本发明的晶片保持器包括用于安装晶片的卡盘顶板和用于加热卡盘顶部的电阻发热器。电阻发热体的至少一部分被绝缘层覆盖，导电层存在于具有绝缘层的电阻发热体的相反侧。导电层阻止对检查产生不利影响的电磁波。绝缘层优选覆盖电阻发热体的整个表面，并且导电层优选覆盖包括绝缘层的电阻发热体的整个表面。

2. 发明申请

US20070028834A1 Wafer holder for wafer prober and wafer prober equipped with same 审中-公开
标题翻译：用于晶圆探针和晶圆探测器的晶片支架配备相同
公开(公告)号：US20070028834A1
公开(公告)日：2007-02-08
申请号：US11496022
申请日：2006-07-31
申请人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
发明人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
IPC分类号： C30B25/00
CPC分类号： G01R31/2886 , G01R31/2831
摘要： The present invention provides a wafer prober wafer holder that is highly rigid and increases the heat insulating effect, thereby improving positional accuracy, thermal uniformity, and chip temperature ramp-up and cooling rates, as well as a wafer prober device equipped therewith. A wafer holder of the present invention includes a chuck top that mounts a wafer, and a support member that supports the chuck top. A cavity is formed between the chuck top and the support member, and a vacuum space member is provided to the lowest part of a member that is attached to a surface of the chuck top on the side opposite the wafer mounting surface.
摘要翻译：本发明提供了一种高刚性的晶片探针晶片保持器，并且增加了隔热效果，从而提高了位置精度，热均匀性和芯片温度升高和冷却速度，以及配备其的晶片探测器。本发明的晶片保持器包括安装晶片的卡盘顶部和支撑卡盘顶部的支撑构件。在卡盘顶部和支撑构件之间形成空腔，并且在与晶片安装表面相对的一侧附接到卡盘顶表面的构件的最下部设置真空空间构件。

3. 发明授权

US07576303B2 Wafer holder, and wafer prober provided therewith 有权
标题翻译：晶片支架，以及提供的晶圆探针
公开(公告)号：US07576303B2
公开(公告)日：2009-08-18
申请号：US11701417
申请日：2007-02-02
申请人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
发明人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
IPC分类号： H05B3/68 , C23C16/00
CPC分类号： G01R31/2865 , H01L21/68757
摘要： A wafer holder is provided having high rigidity and an enhanced heat-insulating effect that allow positional accuracy and heating uniformity to be improved, a chip to be rapidly heated and cooled, and the manufacturing cost to be reduced, and a wafer prober apparatus on which the wafer holder is mounted. The wafer holder of the present invention includes a chuck top for mounting a wafer, a support member for supporting the chuck top, and a stand for supporting the support member. The chuck top has a thermal conductivity K1 and a Young's modulus Y1; the support member has a thermal conductivity K2 and a Young's modulus Y2; and the stand has a thermal conductivity K3 and a Young's modulus Y3. K1>K2 and K1>K3; and Y3>Y1 and Y3>Y2.
摘要翻译：提供了具有高刚性和增强的隔热效果的晶片保持器，其允许提高位置精度和加热均匀性，快速加热和冷却的芯片，以及降低的制造成本，以及晶片探测器装置，其上安装晶片保持架。本发明的晶片保持器包括用于安装晶片的卡盘顶部，用于支撑卡盘顶部的支撑构件和用于支撑支撑构件的支架。卡盘顶部具有导热系数K1和杨氏模量Y1; 支撑构件具有热传导率K2和杨氏模量Y2; 并且支架具有热导率K3和杨氏模量Y3。 K1> K2和K1> K3; Y3> Y1和Y3> Y2。

4. 发明申请

US20090045829A1 Wafer holder for wafer prober and wafer prober equipped with same 审中-公开
标题翻译：用于晶圆探针和晶圆探测器的晶片支架配备相同
公开(公告)号：US20090045829A1
公开(公告)日：2009-02-19
申请号：US11496019
申请日：2006-07-31
申请人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
发明人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
IPC分类号： G01R31/26 , H05B3/68
CPC分类号： G01R31/2865 , G01R31/2875
摘要： It is an object of the present invention to provide a wafer prober wafer holder that is highly rigid and increases the heat insulating effect, thereby improving positional accuracy, thermal uniformity, and chip temperature ramp-up and cooling rates, as well as a wafer prober device equipped therewith.A wafer holder of the present invention includes a chuck top that mounts a wafer, and a support member that supports the chuck top, wherein, a restricting member is provided that covers an interface between the chuck top and the support member. By covering the gap between the chuck top and the support member with the restricting member, the heat insulating effect can be increased by preventing the flow of outside air through the gap into the support member, and the cooling rate can be particularly improved if cooling to a temperature below room temperature.
摘要翻译：本发明的目的是提供一种高度刚性的晶片探针晶片保持器，并且增加隔热效果，从而提高位置精度，热均匀性以及芯片温度升高和冷却速度，以及晶片探测器装备的装置。本发明的晶片保持器包括安装晶片的卡盘顶部和支撑卡盘顶部的支撑构件，其中设置有限制构件，该限制构件覆盖卡盘顶部和支撑构件之间的界面。通过用限制构件覆盖卡盘顶部和支撑构件之间的间隙，可以通过防止外部空气通过间隙流入支撑构件而提高隔热效果，并且如果冷却至温度低于室温。

5. 发明申请

US20070029740A1 Body for keeping a wafer, method of manufacturing the same and device using the same 审中-公开
标题翻译：用于保持晶片的本体，其制造方法以及使用其的装置
公开(公告)号：US20070029740A1
公开(公告)日：2007-02-08
申请号：US11482101
申请日：2006-07-07
申请人： Masuhiro Natsuhara , Katsuhiro Itakura , Tomoyuki Awazu , Hirohiko Nakata , Akira Mikumo
发明人： Masuhiro Natsuhara , Katsuhiro Itakura , Tomoyuki Awazu , Hirohiko Nakata , Akira Mikumo
IPC分类号： B23B31/30
CPC分类号： H01L21/67109 , H01L21/67103 , Y10T279/11
摘要： A wafer holding body for placing a semiconductor wafer, a method of manufacturing the same, and an device using the wafer holding body are provided, wherein a channel is formed in the wafer holding body.
摘要翻译：提供了一种用于放置半导体晶片的晶片保持体，其制造方法和使用该晶片保持体的器件，其中在晶片保持体中形成沟道。

6. 发明申请

US20070182433A1 Wafer holder, and wafer prober and semiconductor manufacturing apparatus provided therewith 审中-公开
标题翻译：晶片支架，以及提供的晶圆探测器和半导体制造装置
公开(公告)号：US20070182433A1
公开(公告)日：2007-08-09
申请号：US11699043
申请日：2007-01-29
申请人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
发明人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
IPC分类号： G01R31/02
CPC分类号： G01R31/2877
摘要： A wafer holder that includes a cooling module for rapid cooling, that can further improve the heating uniformity of a wafer, and that can be appropriately used with a wafer prober, a coater/developer, or the like. The wafer holder includes a mounting stage arranged to mount a wafer on a mounting surface, a heat generator 1 arranged to heat the mounting stage, and a cooling module arranged to cool the mounting stage, wherein an outside diameter of the cooling module is smaller than an outside diameter of the mounting stage, and the heat generator 1 attached to the mounting stage is positioned further to the outside than the cooling module. Along with the heat generator 1, a supplementary heat generator may be positioned between the cooling module and the mounting stage or on a surface of the cooling module opposite the mounting stage.
摘要翻译：包括用于快速冷却的冷却模块的晶片保持器，其可以进一步提高晶片的加热均匀性，并且可以与晶片探测器，涂布机/显影剂等适当地使用。晶片保持器包括安装台，用于将晶片安装在安装表面上，布置成加热安装台的热发生器1和布置成冷却安装台的冷却模块，其中冷却模块的外径小于安装台的外径和附接到安装台的发热体1比冷却模块更靠外侧。与发热体1一起，辅助热发生器可以位于冷却模块和安装台之间或冷却模块的与安装台相对的表面上。

7. 发明申请

US20070126457A1 Wafer holder, and heating unit and wafer prober provided with the wafer holder 审中-公开
标题翻译：晶片支架，以及配有晶片支架的加热单元和晶圆探测器
公开(公告)号：US20070126457A1
公开(公告)日：2007-06-07
申请号：US11603233
申请日：2006-11-22
申请人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
发明人： Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata , Katsuhiro Itakura
IPC分类号： G01R31/26
CPC分类号： G01R31/2893
摘要： A wafer holder is provided with a mounting stage having a mounting surface for mounting a wafer, and a holding member for holding the mounting stage, wherein relationships are established such that K1>K2 and Y1 K3, where K3 is the thermal conductivity of the holding member.
摘要翻译：晶片保持器设置有具有用于安装晶片的安装表面的安装台和用于保持安装台的保持构件，其中建立K 1> K 2和Y 1 K 3，其中K 3是保持构件的热导率。

8. 发明申请

US20070024313A1 Chuck top, wafer holder having the chuck top, and wafer prober having the chuck top 审中-公开
标题翻译：卡盘顶部，具有卡盘顶部的晶片架，以及具有卡盘顶部的晶片探测器
公开(公告)号：US20070024313A1
公开(公告)日：2007-02-01
申请号：US11493920
申请日：2006-07-27
申请人： Katsuhiro Itakura , Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata
发明人： Katsuhiro Itakura , Masuhiro Natsuhara , Tomoyuki Awazu , Hirohiko Nakata
IPC分类号： G01R31/26
CPC分类号： G01R31/2893
摘要： A chuck top allowing reliable recognition of a wafer mounted on a wafer-mounting surface or on a chuck top conductive layer by a camera such as a CCD and hence allowing wafer inspection without problem is provided. The chuck top is used for a wafer prober mounting a wafer on the wafer-mounting surface for inspection, in which reflectance of a portion other than the portion for mounting the wafer of the wafer-mounting surface or the chuck top conductive layer is smaller than the reflectance of a peripheral end portion of the wafer to be inspected. The portion other than the portion for mounting the wafer of the wafer-mounting surface or the chuck top conductive layer of chuck top preferably has surface roughness Ra of at least 0.0001 μm and at most 0.05 μm.
摘要翻译：提供了一种卡盘头，其允许通过诸如CCD的照相机安装在晶片安装表面或卡盘顶部导电层上的晶片可靠地识别，并且因此允许晶片检查没有问题。卡盘顶部用于将晶片安装在晶片安装表面上用于检查的晶片探测器，其中除了用于安装晶片安装表面或卡盘顶部导电层的晶片的部分之外的部分的反射率小于要检查的晶片的外周端部的反射率。除了用于安装晶片安装表面的晶片或卡盘顶板的导电层的部分之外的部分优选具有至少0.0001μm的表面粗糙度Ra和至多0.05μm的表面粗糙度Ra。

9. 发明申请

US20070082313A1 Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit 审中-公开
标题翻译：晶片保持器，具有晶片保持器的加热器单元和具有加热器单元的晶片探测器
公开(公告)号：US20070082313A1
公开(公告)日：2007-04-12
申请号：US11498276
申请日：2006-08-03
申请人： Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata , Tomoyuki Awazu , Teruto Nishi
发明人： Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata , Tomoyuki Awazu , Teruto Nishi
IPC分类号： F24J3/00
CPC分类号： G01R31/2863 , G01R31/2875 , H01L21/68757
摘要： A wafer holder less susceptible to deformation even under high load and having high heat-insulating effect and hence capable of improving positional accuracy, improving thermal uniformity and rapid heating and cooling of chips, as well as a heater unit including the wafer holder and a wafer prober including the heater unit are provided. The wafer holder includes a chuck top having a chuck top conductive layer on its surface and a supporter supporting the chuck top, and has a support member in a space between the chuck top and the supporter. Preferably, the support member is arranged concentric with the supporter or approximately at the center of the supporter, and more preferably, support members arranged concentrically and arranged at the center are both provided.
摘要翻译：晶片保持器即使在高负载下也不易变形，并且具有高绝热效果，因此能够提高位置精度，提高芯片的热均匀性和快速加热和冷却，以及包括晶片保持器和晶片的加热器单元提供包括加热器单元的探测器。晶片保持器包括在其表面上具有卡盘顶部导电层的卡盘顶部和支撑卡盘顶部的支撑件，并且在卡盘顶部和支撑件之间的空间中具有支撑构件。优选地，支撑构件与支撑件同心地布置，或者大致位于支撑件的中心，并且更优选地，设置在同心且布置在中心的支撑构件。

10. 发明申请

US20070046306A1 Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit 审中-公开
标题翻译：晶片保持器，具有晶片保持器的加热器单元和具有加热器单元的晶片探测器
公开(公告)号：US20070046306A1
公开(公告)日：2007-03-01
申请号：US11498273
申请日：2006-08-03
申请人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
发明人： Tomoyuki Awazu , Katsuhiro Itakura , Masuhiro Natsuhara , Hirohiko Nakata
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2874
摘要： A wafer holder and a wafer prober including the same are provided in which the positional accuracy of the wafer holder is very high when the wafer holder is moved to a prescribed position in probing, and the positional accuracy are less likely to vary even with repeated movements. The wafer holder in accordance with the present invention includes a chuck top having a chuck top conductive layer on a surface thereof and a support body supporting the chuck top. The weight of the wafer holder is 28000 g or less. Preferably, the weight of the chuck top is 6000 g or less. Preferably, the weight of the support body is 12000 g or less.
摘要翻译：提供晶片保持器和包括该晶片保持器的晶片探测器，其中当晶片保持器在探测中移动到规定位置时，晶片保持器的位置精度非常高，并且即使重复移动，位置精度也不太可能变化。根据本发明的晶片保持器包括其表面上具有卡盘顶部导电层的卡盘顶板和支撑卡盘顶部的支撑体。晶片保持器的重量为28000g或更小。卡盘顶部的重量优选为6000g以下。优选地，支撑体的重量为12000g以下。

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