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1. 发明授权

US07163888B2 Direct imprinting of etch barriers using step and flash imprint lithography 失效
标题翻译：使用步骤和闪光压印光刻技术直接刻印蚀刻阻挡层
公开(公告)号：US07163888B2
公开(公告)日：2007-01-16
申请号：US10995800
申请日：2004-11-22
申请人： Kathy A. Gehoski , William J. Dauksher , Ngoc V. Le , Douglas J. Resnick
发明人： Kathy A. Gehoski , William J. Dauksher , Ngoc V. Le , Douglas J. Resnick
IPC分类号： H01L21/4763
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y30/00 , B82Y40/00 , H01L21/76814 , H01L21/76838
摘要： A direct imprinting process for Step and Flash Imprint Lithography includes providing (40) a substrate (12); forming (44) an etch barrier layer (14) on the substrate; patterning (46) the etch barrier layer with a template (16) while curing with ultraviolet light through the template, resulting in a patterned etch barrier layer and a residual layer (20) on the substrate; and performing (48) an etch to substantially remove the residual layer. Optionally, a patterning layer (52) may be formed on the substrate (12) prior to forming the etch barrier layer (14). Additionally, an adhesive layer (13) may be applied (42) between the substrate (12) and the etch barrier layer (14).
摘要翻译：步进和闪光印记光刻技术的直接印刷工艺包括提供（40）基材（12）; 在衬底上形成（44）蚀刻阻挡层（14）; 在通过模板的紫外线固化的同时用模板（16）对蚀刻阻挡层进行图案化（46），从而在衬底上产生图案化的蚀刻阻挡层和残余层（20）; 并执行（48）蚀刻以基本上去除残留层。可选地，在形成蚀刻阻挡层（14）之前，可以在衬底（12）上形成图案化层（52）。另外，可以在衬底（12）和蚀刻阻挡层（14）之间施加粘合剂层（13）（42）。

2. 发明授权

US07125796B2 Plasma etch process for multilayer vias having an organic layer with vertical sidewalls 失效
标题翻译：用于具有垂直侧壁的有机层的多层通孔的等离子体蚀刻工艺
公开(公告)号：US07125796B2
公开(公告)日：2006-10-24
申请号：US11000832
申请日：2004-11-30
申请人： Donald F. Weston , William J. Dauksher , Ngoc V. Le
发明人： Donald F. Weston , William J. Dauksher , Ngoc V. Le
IPC分类号： H01L21/4763 , H01L21/461
CPC分类号： H01L21/76802 , H01L21/76838 , H01L23/5226 , H01L2924/0002 , H01L2924/00
摘要： A process is provided for fabricating a via 52 between bonded wafers without undercutting an organic bonding material 32. The process for forming the via 52 in a structure including a dielectric material 14 and an organic bonding material 32, comprises forming a resist material 42 on the dielectric layer 14 and etching through the dielectric layer 14 and the organic bonding material 32 with 60CF4/20Ar/60CHF3/20N2. The resist may then be removed with an anisotropic high density oxygen plasma.
摘要翻译：提供了一种用于在接合的晶片之间制造通孔52的工艺，而没有切割有机粘合材料32。在包括电介质材料14和有机接合材料32的结构中形成通孔52的工艺包括在电介质层14上形成抗蚀剂材料42，并通过电介质层14和有机接合材料32以60CF _{4 / 20Ar / 60CHF 3 / 20N 2 。然后可以用各向异性高密度氧等离子体除去抗蚀剂。}

3. 发明授权

US08396998B2 Memory-module extender card for visually decoding addresses from diagnostic programs and ignoring operating system accesses 有权
标题翻译：内存模块扩展卡，用于从诊断程序视觉上解码地址，忽略操作系统访问
公开(公告)号：US08396998B2
公开(公告)日：2013-03-12
申请号：US12965699
申请日：2010-12-10
申请人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
发明人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
IPC分类号： G06F3/00 , G06F5/00
CPC分类号： G06F11/273 , G11C11/406 , G11C29/56 , G11C2029/5602
摘要： A diagnostic extender card is plugged into a memory module socket on a personal computer (PC) motherboard. The extender card has a test socket that receives a memory module and an intercepting decoder chip that receives the chip-select (CS) from the motherboard that selects the memory module for access. When CS is activated, the intercepting decoder chip illuminates a visual indicator on the extender card, allowing a user to locate a memory module being accessed. The exact translation or mapping from logical addresses of test programs to physical addresses of the memory modules is not needed, since the visual indicator shows which memory module is really being accessed, regardless of proprietary address mapping by north bridge chips. Operating system memory accesses are filtered out by a counter that counts accesses during a period set by a timer. When the number of accesses exceeds a threshold, the visual indicator is lit.
摘要翻译：诊断扩展卡插入个人计算机（PC）主板上的内存模块插槽。扩展卡具有接收存储器模块的测试插座和从主板接收芯片选择（CS）的截取解码器芯片，其选择存储器模块进行访问。当CS被激活时，拦截解码器芯片照亮扩展卡上的视觉指示符，允许用户定位被访问的存储器模块。不需要将测试程序的逻辑地址到存储器模块的物理地址的精确翻译或映射，因为可视指示器显示了正在被访问的存储器模块，而不考虑北桥芯片的专有地址映射。操作系统存储器访问由在定时器设置的周期内对存取进行计数的计数器滤除。当访问次数超过阈值时，视觉指示灯亮起。

4. 发明申请

US20120151287A1 Memory-Module Extender Card for Visually Decoding Addresses from Diagnostic Programs and Ignoring Operating System Accesses 有权
标题翻译：用于从诊断程序视觉解码地址的内存模块扩展卡，忽略操作系统访问
公开(公告)号：US20120151287A1
公开(公告)日：2012-06-14
申请号：US12965699
申请日：2010-12-10
申请人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
发明人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
IPC分类号： G11C29/00 , G11C29/56
CPC分类号： G06F11/273 , G11C11/406 , G11C29/56 , G11C2029/5602
摘要： A diagnostic extender card is plugged into a memory module socket on a personal computer (PC) motherboard. The extender card has a test socket that receives a memory module and an intercepting decoder chip that receives the chip-select (CS) from the motherboard that selects the memory module for access. When CS is activated, the intercepting decoder chip illuminates a visual indicator on the extender card, allowing a user to locate a memory module being accessed. The exact translation or mapping from logical addresses of test programs to physical addresses of the memory modules is not needed, since the visual indicator shows which memory module is really being accessed, regardless of proprietary address mapping by north bridge chips. Operating system memory accesses are filtered out by a counter that counts accesses during a period set by a timer. When the number of accesses exceeds a threshold, the visual indicator is lit.
摘要翻译：诊断扩展卡插入个人计算机（PC）主板上的内存模块插槽。扩展卡具有接收存储器模块的测试插座和从主板接收芯片选择（CS）的截取解码器芯片，其选择存储器模块进行访问。当CS被激活时，拦截解码器芯片照亮扩展卡上的视觉指示符，允许用户定位被访问的存储器模块。不需要将测试程序的逻辑地址到存储器模块的物理地址的精确翻译或映射，因为可视指示器显示了正在被访问的存储器模块，而不考虑北桥芯片的专有地址映射。操作系统存储器访问由在定时器设置的周期内对存取进行计数的计数器滤除。当访问次数超过阈值时，视觉指示灯亮起。

5. 发明申请

US20130151904A1 Memory-Module Extender Card for Visually Decoding Addresses from Diagnostic Programs and Ignoring Operating System Accesses 有权
标题翻译：用于从诊断程序视觉解码地址的内存模块扩展卡，忽略操作系统访问
公开(公告)号：US20130151904A1
公开(公告)日：2013-06-13
申请号：US13760948
申请日：2013-02-06
申请人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
发明人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
IPC分类号： G06F11/273
CPC分类号： G06F11/273 , G11C11/406 , G11C29/56 , G11C2029/5602
摘要： A diagnostic extender card is plugged into a memory module socket on a personal computer (PC) motherboard. The extender card has a test socket that receives a memory module and an intercepting decoder chip that receives the chip-select (CS) from the motherboard that selects the memory module for access. When CS is activated, the intercepting decoder chip illuminates a visual indicator on the extender card, allowing a user to locate a memory module being accessed. The exact translation or mapping from logical addresses of test programs to physical addresses of the memory modules is not needed, since the visual indicator shows which memory module is really being accessed, regardless of proprietary address mapping by north bridge chips. Operating system memory accesses are filtered out by a counter that counts accesses during a period set by a timer. When the number of accesses exceeds a threshold, the visual indicator is lit.
摘要翻译：诊断扩展卡插入个人计算机（PC）主板上的内存模块插槽。扩展卡具有接收存储器模块的测试插座和从主板接收芯片选择（CS）的截取解码器芯片，其选择存储器模块进行访问。当CS被激活时，拦截解码器芯片照亮扩展卡上的视觉指示符，允许用户定位被访问的存储器模块。不需要将测试程序的逻辑地址到存储器模块的物理地址的精确翻译或映射，因为可视指示器显示了正在被访问的存储器模块，而不考虑北桥芯片的专有地址映射。操作系统存储器访问由在定时器设置的周期内对存取进行计数的计数器滤除。当访问次数超过阈值时，视觉指示灯亮起。

6. 发明授权

US08738819B2 Memory-module extender card for visually decoding addresses from diagnostic programs and ignoring operating system accesses 有权
标题翻译：内存模块扩展卡，用于从诊断程序视觉上解码地址，忽略操作系统访问
公开(公告)号：US08738819B2
公开(公告)日：2014-05-27
申请号：US13760948
申请日：2013-02-06
申请人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
发明人： Jerry N. Le , Ngoc V. Le , Tat Leung Lai , Ramon S. Co
IPC分类号： G06F3/00
CPC分类号： G06F11/273 , G11C11/406 , G11C29/56 , G11C2029/5602
摘要： A diagnostic extender card is plugged into a memory module socket on a personal computer (PC) motherboard. The extender card has a test socket that receives a memory module and an intercepting decoder chip that receives the chip-select (CS) from the motherboard that selects the memory module for access. When CS is activated, the intercepting decoder chip illuminates a visual indicator on the extender card, allowing a user to locate a memory module being accessed. The exact translation or mapping from logical addresses of test programs to physical addresses of the memory modules is not needed, since the visual indicator shows which memory module is really being accessed, regardless of proprietary address mapping by north bridge chips. Operating system memory accesses are filtered out by a counter that counts accesses during a period set by a timer. When the number of accesses exceeds a threshold, the visual indicator is lit.
摘要翻译：诊断扩展卡插入个人计算机（PC）主板上的内存模块插槽。扩展卡具有接收存储器模块的测试插座和从主板接收芯片选择（CS）的截取解码器芯片，其选择存储器模块进行访问。当CS被激活时，拦截解码器芯片照亮扩展卡上的视觉指示符，允许用户定位被访问的存储器模块。不需要将测试程序的逻辑地址到存储器模块的物理地址的精确翻译或映射，因为可视指示器显示了正在被访问的存储器模块，而不考虑北桥芯片的专有地址映射。操作系统存储器访问由在定时器设置的周期内对存取进行计数的计数器滤除。当访问次数超过阈值时，视觉指示灯亮起。

7. 发明授权

US07378346B2 Integrated multi-wavelength Fabry-Perot filter and method of fabrication 失效
标题翻译：集成多波长法布里 - 珀罗滤波器及其制作方法
公开(公告)号：US07378346B2
公开(公告)日：2008-05-27
申请号：US11387468
申请日：2006-03-22
申请人： Ngoc V. Le , Jeffrey H. Baker , Diana J. Convey , Paige M. Holm , Steven M. Smith
发明人： Ngoc V. Le , Jeffrey H. Baker , Diana J. Convey , Paige M. Holm , Steven M. Smith
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： G01J3/26 , G02B5/284
摘要： A method is provided for forming a monolithically integrated optical filter, for example, a Fabry-Perot filter, over a substrate (10). The method comprises forming a first mirror (16) over the substrate (10). A plurality of etalon material layers (32, 34, 36, 38) are formed over the mirror (16), and a plurality of etch stop layers (42, 44, 46) are formed, one each between adjacent etalon material layers (32, 34, 36, 38). A photoresist is patterned to create an opening (54) over the top etalon material layer (38) and an etch (56) is performed down to the top etch stop layer (46). An oxygen plasma (58) may be applied to convert the etch stop layer (46) within the opening (54) to silicon dioxide (57). The photoresist patterning, etching, and applying of an oxygen plasma may be repeated as desired to obtain the desired number of levels (82, 84, 86, 88). A second mirror (72) is then formed on each of the levels (82, 84, 86, 88).
摘要翻译：提供了一种用于在衬底（10）上形成单片集成滤光器（例如法布里 - 珀罗滤光片）的方法。该方法包括在衬底（10）上形成第一反射镜（16）。多个标准具材料层（32,34,36,38）形成在反射镜（16）上方，并且形成多个蚀刻停止层（42,44,46），每个蚀刻停止层之间相邻的标准具材料层（32 ，34,36,38）。图案化光致抗蚀剂以在顶部标准具材料层（38）上方形成开口（54），并且向下蚀刻停止层（46）进行蚀刻（56）。可以施加氧等离子体（58）以将开口（54）内的蚀刻停止层（46）转化为二氧化硅（57）。可以根据需要重复光刻胶图案化，蚀刻和施加氧等离子体以获得所需数量的水平（82,84,86,88）。然后在每个级（82,84,86,88）上形成第二反射镜（72）。

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