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1. 发明授权

US06423384B1 HDP-CVD deposition of low dielectric constant amorphous carbon film 失效
标题翻译：低介电常数无定形碳膜的HDP-CVD沉积
公开(公告)号：US06423384B1
公开(公告)日：2002-07-23
申请号：US09339888
申请日：1999-06-25
申请人： Kasra Khazeni , Eugene Tzou , Zhengquan Tan
发明人： Kasra Khazeni , Eugene Tzou , Zhengquan Tan
IPC分类号： H05H124
CPC分类号： H01L21/3146 , C23C16/26 , H01L21/0276 , H01L21/0332
摘要： The present invention generally provides a method for depositing a low dielectric constant amorphous carbon film on a substrate or other workpiece using high density plasma chemical vapor deposition (HDP-CVD) techniques. Specifically, the present invention provides a method for forming an amorphous carbon film having a low dielectric constant of less than about 3.0 and a high thermal stability at a temperature of at least about 400° C. In a preferred embodiment, the film is deposited using methane (CH4) and argon in a HDP-CVD reactor. The amorphous carbon film formed according to the invention is useful for many applications in ultra large scale integration (ULSI) structures and devices, such as for example, an inter-metal dielectric material and an anti-reflective coating useful for patterning sub-micron interconnect features.
摘要翻译：本发明通常提供了使用高密度等离子体化学气相沉积（HDP-CVD）技术在衬底或其它工件上沉积低介电常数非晶碳膜的方法。具体地说，本发明提供一种形成低介电常数小于约3.0的非晶碳膜和在至少约400℃的温度下的高热稳定性的方法。在优选实施例中，使用甲烷（CH4）和氩气。根据本发明形成的无定形碳膜可用于超大规模集成（ULSI）结构和器件中的许多应用，例如金属间电介质材料和用于构图亚微米互连的抗反射涂层特征。

2. 发明授权

US08054527B2 Adjustably transmissive MEMS-based devices 失效
标题翻译：可调透射的基于MEMS的器件
公开(公告)号：US08054527B2
公开(公告)日：2011-11-08
申请号：US12255423
申请日：2008-10-21
申请人： Kasra Khazeni , Manish Kothari , Marc Mignard , Gang Xu , Russell W. Gruhlke
发明人： Kasra Khazeni , Manish Kothari , Marc Mignard , Gang Xu , Russell W. Gruhlke
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B5/281
摘要： Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.
摘要翻译：调制器装置可选地在至少两种状态之间可调节，其中特定波长的光的透射和/或反射被修改。某些调制器器件在宽范围的波长（包括可见光和红外波长）上基本均匀地可调。其他调制器器件可在可见波长上调节，而不会显着影响红外波长。此外，调制器装置可以与固定薄膜反射结构结合使用。

3. 发明申请

US20100051089A1 LIGHT COLLECTION DEVICE WITH PRISMATIC LIGHT TURNING FEATURES 审中-公开
标题翻译：具有真正亮度特征的光收集装置
公开(公告)号：US20100051089A1
公开(公告)日：2010-03-04
申请号：US12336480
申请日：2008-12-16
申请人： Kasra Khazeni , Manish Kothari , Gang Xu , Ion Bita , K. S. Narayanan
发明人： Kasra Khazeni , Manish Kothari , Gang Xu , Ion Bita , K. S. Narayanan
IPC分类号： H02N6/00
CPC分类号： G02B6/0038 , H01L31/0547 , Y02E10/52
摘要： A light collection device includes a light guide body and a plurality of spaced-apart slits. The slits are formed by undercuts in the light guide body. Sides of the slits form facets that redirect light impinging on the facets. In some embodiments, the light collection body is attached to a photovoltaic cell. Light impinging on the light collection body is redirected towards the photovoltaic cell by the slits. The photovoltaic cells convert the light into electrical energy.
摘要翻译：光采集装置包括导光体和多个间隔开的狭缝。狭缝由导光体内的切口形成。狭缝的侧面形成了将入射到小平面上的光重定向的小平面。在一些实施例中，光收集体附接到光伏电池。照射在光收集体上的光被狭缝重新导向光伏电池。光伏电池将光转换成电能。

4. 发明申请

US20090277496A1 Solar Energy Collection Devices 失效
标题翻译：太阳能收集装置
公开(公告)号：US20090277496A1
公开(公告)日：2009-11-12
申请号：US12235376
申请日：2008-09-22
申请人： Kasra Khazeni , Faraj Aalaei , Saeid Ghafouri , Kambiz Farnaam
发明人： Kasra Khazeni , Faraj Aalaei , Saeid Ghafouri , Kambiz Farnaam
IPC分类号： H01L31/042
CPC分类号： H01L31/0547 , F24S23/30 , F24S30/425 , F24S40/20 , F24S50/20 , H01L31/0543 , H02S20/30 , H02S20/32 , Y02E10/47 , Y02E10/52
摘要： Devices and methods for collecting solar energy using photovoltaic material are disclosed.
摘要翻译：公开了使用光伏材料收集太阳能的装置和方法。

5. 发明申请

US20090242024A1 PHOTOVOLTAICS WITH INTERFEROMETRIC BACK SIDE MASKS 审中-公开
标题翻译：具有干涉式背面遮罩的光伏
公开(公告)号：US20090242024A1
公开(公告)日：2009-10-01
申请号：US12336839
申请日：2008-12-17
申请人： Manish Kothari , Kasra Khazeni
发明人： Manish Kothari , Kasra Khazeni
IPC分类号： H01L31/0232 , H01L31/18
CPC分类号： H01L31/02168 , G02B5/284 , G02B26/001 , H01L31/022425 , Y02E10/50
摘要： An interferometric mask covers reflective conductors on the back side of a photovoltaic device. Such an interferometric mask may reduce reflections of incident light from the conductors. In various embodiments, the mask reduces reflections, so that a front and back electrode pattern appears black or similar in color to surrounding features of the device. In other embodiments, the mask may modulate reflections of light such that the electrode pattern matches a color in the visible spectrum.
摘要翻译：干涉式掩模覆盖光电器件背面的反射导体。这种干涉式掩模可以减少来自导体的入射光的反射。在各种实施例中，掩模减少了反射，使得前部和后部电极图案的颜色与设备的周围特征呈现黑色或类似的颜色。在其他实施例中，掩模可以调制光的反射，使得电极图案与可见光谱中的颜色匹配。

6. 发明申请

US20080150517A1 METHOD AND APPARATUS FOR MEASURING THE FORCE OF STICTION OF A MEMBRANE IN A MEMS DEVICE 失效
标题翻译：用于测量MEMS器件中的膜的力的方法和装置
公开(公告)号：US20080150517A1
公开(公告)日：2008-06-26
申请号：US11614795
申请日：2006-12-21
申请人： Kasra Khazeni
发明人： Kasra Khazeni
IPC分类号： G01R31/00
CPC分类号： G02B26/001
摘要： Disclosed are methods and systems for testing MEMS devices (e.g., interferometric modulators) so as to induce a moveable element to move from a first position to a second position and to detect the movement. The methods include applying an electrical current to the movable element in the presence of a magnetic field, thereby producing a Lorentz force on the movable element. The force required to move the movable element from the first position to the second position can then be estimated based on the magnitudes and geometric relationships of the electrical current and the magnetic field, and the geometry of the movable element. In some embodiments, the first position may be a movable element adhered to another surface (e.g., a layer on a substrate) due to stiction forces. In these embodiments, the stiction forces can be estimated. In other embodiments, the first position may be a relaxed position, where the movable element is spaced a first distance from a substrate, and the second position may be a second distance from the substrate and/or contacting the substrate. In these embodiments, the springiness (e.g., a spring constant) of support structures supporting the movable element can be estimated.
摘要翻译：公开了用于测试MEMS器件（例如，干涉式调制器）的方法和系统，以便使可移动元件从第一位置移动到第二位置并检测该移动。所述方法包括在存在磁场的情况下向可动元件施加电流，由此在可移动元件上产生洛伦兹力。然后可以基于电流和磁场的大小和几何关系以及可移动元件的几何形状来估计将可移动元件从第一位置移动到第二位置所需的力。在一些实施例中，第一位置可以是由于粘性力而粘附到另一表面（例如，基底上的层）的可移动元件。在这些实施例中，可以估计静力。在其他实施例中，第一位置可以是松弛位置，其中可移动元件与衬底隔开第一距离，并且第二位置可以距离衬底和/或接触衬底的第二距离。在这些实施例中，可以估计支撑可移动元件的支撑结构的弹性（例如，弹簧常数）。

7. 发明授权

US08797628B2 Display with integrated photovoltaic device 有权
标题翻译：集成光伏器件显示
公开(公告)号：US08797628B2
公开(公告)日：2014-08-05
申请号：US12842845
申请日：2010-07-23
申请人： Manish Kothari , Kasra Khazeni
发明人： Manish Kothari , Kasra Khazeni
IPC分类号： G02B26/00 , H02N6/00 , G02B26/08
CPC分类号： G02B26/0841 , G02B26/001 , G02F1/13306 , G02F1/133512 , G02F2001/13324 , H01L31/043 , Y02E10/50 , Y10T29/49002
摘要： A display with a photovoltaic (PV) cells integrated as the front side and/or back side of the display is disclosed. Ambient light may reach a PV cell situated behind a display through fully or partially transmissive features within the display. Display-generated light may also reach a PV cell behind a display. A transmissive PV material situated in front of a display may collect both ambient light as well as display-generated light.
摘要翻译：公开了一种具有集成为显示器的前侧和/或后侧的光伏（PV）电池的显示器。环境光可以通过显示器内的完全或部分透射的特征到达位于显示器后面的PV电池。显示器生成的光也可以到达显示器后面的PV电池。位于显示器前面的透射型PV材料可以收集环境光以及显示产生的光。

8. 发明授权

US08358266B2 Light turning device with prismatic light turning features 失效
标题翻译：具有棱镜灯转动功能的车削装置
公开(公告)号：US08358266B2
公开(公告)日：2013-01-22
申请号：US12552124
申请日：2009-09-01
申请人： Kasra Khazeni , Manish Kothari , Gang Xu , Ion Bita , Kollengode S. Narayanan
发明人： Kasra Khazeni , Manish Kothari , Gang Xu , Ion Bita , Kollengode S. Narayanan
IPC分类号： G09G3/34
CPC分类号： G02B6/0065 , B29D11/00663 , G02B6/0015 , G02B6/0028 , G02B6/0035
摘要： A light guide device includes a light guide body and two or more pluralities of spaced-apart slits. The slits are formed by undercuts in the light guide body. Sidewalls of the slits form facets that redirect light impinging on the facets. In some embodiments, the light guide body is attached to a light source. The light source emits light that is injected into the light guide body and the slits redirect the light out of the light guide body and towards a desired target. In some embodiments, the target is a display and a first plurality of slits directs light from the light source across the light guide body and over the face of the display. A second plurality of slits then directs light out of the light guide body and towards the display.
摘要翻译：导光装置包括导光体和两个或更多个间隔开的狭缝。狭缝由导光体内的切口形成。狭缝的侧壁形成了将光照射在小平面上的光束。在一些实施例中，导光体附接到光源。光源发射被注入到导光体中的光，并且狭缝将光从导光体重新导向所需目标。在一些实施例中，目标是显示器，并且第一多个狭缝引导来自光源的光穿过导光体并且在显示器的表面上。然后，第二多个狭缝将光从导光体引导并朝向显示器。

9. 发明申请

US20120194896A1 DISPLAY WITH INTEGRATED PHOTOVOLTAICS 审中-公开
标题翻译：显示与集成的光伏
公开(公告)号：US20120194896A1
公开(公告)日：2012-08-02
申请号：US13444474
申请日：2012-04-11
申请人： Manish Kothari , Kasra Khazeni
发明人： Manish Kothari , Kasra Khazeni
IPC分类号： G02F1/21 , G02F1/01
CPC分类号： G02B26/0841 , G02B26/001 , G02F1/13306 , G02F1/133512 , G02F2001/13324 , H01L31/043 , Y02E10/50 , Y10T29/49002
摘要： A display with patterned photovoltaic (PV) material integrated on the front side and/or back side of the display is disclosed. Light may reach PV material situated behind a display through fully or partially transmissive features or gaps within the display. Display-generated light may also reach PV material behind a display. A patterned PV material situated in front of a display may collect both ambient light as well as display-generated light.
摘要翻译：公开了一种具有集成在显示器的前侧和/或后侧上的图案化光伏（PV）材料的显示器。光可以通过显示器内的完全或部分透射的特征或间隙而到达显示器后面的PV材料。显示器生成的光线也可能到达显示器后面的光伏材料。位于显示器前面的图案化PV材料可以收集环境光以及显示器产生的光。

10. 发明授权

US08111262B2 Interferometric modulator displays with reduced color sensitivity 失效
标题翻译：干涉式调制器显示色彩降低
公开(公告)号：US08111262B2
公开(公告)日：2012-02-07
申请号：US11750891
申请日：2007-05-18
申请人： Kostadin Djordjev , Kasra Khazeni , Alok Govil
发明人： Kostadin Djordjev , Kasra Khazeni , Alok Govil
IPC分类号： G09G5/02
CPC分类号： G02B26/001 , G02B27/0012
摘要： Methods are described for selecting reflective layer distances in an interferometric modulator display that result in reduced color sensitivity to temperature and process variation. Colors are selected for interferometric modulator subpixels that correspond to a minimum in the rate that the colors change with respect to reflective layer distance. In some cases, colors are selected that deviate from the minimums in order to obtain a desired target color (e.g., a desired white point).
摘要翻译：描述了用于在干涉式调制器显示器中选择反射层距离的方法，其导致对温度和工艺变化的颜色敏感性降低。选择对应于颜色相对于反射层距离变化的速率的最小值的干涉式调制器子像素的颜色。在某些情况下，选择偏离最小值的颜色以获得期望的目标颜色（例如，期望的白点）。

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