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1. 发明授权

US06370221B2 Method of setting a position of an object of measurement in layer thickness measurement by X-ray fluorescence 有权
标题翻译：通过X射线荧光来设定层厚度测量中的测量对象的位置的方法
公开(公告)号：US06370221B2
公开(公告)日：2002-04-09
申请号：US09812476
申请日：2001-03-19
申请人： Karl-Heinz Kaiser , Volker Rössiger
发明人： Karl-Heinz Kaiser , Volker Rössiger
IPC分类号： G01N23223
CPC分类号： G01N23/223 , G01N2223/076
摘要： The invention relates to a method of setting a position of an object of measurement in layer thickness measurement by X-ray fluorescence in which a beam of an optical recording device is projected into the beam of the X-radiation and in which the surface of the object of measurement is recorded and output as an image comprising a number of image points, with the distance between the surface and the collimator being changed by an absolute amount of a path of movement, with changes in brightness of the image points being recorded in at least one measuring plane during the at least one change of the distance between the surface and the collimator, with the maximum of the difference in brightness of the image points of an image being ascertained after the at least one change of the absolute amount of the distance, and with the distance between the collimator and the object of measurement being set to the position of the ascertained maximum of the difference in brightness.
摘要翻译：本发明涉及一种通过X射线荧光来设置层厚测量中的测量对象的位置的方法，其中光记录装置的光束投射到X射线的光束中，并且其中将测量对象记录并输出为包括多个图像点的图像，其中表面和准直器之间的距离被改变移动路径的绝对量，并且图像点的亮度变化被记录在在表面和准直器之间的距离的至少一个改变期间，至少一个测量平面，在图像的绝对量的至少一个改变之后，确定图像的图像点的亮度差的最大值并且准直器和测量对象之间的距离被设置为确定的亮度差的最大值的位置。

2. 发明授权

US07076021B2 Apparatus for measurement of the thickness of thin layers 有权
标题翻译：用于测量薄层厚度的装置
公开(公告)号：US07076021B2
公开(公告)日：2006-07-11
申请号：US10739673
申请日：2003-12-17
申请人： Helmut Fischer , Volker Rössiger
发明人： Helmut Fischer , Volker Rössiger
IPC分类号： G01N23/223
CPC分类号： G01B15/02 , G01N23/223 , G01N2223/076
摘要： An apparatus for measurement of the thickness of thin layers by means of X-rays using an X-ray tube which emits X-rays which are directed at a layer to be measured, has at least one aperture apparatus arranged between the X-ray tube and the layer to be measured. The apparatus includes an area absorbing X-rays and an aperture opening. At least one aperture opening in the aperture apparatus has a geometric shape which, seen in the beam direction, projects an area which at least in places is matched to the geometry of the layer to be measured.
摘要翻译：一种利用X射线管测量薄层厚度的装置，该X射线管发射指向被测层的X射线，具有至少一个孔径装置，其设置在X射线管和要测量的层。该装置包括吸收X射线和孔径开口的区域。开口装置中的至少一个开口开口具有几何形状，其在波束方向上看到至少在与被测量层的几何形状匹配的区域上突出。

3. 发明授权

US06438209B1 Apparatus for guiding X-rays 有权
标题翻译：用于引导X射线的装置
公开(公告)号：US06438209B1
公开(公告)日：2002-08-20
申请号：US09707394
申请日：2000-11-06
申请人： Volker Rössiger
发明人： Volker Rössiger
IPC分类号： G21K104
CPC分类号： G21K1/06
摘要： Apparatus for guiding X-rays from a radiation source to a measurement object (16) having at least two reflecting areas (18) forming a slit.
摘要翻译：用于将X射线从辐射源引导到具有形成狭缝的至少两个反射区域（18）的测量对象（16）的装置。

4. 发明授权

US06364528B1 Determination of the measuring spot during x-ray fluorescence analysis 失效
标题翻译： x射线荧光分析中测量点的测定
公开(公告)号：US06364528B1
公开(公告)日：2002-04-02
申请号：US09374331
申请日：1999-08-13
申请人： Volker Rössiger
发明人： Volker Rössiger
IPC分类号： G01D1800
CPC分类号： G01N23/223 , G01N2223/076
摘要： A specimen part for determining the intensity data of a measuring spot in X-ray fluorescent analysis is characterized in that it has a probe with a clearly defined contour surrounded by a surrounding material, the surrounding material and the probe material having the same linear attenuation coefficients for the emitted X-ray fluorescent radiation. With a method according to the invention it is possible to determine both the intensity centre and the contour of the measuring spot.
摘要翻译：用于确定X射线荧光分析中的测量点的强度数据的样本部分的特征在于其具有由周围材料围绕的明确限定的轮廓的探针，周围材料和探针材料具有相同的线性衰减系数用于发射的X射线荧光辐射。利用根据本发明的方法，可以确定测量点的强度中心和轮廓。

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