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1. 发明授权

US06330279B1 System and method of correcting gain and offset error in a signal amplifier for a position sensitive detector 失效
标题翻译：用于位置敏感检测器的信号放大器校正增益和偏移误差的系统和方法
公开(公告)号：US06330279B1
公开(公告)日：2001-12-11
申请号：US09111636
申请日：1998-07-07
申请人： Karl A. Belser , Stephen J. Hrinya , Max Artusy
发明人： Karl A. Belser , Stephen J. Hrinya , Max Artusy
IPC分类号： H04K708
CPC分类号： H03K5/02 , G01S17/46 , H03F3/087 , H03F3/2171
摘要： A system and method is disclosed for correcting gain and offset errors in a signal amplifier for a position sensitive detector. The present invention eliminates the need to perform division for normalization by holding constant a signal proportional to the sum of the two signals generated by the position sensitive detector. First the two signals generated by the position sensitive detector are pulse-width modulated with a common variable duty cycle clock, and then the resulting modulated signals are low-pass filtered to extract the DC component. The duty cycle is varied so that the sum of the two DC components is held constant. In the preferred embodiment, the means for varying the duty cycle are closed-loop feedback and open-loop feed forward. The closed-loop feedback gives long term accuracy and the open-loop feed forward gives rapid settling time. Once the sum of the DC components of the modulated signals is held constant, the individual DC components of the modulated signals are normalized and may be used for servo or other applications.
摘要翻译：公开了一种用于校正用于位置敏感检测器的信号放大器中的增益和偏移误差的系统和方法。本发明消除了通过保持与由位置敏感检测器产生的两个信号的和成比例的信号的恒定来进行归一化的需要。首先，由位置敏感检测器产生的两个信号用公共可变占空比时钟进行脉冲宽度调制，然后将所得到的调制信号进行低通滤波以提取直流分量。使占空比变化，使得两个DC分量的和保持恒定。在优选实施例中，用于改变占空比的装置是闭环反馈和开环馈送。闭环反馈给出长期准确度，开环前馈给出快速建立时间。一旦调制信号的直流分量的总和保持恒定，调制信号的各个DC分量被归一化，并可用于伺服或其他应用。

2. 发明授权

US5708250A Voltage controller for electrostatic chuck of vacuum plasma processors 失效
标题翻译：真空等离子体处理器静电吸盘电压控制器
公开(公告)号：US5708250A
公开(公告)日：1998-01-13
申请号：US623774
申请日：1996-03-29
申请人： Neil Benjamin , Seyed Jafar Jafarian-Tehrani , Max Artusy
发明人： Neil Benjamin , Seyed Jafar Jafarian-Tehrani , Max Artusy
IPC分类号： H01L21/683 , H02N13/00 , B23K10/00
CPC分类号： H02N13/00 , H01L21/6831 , H01L21/6833 , Y10S269/903
摘要： An r.f. excited vacuum plasma processor has a workpiece held in place by a monopolar or bipolar electrostatic chuck having an electrode that develops peak r.f. voltages over a wide amplitude range. A chuck DC power supply source is connected to the chuck. An r.f. peak detecting circuit coupled with the electrode is part of a circuit for controlling the DC voltage applied by the chuck power supply to the chuck. The control circuit supplies an unamplified replica of a DC voltage derived by the peak detecting circuit to the chuck DC power supply source via a DC circuit including only passive elements so the level of the DC voltage applied to the chuck varies in response to variations in the peak amplitude of the r.f. voltage. The peak detector includes at least several series connected diodes having electrodes polarized in the same direction or two stacks of series connected diodes. In one of the stacks, the diode electrodes are polarized in one direction and in the other stack the diode electrodes are polarized in the other direction. The diodes of the peak detecting circuit are arranged so the DC bias voltage supplied to the chuck and the peak value of the r.f. voltage developed at the electrode have the same order of magnitude.
摘要翻译：一个r.f. 激发真空等离子体处理器通过具有产生峰值r.f的电极的单极或双极静电卡盘将工件保持在适当位置。电压在宽幅度范围内。卡盘直流电源连接到卡盘。一个r.f. 与电极耦合的峰值检测电路是用于控制由卡盘电源向卡盘施加的直流电压的电路的一部分。控制电路通过仅包括无源元件的DC电路向峰值检测电路提供由峰值检测电路导出的直流电压的未放大副本给卡盘直流电源，因此施加到卡盘上的直流电压的电平随着峰的振幅电压。峰值检测器包括至少几个串联连接的二极管，其具有在相同方向上极化的电极或两个串联连接的二极管。在一个堆叠中，二极管电极在一个方向上极化，而在另一个堆叠中，二极管电极在另一个方向上极化。峰值检测电路的二极管布置成提供给卡盘的直流偏置电压和r.f.的峰值。在电极处产生的电压具有相同的数量级。

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