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    • 1. 发明专利
    • Electroless plating method
    • 电镀法
    • JP2012072440A
    • 2012-04-12
    • JP2010218073
    • 2010-09-29
    • Kanto Gakuin Univ Surface Engineering Research InstituteToagosei Co Ltd東亞合成株式会社株式会社関東学院大学表面工学研究所
    • HIRAOKA HIDEKIKANBE SHINYAHORIE YOJIHONMA HIDEOWATANABE MITSUHIROSAITO YUICHI
    • C23C18/30H01L21/288H05K3/18
    • PROBLEM TO BE SOLVED: To provide an electroless plating method, which can ensure good adhesion between a plating film and a workpiece without using any noble metal such as palladium and without using any harmful chemical such as chromic acid and can permit repeated use of a plating solution.SOLUTION: The electroless plating method includes: a step (1) of applying a polymer containing, as side chains, organic residues having the ability to reduce metallic ions of a plating metal onto the surface of a workpiece; a step (2) of depositing a partially reduced metal oxide of the metal ion on the surface of the workpiece with the applied polymer in a solution containing the metallic ions but not containing a reducing agent capable of reducing the metallic ions; a step (3) of reducing the partially reduced metal oxide into a self-catalytic plating metal in a solution containing a reducing agent capable of reducing the metal ions; and a step (4) of forming a coat of the plating metal on the surface of the workpiece in an electroless plating solution.
    • 要解决的问题:提供一种化学镀方法,其可以在不使用任何贵金属如钯并且不使用任何有害化学物质如铬酸的情况下确保镀膜和工件之间的良好粘附,并且可以重复使用 的电镀液。 解决方案:化学镀方法包括:将包含作为侧链的聚合物的聚合物施加到具有将电镀金属的金属离子还原到工件表面的能力的有机残余物的步骤(1) 将所述金属离子的部分还原的金属氧化物沉积在所述工件的表面上,使所述涂覆的聚合物在含有所述金属离子但不包含能够还原金属离子的还原剂的溶液中; 在含有能够还原金属离子的还原剂的溶液中将部分还原的金属氧化物还原成自催化电镀金属的步骤(3) 以及在化学镀溶液中在工件的表面上形成电镀金属的涂层的工序(4)。 版权所有(C)2012,JPO&INPIT
    • 2. 发明专利
    • Catalyst solution used in electroless plating method, method for preparing the catalyst solution, electroless plating method using the catalyst solution, and plated product with metal layer including metallic film formed by using the electroless plating method
    • 用于电沉积方法的催化剂溶液,用于制备催化剂溶液的方法,使用催化剂溶液的电沉积方法以及包含通过使用电沉积方法形成的金属膜的金属层的产品
    • JP2011225929A
    • 2011-11-10
    • JP2010096460
    • 2010-04-19
    • Kanto Gakuin Univ Surface Engineering Research Institute株式会社関東学院大学表面工学研究所
    • HONMA HIDEOWATANABE MITSUHIRO
    • C23C18/28H05K3/18
    • PROBLEM TO BE SOLVED: To provide a catalyst solution which is used in an electroless plating method, the catalyst solution showing a good catalytic action and forming a copper catalyst nucleus which contains no metallic component such as palladium and tin having large specific resistance.SOLUTION: In order to solve the problem, the catalyst solution, which contains cuprous ion, hypophosphorous acid ion and chlorine ion and whose pH is 6.0-8.5, is employed. In the catalyst solution, the hypophosphorous acid stabilizes the existence of the cuprous ion. Accordingly, when a material to be plated is treated with the catalyst solution, the cuprous ion is uniformly adsorbed on the surface of the material to be plated. The cuprous ion, which is adsorbed on the material to be plated, becomes a catalyst nucleus of metal copper, when it is subjected to reduction treatment, to show a good catalytic action to an electroless plating solution. Further, by using this catalyst solution, a metallic component is prevented from remaining on the surface of a base material posterior to wire processing as in the case that a palladium catalyst is used. Consequently, even if fine pitch wiring is formed, high insulation reliability is maintained.
    • 要解决的问题:为了提供一种用于无电镀方法的催化剂溶液,催化剂溶液显示出良好的催化作用并形成不含金属组分如铜和锡的电阻率大的铜催化剂核 。 解决方案:为了解决这个问题,采用含有亚硝酸根离子,次磷酸离子和氯离子,其pH为6.0-8.5的催化剂溶液。 在催化剂溶液中,次磷酸稳定了亚铜离子的存在。 因此,当用催化剂溶液处理待镀覆的材料时,亚铜离子被均匀地吸附在被镀材料的表面上。 吸附在被镀材料上的亚铁离子当进行还原处理时,成为金属铜的催化剂核,对化学镀溶液表现出良好的催化作用。 此外,通过使用该催化剂溶液,如使用钯催化剂的情况那样,防止金属成分残留在线材加工后的基材的表面。 因此,即使形成细间距布线,仍然保持高的绝缘可靠性。 版权所有(C)2012,JPO&INPIT