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1. 发明授权

US5225026A Bonding method and apparatus therefor 失效
标题翻译：接合方法及其装置
公开(公告)号：US5225026A
公开(公告)日：1993-07-06
申请号：US801443
申请日：1991-12-02
申请人： Kanji Ozawa , Yukitaka Sonoda
发明人： Kanji Ozawa , Yukitaka Sonoda
IPC分类号： G01B11/24 , G01B11/27 , H01L21/52 , H01L21/60 , H01L21/68 , H05K13/04
CPC分类号： G01B11/272 , H01L21/682 , H05K13/0413 , Y10T29/49131 , Y10T29/49133 , Y10T29/53091
摘要： Two parts to be bonded together, such as a circuit board and a chip, are brought into one-above-the-other relationship, and before bonding is performed, a detecting device with an upper opening and a lower opening is set between the two parts, and by the use of optical system that is lights which passes through the openings, a positional alignment between the two parts is performed by correcting any discrepancy between the two so that the two parts are properly set one on the other and accurate bonding is executed to the two parts.
摘要翻译：要结合在一起的两个部分，例如电路板和芯片，彼此具有一个关系，并且在接合之前，将具有上部开口和下部开口的检测装置设置在两个部件，并且通过使用通过开口的光的光学系统，通过校正两者之间的任何差异来执行两部分之间的位置对准，使得两个部分彼此适当地设置，并且精确的结合是执行到两部分。

2. 发明授权

US5190205A Bonding head assembly 失效
标题翻译：粘接头总成
公开(公告)号：US5190205A
公开(公告)日：1993-03-02
申请号：US785494
申请日：1991-10-31
申请人： Kanji Ozawa , Yukitaka Sonoda
发明人： Kanji Ozawa , Yukitaka Sonoda
IPC分类号： H01L21/60 , B23K20/02
CPC分类号： B23K20/021
摘要： A bonding head assembly including a retaining block having a vacuum suction hole or electromagnet on its concave surface formed on the undersurface, a central shaft loosely passing through the central hole of the retaining block and having a bonding tool at the lower end, an oscillating ball attached to the upper part of the central shaft. After the bonding tool is brought into in contact with a workpiece, vacuum suction or electromagnet is activated so that the oscillating ball is brought into a tight contact with the concave surface of the retaining block, thus securely retaining the oscillating ball in the retaining block and, as a result, setting the position of the central shaft and therefore the bonding tool.
摘要翻译：一种焊接头组件，包括在其下表面上形成的凹面上具有真空抽吸孔或电磁体的保持块，松动地穿过保持块的中心孔并且在下端具有接合工具的中心轴，摆动球连接到中心轴的上部。在接合工具与工件接触之后，真空抽吸或电磁体被激活，使得摆动球与保持块的凹面紧密接触，从而将摆动球牢固地保持在保持块中，并且因此，设置中心轴的位置并因此设定接合工具。

3. 发明授权

US5306139A Suction adhesion-type holder 失效
标题翻译：吸附粘合型支架
公开(公告)号：US5306139A
公开(公告)日：1994-04-26
申请号：US792708
申请日：1991-11-15
申请人： Kanji Ozawa , Yukitaka Sonoda
发明人： Kanji Ozawa , Yukitaka Sonoda
IPC分类号： C30B25/12 , C30B31/14 , F27D5/00 , H01L21/52 , H01L21/60 , H01L21/683
CPC分类号： H01L21/6838 , C30B25/12 , C30B31/14 , F27D5/00 , H01L2224/851 , Y10S165/90
摘要： A suction adhesion-type holder used, for example, in a bonding machine including an air cooling device provided between a bonding stage and a vacuum pump that creates a vacuum suction in the bonding stage through the cooling device. Air suction holes formed in the bonding stage, that has a heating element, are connected to the air cooling device via a pipe and air heated by the bonding stage is cooled in the air cooling device when the heated air flows in a spiral pipe installed inside the cooling device and then sucked into the vacuum pump. The spiral pipe is cooled by a fan.
摘要翻译：一种吸附粘合型保持器，例如在包括设置在接合台和真空泵之间的空气冷却装置的接合机中使用，其通过冷却装置在接合台中产生真空吸力。在具有加热元件的接合台上形成的空气吸入孔通过管道连接到空气冷却装置，并且当加热的空气在安装在内部的螺旋管中流动时，在结合台加热的空气在空气冷却装置中被冷却冷却装置然后吸入真空泵。螺旋管由风扇冷却。

4. 发明授权

US4297676A Mark signal amplifier 失效
标题翻译：标记信号放大器
公开(公告)号：US4297676A
公开(公告)日：1981-10-27
申请号：US107087
申请日：1979-12-26
申请人： Shigeru Moriya , Nobuo Hamamto , Kazuo Ichino , Kanji Ozawa
发明人： Shigeru Moriya , Nobuo Hamamto , Kazuo Ichino , Kanji Ozawa
IPC分类号： H01L21/027 , G06K7/10 , H01J37/304 , G06K9/32
CPC分类号： G06K7/10851 , H01J37/3045
摘要： In electron-beam lithography, and similar operations, to achieve good drawing accuracy on a sample, it is necessary to detect the position of a mark on the sample with high accuracy. To accomplish this, a mark signal amplifier is provided including a first circuit for taking maximum and minimum values out of a mark signal detected by causing an electron beam to scan a mark area provided on a sample. A second circuit determines a peak-to-peak value of an amplitude of the detected mark signal in accordance with the maximum and minimum values, and a third circuit produces an output signal of a constant amplitude level as an input to a binary-coding circuit in accordance with the peak-to-peak value. The output signal of the third circuit remains constant in spite of fluctuations of the detected mark signal, so that a higher accuracy is obtained in detecting the mark for positioning. An alternative arrangement adds the maximum and minimum values, and establishes a mean value of the maximum and minimum values from the resultant sum.
摘要翻译：在电子束光刻和类似的操作中，为了在样品上获得良好的绘图精度，有必要高精度地检测样品上标记的位置。为了实现这一点，提供了一种标记信号放大器，其包括用于从通过使电子束扫描样品上提供的标记区域而检测的标记信号中获取最大值和最小值的第一电路。第二电路根据最大值和最小值确定检测到的标记信号的幅度的峰 - 峰值，并且第三电路产生恒定幅度电平的输出信号作为二进制编码电路的输入按照峰峰值。尽管检测到的标记信号的波动，第三电路的输出信号保持恒定，从而在检测定位标记时获得较高的精度。一个替代方案是添加最大值和最小值，并从所得到的和建立最大值和最小值的平均值。

5. 发明授权

US5265788A Bonding machine with oxidization preventive means 失效
标题翻译：粘合机具有防氧化的手段
公开(公告)号：US5265788A
公开(公告)日：1993-11-30
申请号：US797801
申请日：1991-11-21
申请人： Kanji Ozawa , Yukitaki Sonoda
发明人： Kanji Ozawa , Yukitaki Sonoda
IPC分类号： H01L21/60 , B23K3/08 , H01L21/52 , B23K1/00
CPC分类号： B23K3/08
摘要： A bonding machine with an oxidation preventive assembly that is made up of two pipes installed on the bonding stage. The two pipes are formed with gas discharge holes and their terminal ends are closed by a block to prevent a back-flow of the gas supplied into the pipes. Thus, a uniform gas atmosphere is created around the workpiece which is placed on the bonding stage, preventing oxidation of the workpiece.
摘要翻译：一种具有防氧化组件的粘合机，其由安装在粘接台上的两根管组成。两根管子形成有气体排放孔，其末端用块封闭，以防止供应到管道中的气体回流。因此，在放置在接合台上的工件周围产生均匀的气体气氛，防止工件氧化。

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