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1. 发明专利

JP2005076117A Method for preparing anodized porous alumina film, and anodized porous alumina film prepared with the method 有权
标题翻译：用于制备阳离子多孔铝膜的方法和用该方法制备的阳离子多孔铝膜
公开(公告)号：JP2005076117A
公开(公告)日：2005-03-24
申请号：JP2003311362
申请日：2003-09-03
申请人： Kanagawa Acad Of Sci & Technol , Hideki Masuda , 秀樹益田 , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , MATSUI YOSHITAKA
IPC分类号： C25D11/16 , C25D11/04
摘要： PROBLEM TO BE SOLVED: To provide a technology for easily and inexpensively preparing an anodized porous alumina film having pores regularly arranged at minute intervals.
SOLUTION: The method for preparing an anodized porous alumina film comprises a transfer step for transferring a surface structure having regularly arranged unevenness onto an aluminum surface, and an anodizing step for forming the porous alumina film having the pores of a predetermined shape by anodizing, where the alumina film is formed from a plurality of regularly arranged recesses as starting points out of the uneven structure on the aluminum surface provided by the above transfer step, wherein the transfer step includes depositing aluminum on the uneven surface structure to transfer the structure onto the aluminum surface. The anodized porous alumina film is prepared with the method. The method easily and inexpensively forms a desired surface uneven structure, particularly by using the regular arrangement of fine particles for forming the uneven surface structure.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种容易且廉价地制备具有以微小间隔规则排列的孔的阳极氧化多孔氧化铝膜的技术。解决方案：制备阳极氧化多孔氧化铝膜的方法包括转印步骤，用于将具有规则排列的凹凸的表面结构转印到铝表面上，以及阳极氧化步骤，用于通过以下步骤形成具有预定形状的孔的多孔氧化铝膜：阳极氧化，其中氧化铝膜由多个规则排列的凹槽形成，作为通过上述转印步骤提供的铝表面上的不平坦结构之外的起始点，其中转印步骤包括在不平坦表面结构上沉积铝以转移结构到铝表面。用该方法制备阳极氧化多孔氧化铝膜。该方法容易且廉价地形成期望的表面不均匀结构，特别是通过使用用于形成不平坦表面结构的细颗粒的规则排列。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2005272886A Anodically oxidized porous alumina and manufacturing method therefor 有权
标题翻译：阳极氧化多孔铝及其制造方法
公开(公告)号：JP2005272886A
公开(公告)日：2005-10-06
申请号：JP2004084952
申请日：2004-03-23
申请人： Kanagawa Acad Of Sci & Technol , Hideki Masuda , 秀樹益田 , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , NISHIO KAZUYUKI , TAKENAKA KENSUKE
IPC分类号： C25D11/04 , C25D11/18
摘要： PROBLEM TO BE SOLVED: To provide anodically oxidized porous alumina in which defects are not included in a wide range of ≥35 pieces in length and breadth, and micropores are formed into an ideal triangular lattice arrangement, or the number of defects included in the micropore arrangement of ≤10,000 pieces is ≤100 pieces, and to provide a manufacturing method therefor. SOLUTION: In the anodically oxidized porous alumina, defects are not included in a wide range arranged by ≥35 pieces in length and breadth, and micropores are formed into an ideal triangular lattice arrangement by using a suitable anodically oxidized condition, or the number of defects included in the micropore arrangement of 10,000 pieces forming triangular lattices is ≤100 pieces. The manufacturing method uses the same. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供阳极氧化的多孔氧化铝，其长度和宽度在宽范围内不包括≥35个缺陷，并且微孔形成为理想的三角形格子布置，或包括的缺陷数在微孔布置≤10,000件中≤100件，并提供其制造方法。解决方案：在阳极氧化的多孔氧化铝中，缺陷不包括在长度和宽度上≥35个布置的宽范围内，并且通过使用合适的阳极氧化条件将微孔形成为理想的三角形格子布置，或包含在形成三角形格子的10000个细孔布置中的缺陷数量≤100个。制造方法使用相同。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2004285422A Metallic mold, manufacturing method therefor, anodic oxidation porous alumina and manufacturing method therefor 有权
公开(公告)号：JP2004285422A
公开(公告)日：2004-10-14
申请号：JP2003079753
申请日：2003-03-24
申请人： Kanagawa Acad Of Sci & Technol , Hideki Masuda , 秀樹益田 , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , NISHIO KAZUYUKI , YASUI KENJI
IPC分类号： C25D11/04 , C25D1/00 , C25D11/16
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold for obtaining anodic oxidation porous alumina having pores arranged highly regularly with fine periodic intervals of 60 nm or shorter, and to provide a method for preparing the anodic oxidation alumina film by using the mold.
SOLUTION: The method for obtaining a metallic mold 5 comprises giving an electroplated conductive layer or an electroless plated catalytic layer 3 on a resist pattern 2 having fine unevenness with intervals of 60 nm or smaller formed thereon, depositing a metal 4 for forming a mold thereon, and peeling the resist. The method for obtaining the anodic oxidation porous alumina 8 having regularly displaced straight pores 7, comprises pressing the mold to an aluminum material 6 to copy an uneven pattern on aluminum, and then anodically oxidizing the aluminum having a periodic structure of the fine uneven pattern.
COPYRIGHT: (C)2005,JPO&NCIPI

4. 发明专利

JP2004285404A Anodically oxidized porous alumina and manufacturing method therefor 有权
标题翻译：阳极氧化多孔铝及其制造方法
公开(公告)号：JP2004285404A
公开(公告)日：2004-10-14
申请号：JP2003078671
申请日：2003-03-20
申请人： Kanagawa Acad Of Sci & Technol , Hideki Masuda , 秀樹益田 , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI
IPC分类号： C25D11/04 , C25D11/08 , C25D11/12 , C25D11/18
摘要： PROBLEM TO BE SOLVED: To provide anodically oxidized porous alumina having micropores minutely and highly regularly disposed, and to provide a manufacturing method therefor.
SOLUTION: 1. The porous alumina is prepared by anodically oxidizing an aluminum base metal in an electrolytic solution containing 7 M to 10 M sulfuric acid as a main component at a bath temperature of 30 to 65°C with a formation voltage of 12 V or lower; and has micropores which are disposed with periodic intervals of 30 nm or less, and into a shape of an ideal triangular lattice with no defect in the range of longitudinal 6 pieces by transverse 6 pieces. 2. The porous alumina is prepared by anodically oxidizing an aluminum base metal in an electrolytic solution containing 9 M to 10 M sulfuric acid as a main component at a bath temperature of 55 to 65°C with a formation voltage of 10 V or lower; and has pores which are disposed with periodic intervals of 25 nm or less, and into a shape of an ideal triangular lattice with no defect in the range of longitudinal 5 pieces by transverse 5 pieces.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供微孔和高度规则地设置的具有微孔的阳极氧化多孔氧化铝，并提供其制造方法。解决方案：1.多孔氧化铝通过在浴温为30〜65℃下以含有7M〜10M硫酸为主要成分的电解液中的铝基金属阳极氧化而制备，形成电压为 12 V以下; 并且具有以30nm以下的周期性间隔设置的微孔，并且通过横向6片成为纵向6片的范围内没有缺陷的理想三角形格子的形状。多孔氧化铝通过在浴温为55〜65℃，电压为10V以下的电解液中以9M〜10M硫酸为主要成分的电解液进行阳极氧化而制备。并且具有以25nm或更小的周期间隔设置的孔，并且在纵向5片的横向5片的范围内成为没有缺陷的理想三角形格子的形状。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2013057102A Method for forming fine structure and mold for nanoimprint having fine structure, and method of producing porus alumina composite 有权
标题翻译：用于形成具有微细结构的纳米结构的微细结构和模具的方法以及生产多孔铝复合材料的方法
公开(公告)号：JP2013057102A
公开(公告)日：2013-03-28
申请号：JP2011196169
申请日：2011-09-08
申请人： Kanagawa Acad Of Sci & Technol , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI
IPC分类号： C25D11/04 , C23F1/02 , C25D1/00 , C25D11/18 , C25D11/24
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a substrate having a fine structure in which the shape is controlled and which has a high aspect ratio in relation to depth.SOLUTION: A method for forming a fine structure is characterized by forming a fine structure having a cross-sectional shape corresponding to a resist pattern and an aspect ratio of 1 or more by forming a resist pattern on the surface of anodically oxidized porous alumina and then applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed. A mold for nanoimprint has a fine structure formed by the method. A method for producing a porous alumina composite is characterized by forming a resist pattern on the surface of anodically oxidized porous alumina, then forming through-holes having a cross-sectional shape corresponding to the resist pattern by applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed, and filling a substance different from alumina into the through-holes.
摘要翻译：解决的问题：提供一种具有精细结构的基板的制造方法，其中形状被控制并且相对于深度具有高纵横比。解决方案：用于形成精细结构的方法的特征在于通过在阳极氧化多孔的表面上形成抗蚀剂图案，形成具有与抗蚀剂图案对应的横截面形状和长宽比为1以上的微细结构氧化铝，然后对所得多孔氧化铝进行湿蚀刻处理，以选择性地求解并除去未形成抗蚀剂图案的部分。用于纳米压印的模具具有通过该方法形成的精细结构。多孔氧化铝复合体的制造方法的特征在于，在阳极氧化多孔质氧化铝的表面上形成抗蚀剂图案，然后通过对所得的多孔氧化铝进行湿式蚀刻处理，形成具有与抗蚀剂图案对应的截面形状的通孔氧化铝，以选择性地去除并除去未形成抗蚀剂图案的部分，并将不同于氧化铝的物质填充到通孔中。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2012195600A Roll-like mold for imprint and method of manufacturing the same 审中-公开
标题翻译：用于印刷的辊状模具及其制造方法
公开(公告)号：JP2012195600A
公开(公告)日：2012-10-11
申请号：JP2012110771
申请日：2012-05-14
申请人： Kanagawa Acad Of Sci & Technol , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , YAGISHITA TAKASHI , NISHIO KAZUYUKI , KUMAGAI NAOKO
IPC分类号： H01L21/027 , B29C33/42 , B29C59/04 , C25D11/14 , C25D11/24
摘要： PROBLEM TO BE SOLVED: To provide a roll-like mold, along with its manufacturing method, in which a fine rough is formed on the surface with no seam, with mechanical strength being excellent.SOLUTION: A roll-like mold for continuous imprinting has a rough that is formed by utilizing a regular fine hole array of anode oxidation porous alumina formed on the surface with no seam. In order to manufacture it, a roll-like mold that has a hole array structure or pillar array structure on the surface is used. In order to manufacture it, a pipe or round rod of aluminum material in which anode oxidation porous alumina layer is formed is used as a mold, to pack fine holes of the anode oxidation porous alumina layer with a material. By melting and removing the mold, a roll-like mold is manufactured in which a fine hole array is transferred. The resultant roll-like mold can be used as an imprint mold for continuously transferring a fine pattern on the surface of a substrate such as polymer with no seam.
摘要翻译：要解决的问题：为了提供一种辊状模具及其制造方法，其中在没有接缝的表面上形成细小的粗糙度，机械强度优异。解决方案：用于连续压印的辊状模具具有通过利用形成在表面上而没有接缝的阳极氧化多孔氧化铝的规则的细孔阵列形成的粗糙。为了制造它，使用在表面上具有孔阵列结构或柱阵列结构的辊状模具。为了制造它，使用其中形成有阳极氧化多孔氧化铝层的铝材料管或圆棒作为模具，用材料包装阳极氧化多孔氧化铝层的细孔。通过熔融和去除模具，制造其中转移微孔阵列的辊状模具。所得到的辊状模具可以用作压印模具，用于在没有接缝的情况下在诸如聚合物的基板的表面上连续转印精细图案。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2012162770A Porous microparticle and method for manufacturing the same 有权
标题翻译：多孔微球及其制造方法
公开(公告)号：JP2012162770A
公开(公告)日：2012-08-30
申请号：JP2011024012
申请日：2011-02-07
申请人： Kanagawa Acad Of Sci & Technol , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , YAGISHITA TAKASHI , IMAIZUMI MASAHIKO
IPC分类号： C25F3/14 , C25D11/00 , C25F3/02 , C25F3/04 , C25F3/08 , C25F3/12 , H01G9/052 , H01M4/38
CPC分类号： Y02E60/12
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a porous microparticle in which fine pores having a controlled size and a controlled depth or the like are formed on the entire surface without subjecting a troublesome step with a high throughput, and a porous microparticle manufactured by the method.SOLUTION: In the method for manufacturing the porous microparticle, the microparticles 9 containing at least any one of the metal or the semiconductor are dispersed in a barrel 4 provided in electrolytic solution 3. When the microparticles are contacted directly or indirectly through the other microparticles with an electrode 5 disposed in the barrel, a porous structure is formed on the surface of the microparticle by advancing the electrochemical reaction to form the fine pores on the surface of the microparticles. The porous microparticle manufactured by the method is provided.
摘要翻译：解决的问题：提供一种制造多孔微粒的方法，其中在整个表面上形成具有受控尺寸和受控深度等的细孔，而不会产生具有高生产量的麻烦的步骤，并且通过该方法制造的多孔微粒。解决方案：在多孔微粒的制造方法中，将包含金属或半导体中的至少任一种的微粒9分散在设置在电解液3中的筒体4中。当微粒直接或间接地通过其他具有设置在筒体中的电极5的微粒，通过推进电化学反应在微粒的表面上形成微孔，在微粒的表面上形成多孔结构。提供通过该方法制造的多孔微粒。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2012140001A Mold and method for manufacturing the same, and method for manufacturing article which has minute unevenness structure in surface 审中-公开
标题翻译：其制造的模具及其制造方法以及制造在表面上具有不可预知的结构的制品的方法
公开(公告)号：JP2012140001A
公开(公告)日：2012-07-26
申请号：JP2011273274
申请日：2011-12-14
申请人： Kanagawa Acad Of Sci & Technol , Mitsubishi Rayon Co Ltd , 三菱レイヨン株式会社 , 財団法人神奈川科学技術アカデミー
发明人： IGAWA MASASHI , OKAMOTO HIDEKO , MASUDA HIDEKI
IPC分类号： B29C33/38 , C25D11/04 , C25D11/16 , C25D11/18
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold which can form the oxidation films with few depth unevenness of a pore, even if the gap of the pore is ≥180 nm.SOLUTION: A method for manufacturing the mold 18 in which the oxidation film 14 having the pore 12 on the surface of the aluminum base material 10 includes: (a) a process to form an oxidation film 14 by anodizing a surface of the aluminum base material 10; (b) a process to remove the oxidation film 14 after the process (a); (c) a process to form the oxidation film 14 by anodizing the aluminum base material 10 by the voltage of less than 90% of the highest voltage applied in the process (a) after the process (b); (d) a process to expand a pore diameter of a pore 12 of the oxidation film 14 after the process (c); (e) a process to repeat the process (c) and the process (d)alternately.
摘要翻译：要解决的问题：即使孔的间隙≥180nm，提供一种能够形成孔深度不均匀的氧化膜的模具的制造方法。解决方案：一种制造模具18的方法，其中在铝基材10的表面上具有孔12的氧化膜14包括：（a）通过阳极氧化表面的方法形成氧化膜14的方法铝基材10; （b）处理（a）之后除去氧化膜14的工序; （c）通过在方法（b）之后通过在步骤（a）中施加的最高电压的90％以下的电压对铝基材10进行阳极氧化来形成氧化膜14的工艺; （d）在（c）工序之后，扩大氧化膜14的孔12的孔径的工序。（e）交替地重复过程（c）和过程（d）的过程。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2012046811A Porous fine particle and production method therefor 审中-公开
标题翻译：多孔微粒及其生产方法
公开(公告)号：JP2012046811A
公开(公告)日：2012-03-08
申请号：JP2010192559
申请日：2010-08-30
申请人： Kanagawa Acad Of Sci & Technol , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , YAGISHITA TAKASHI , IMAIZUMI MASAHIKO
IPC分类号： C25F7/00 , C25F3/02 , C25F3/04 , C25F3/12
摘要： PROBLEM TO BE SOLVED: To provide a method for producing fine particles having a porous layer, where micropores whose sizes, depths and pitches, etc., are controlled, are formed, which can be applied to a wide range of materials with high throughput without using a complicated process; and to provide porous fine particles produced by the method.SOLUTION: There is provided: the method for producing porous fine particles 3 in which aggregates 2 of fine particles 1 containing at least one of metal or a semiconductor are electrolytically etched in an electrolyte solution; and the porous fine particles produced by the method.

10. 发明专利

JP2012045841A Structure having fine uneven pattern on surface, and method for manufacturing the same 审中-公开
标题翻译：在表面上具有精细的图案的结构及其制造方法
公开(公告)号：JP2012045841A
公开(公告)日：2012-03-08
申请号：JP2010191001
申请日：2010-08-27
申请人： Kanagawa Acad Of Sci & Technol , 財団法人神奈川科学技術アカデミー
发明人： MASUDA HIDEKI , YAGISHITA TAKASHI
IPC分类号： B32B3/30 , B29C33/38
摘要： PROBLEM TO BE SOLVED: To provide a structure that has a reproducible fine uneven pattern surface, and to provide a method for manufacturing the same.SOLUTION: A laminated structure is provided by laminating two or more uneven pattern layers of which surfaces are formed with fine uneven patterns. There are provided the structure of which inside is composed so that the uneven pattern surface of uneven pattern layer of lower layer can be exposed by exfoliating the upper uneven pattern layer and which has fine uneven patterns on surface, and its manufacturing method is also provided.

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