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    • 4. 发明申请
    • POLE FOR MAGNETIC RECORDING
    • 磁记录
    • US20130010387A1
    • 2013-01-10
    • US13602915
    • 2012-09-04
    • XiaoMin YangShuaigang XiaoJie GongMichael Seigler
    • XiaoMin YangShuaigang XiaoJie GongMichael Seigler
    • G11B5/127
    • G11B5/3163C25D5/10C25D5/14G11B5/1278G11B5/3116Y10T29/49021
    • A method for forming a magnetic write pole with a trapezoidal cross-section is described. The method consists of first forming a magnetic seedlayer on a base followed by depositing a removable material layer on the seedlayer, and then a resist layer on the removable material layer. A trench is then formed in the resist, and the resist is heated to cause the cross-sectional profile of the trench to assume a trapezoidal shape. The resist is then capped with another resist layer and further heated to cause the width of the trapezoidal trench to become narrower. The cap layer and removable material layer at the bottom of the trench are then removed and the trench filled with magnetic material by electroplating. The resist and seedlayer external to the trench are finally removed to form a write pole with a trapezoidal cross-section.
    • 描述了形成具有梯形截面的磁性写入极的方法。 该方法包括首先在基底上形成磁性种子层,然后在种子层上沉积可去除的材料层,然后在可移除材料层上形成抗蚀剂层。 然后在抗蚀剂中形成沟槽,并且加热抗蚀剂以使沟槽的横截面轮廓呈现梯形。 然后将抗蚀剂用另一抗蚀剂层封盖,并进一步加热,使梯形沟槽的宽度变窄。 然后去除沟槽底部的覆盖层和可移除材料层,并通过电镀填充磁性材料的沟槽。 最后去除沟槽外部的抗蚀剂和籽晶层以形成具有梯形横截面的写入极。
    • 8. 发明授权
    • Fabrication of trapezoidal pole for magnetic recording
    • 用于磁记录的梯形极的制造
    • US08259411B2
    • 2012-09-04
    • US12116798
    • 2008-05-07
    • XiaoMin YangShuaigang XiaoJie GongMichael Seigler
    • XiaoMin YangShuaigang XiaoJie GongMichael Seigler
    • G11B5/127
    • G11B5/3163C25D5/10C25D5/14G11B5/1278G11B5/3116Y10T29/49021
    • A method for forming a magnetic write pole with a trapezoidal cross-section is described. The method consists of first forming a magnetic seedlayer on a base followed by depositing a removable material layer on the seedlayer, and then a resist layer on the removable material layer. A trench is then formed in the resist, and the resist is heated to cause the cross-sectional profile of the trench to assume a trapezoidal shape. The resist is then capped with another resist layer and further heated to cause the width of the trapezoidal trench to become narrower. The cap layer and removable material layer at the bottom of the trench are then removed and the trench filled with magnetic material by electroplating. The resist and seedlayer external to the trench are finally removed to form a write pole with a trapezoidal cross-section.
    • 描述了形成具有梯形截面的磁性写入极的方法。 该方法包括首先在基底上形成磁性种子层,然后在种子层上沉积可去除的材料层,然后在可移除材料层上形成抗蚀剂层。 然后在抗蚀剂中形成沟槽,并且加热抗蚀剂以使沟槽的横截面轮廓呈现梯形。 然后将抗蚀剂用另一抗蚀剂层封盖,并进一步加热,使梯形沟槽的宽度变窄。 然后去除沟槽底部的覆盖层和可移除材料层,并通过电镀填充磁性材料的沟槽。 最后去除沟槽外部的抗蚀剂和籽晶层以形成具有梯形横截面的写入极。