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    • 6. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20160071939A1
    • 2016-03-10
    • US14792107
    • 2015-07-06
    • Kabushiki Kaisha Toshiba
    • Keiichi MATSUSHITA
    • H01L29/417H01L29/06H01L29/778
    • H01L29/41766H01L29/2003H01L29/66462H01L29/7786
    • A semiconductor device includes a substrate, a semiconductor layer having a buffer layer, a spacer layer, and barrier layer sequentially stacked on the substrate, and first and second ohmic electrodes installed on an upper surface of the barrier layer in the substrate to be separated from each other. Each of the first and second ohmic electrodes includes a portion formed on the upper surface of the barrier layer and electrode portions filling a plurality of grooves penetrating from the upper surface of the barrier layer through the barrier layer and the spacer layer and reaching a region of a two-dimensional electron gas layer formed in a spacer-layer side of the buffer layer, the electrode portions being in contact with side walls of each of the plurality of the grooves, and the portion formed on the upper surface of the barrier layer and the electrode portions are integrally formed.
    • 半导体器件包括基板,具有缓冲层的半导体层,顺序地层叠在基板上的隔离层和阻挡层,以及安装在基板中的阻挡层的上表面上以分离的第一和第二欧姆电极 彼此。 第一和第二欧姆电极中的每一个包括形成在阻挡层的上表面上的部分,以及电极部分,其填充通过阻挡层和间隔层从阻挡层的上表面穿透的多个槽,并且到达 形成在缓冲层的间隔层侧的二维电子气层,电极部分与多个沟槽中的每一个的侧壁接触,形成在阻挡层的上表面上的部分和 电极部一体形成。