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1. 发明专利

CA1108093A APPARATUS FOR ION PLASMA COATING OF ARTICLES 未知
公开(公告)号：CA1108093A
公开(公告)日：1981-09-01
申请号：CA294654
申请日：1978-01-10
申请人： KOVALSKY GEORGY A , MAISHEV JURY P , EGOROV BORIS A , DMITRIEV JURY A
发明人： KOVALSKY GEORGY A , MAISHEV JURY P , EGOROV BORIS A , DMITRIEV JURY A
IPC分类号： C23C15/00
摘要： APPARATUS FOR ION PLASMA COATING OF ARTICLES The proposed apparatus is used to apply thin films of metals, semiconductors and dielectric materials onto the surface of different articles. The apparatus comprises a vacuum chamber accommodating a discharge chamber with at least a single slit in one of its walls. An electric field produces a plasma flow between an anode and a hot cathode arranged in the discharge chamber so that the hot cathode is located opposite the slit of the discharge chamber. A magnetic system produces a magnetic field extending through the hot cathode and slit perpendicular to the electric field between the anode and hot cathode. A target and an article holder are arranged on opposite sides of the plasma flow leaving the slit. As a negative potential is applied to the target, plasma ions sputter the material of the target, which is deposited on the article, producing a thin film on its surface.

2. 发明专利

CA1079418A ION SOURCE 未知
公开(公告)号：CA1079418A
公开(公告)日：1980-06-10
申请号：CA274195
申请日：1977-03-17
申请人： KOVALSKY GEORGY A , MAISHEV JURY P , DMITRIEV JURY A
发明人： KOVALSKY GEORGY A , MAISHEV JURY P , DMITRIEV JURY A
IPC分类号： H05H7/04
摘要： A source of a tubular beam of ions comprising a cylindrical shell with one butt end having an axial hole in it and the other butt end solid. It is provided with a rod having one end fixed to the solid butt end of the cylindrical shell and arranged coaxially to the latter. The free end of the rod carries a disc placed in the axial hole of the butt end of the cylindrical shell so as to obtain a circular gap confined by the side wall of the hole. A hollow annular shell is arranged coaxially within the cylindrical shell so that a circular gap made in the butt end of the annular shell faces the circular gap in the butt end of the cylindrical shell. An annular cathode and an anode are arranged coaxially inside the annular shell. A thermoelectronic cathode is placed outside the cylindrical shell near to its butt end with the circular gap. An electromagnet coil is arranged coaxially inside the said cylindrical shell. A device for ion acceleration is placed on the path of emission of the ions. The cylindrical shell and its butt ends, and the rod are made of magnetically soft material, whereas the annular shell is made of non-magnetic material.

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