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    • 1. 发明申请
    • MICROELECTRONIC SENSOR DEVICE
    • 微电子传感器装置
    • WO2009060350A1
    • 2009-05-14
    • PCT/IB2008/054493
    • 2008-10-29
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VAN HERPEN, Maarten, M.J.W.VOSSEN, Dirk, L.JGILLIES, Murray, F.KLUNDER, Derk, J.W.JOHNSON, Mark, T.PONJEE, Marc, W.G.
    • VAN HERPEN, Maarten, M.J.W.VOSSEN, Dirk, L.JGILLIES, Murray, F.KLUNDER, Derk, J.W.JOHNSON, Mark, T.PONJEE, Marc, W.G.
    • G01N21/55G01N21/64G01N33/551
    • G01N21/7743G01N21/13G01N21/554G01N21/6452G01N21/648G01N33/5438
    • The invention concerns a microelectronic sensor device (100) for the detection of target components (19) near a binding surface (12). The sensor (100) comprises an aperture defining structure (20), at least one aperture (4) having a smallest in plane aperture dimension (W1) smaller than a diffraction limit defined by the radiation wavelength and a medium for containing the target components (10). A source (21) is provided for emitting a beam of radiation (101) having a wavelength incident at the aperture defining structure (20), for providing evanescent radiation, in response to the radiation (101) incident at the structure (20), in a detection volume (13) formed in the aperture (14). In addition a detector (31) is provided for determining radiation (102) from the target component (10) present in the detection volume (13), in response to the emitted incident radiation (101) from the source (21). An electrode (112) is provided near the aperture defining structure (20), so as to transport the target components (10) in between the apertures (4) by applying an electric field; and a charging circuit (113) for charging the electrode (112).
    • 本发明涉及用于检测接合表面(12)附近的目标部件(19)的微电子传感器装置(100)。 传感器(100)包括孔限定结构(20),具有小于由辐射波长限定的衍射极限的平面孔尺寸(W1)最小的至少一个孔(4)和用于容纳目标成分的介质 10)。 源(21)被提供用于发射具有入射在孔限定结构(20)处的波长的辐射束(101),用于响应于在结构(20)处入射的辐射(101)来提供渐逝辐射, 在形成在孔(14)中的检测体积(13)中。 此外,响应于来自源(21)的发射入射辐射(101),提供检测器(31),用于根据存在于检测体积(13)中的目标成分(10)来确定辐射(102)。 在孔限定结构(20)附近设置电极(112),以便通过施加电场将目标部件(10)传送到孔(4)之间; 以及用于对电极(112)充电的充电电路(113)。