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1. 发明申请

WO2010026523A3 ROTATING RING APPARATUS WITH A DYNAMO-ELECTRIC DRIVEN RING SUPPORTED BY A RADIAL MAGNETIC BEARING 审中-公开
标题翻译：旋转环形装置与径向磁力轴承支撑的动力驱动环
公开(公告)号：WO2010026523A3
公开(公告)日：2010-09-16
申请号：PCT/IB2009053788
申请日：2009-08-31
申请人： KONINKL PHILIPS ELECTRONICS NV , SAHIN NOMALER FUNDA , COMPTER JOHAN C , BAKKER ARJAN F , VERDEL ANTHONIUS J D
发明人： SAHIN NOMALER FUNDA , COMPTER JOHAN C , BAKKER ARJAN F , VERDEL ANTHONIUS J D
IPC分类号： F16C32/04 , A61B6/03 , H02K7/09 , H02K41/02
CPC分类号： F16C32/0493 , A61B6/035 , A61B6/4435 , F16C32/0461 , F16C2300/14 , F16C2316/10 , F16C2380/26 , G01N2223/3303 , H02K7/09 , H02K41/03
摘要： The present invention relates to a rotating ring apparatus comprising: -a stationary ring (1), -a rotating ring (2) for rotation around a central region (3), -a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and -a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).
摘要翻译：旋转环设备技术领域本发明涉及一种旋转环设备，包括：固定环（1），围绕中心区域旋转的旋转环（2）， - 用于径向轴向旋转的旋转单元（4,5）所述旋转环（2）相对于所述文具环（1），所述旋转单元包括安装在所述文具环（1）上的固定感应元件（4）和安装在所述旋转环（2）上的旋转感应元件（5））和 - 用于控制所述旋转单元（4,5）旋转并悬浮所述旋转感应元件（5）的控制器（8）。

2. 发明申请

WO2004055607A3 APPARATUS FOR PROCESSING AN OBJECT WITH HIGH POSITION ACCURANCY 审中-公开
标题翻译：用于以高位准确度处理对象的装置
公开(公告)号：WO2004055607A3
公开(公告)日：2004-12-16
申请号：PCT/IB0305935
申请日：2003-12-15
申请人： KONINKL PHILIPS ELECTRONICS NV , VAN EIJK JAN , BAKKER ARJAN F , BOS DENNIS E , COMPTER JOHAN C , DE KLERK ANGELO C P , ROES FRANCISCUS M , VROOMEN HUBERT G J J A , WARMERDAM THOMAS P H
发明人： VAN EIJK JAN , BAKKER ARJAN F , BOS DENNIS E , COMPTER JOHAN C , DE KLERK ANGELO C P , ROES FRANCISCUS M , VROOMEN HUBERT G J J A , WARMERDAM THOMAS P H
IPC分类号： F16C39/06 , G03F7/20 , G03F9/00 , H01J37/20 , H01J37/317 , H01L21/68 , H02K11/00 , H02K41/03
CPC分类号： F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要： A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) via the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译：装置在准确控制的位置处处理诸如半导体晶片的物体（19）。物体（19）由可沿着路径移动的工作平台（12）支撑。附接到工作平台（12）的悬架致动器部件（14）包含软磁芯（24），其具有面向支撑结构上沿着该路径的软磁元件（34）的表面的极和绕组（20）用于施加电流以产生磁场，该磁场经由磁极穿过磁芯（24）并经由软磁元件（34）返回。传感器（17）感测悬架致动器部件（14）相对于位置参考元件（16）的测量位置。控制电路包括外部控制电路（40）和内部控制电路（42）。外部控制电路（40）接收感测结果并确定力设定点信息以将致动器部分（14）的测量位置调节到所需值。内部控制电路（42）接收力设定点信息并根据力设定点信息控制电流以实现致动器部分（14）与支撑结构（10）之间的力。

3. 发明申请

WO2009083889A1 CONTACTLESS LIFTING OF AN OBJECT BY AN INVERTED PLANAR MOTOR 审中-公开
标题翻译：反向平面电机对象的无缝提升
公开(公告)号：WO2009083889A1
公开(公告)日：2009-07-09
申请号：PCT/IB2008055484
申请日：2008-12-22
申请人： KONINKL PHILIPS ELECTRONICS NV , FRISSEN PETRUS C M , COMPTER JOHAN C
发明人： FRISSEN PETRUS C M , COMPTER JOHAN C
IPC分类号： H04L12/24 , H04L12/46 , H04L12/56
CPC分类号： G03F7/70758 , G03F7/70816 , H02K1/278 , H02K7/09 , H02K41/031 , H02K2201/18
摘要： An inverted planar motor employs an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30). In operation, coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).
摘要翻译：倒置的平面电动机采用磁性平面支撑件（20）和磁性提升支架（30）的集成，以及与磁性平面支撑件（20）和磁性升降支架（30）磁性交互的线圈致动器（10）。在操作中，线圈致动器（10）同时基于磁性相互作用将磁性平面支撑件（20）和磁性提升支撑件（30）平行于与线圈致动器（10）相关联的XYZ参考框架的XY平面移动线圈致动器（10）和磁性平面支撑件（20），并且基于线圈（10）和磁性平面支撑件（20）之间的磁性相互作用专门地移动与线圈致动器（10）相关联的XYZ参考框架的XY平面正交的磁升降支撑件致动器（10）和磁升降支架（30）。

4. 发明申请

WO2006075291A3 DISPLACEMENT DEVICE 审中-公开
标题翻译：位移装置
公开(公告)号：WO2006075291A3
公开(公告)日：2007-04-12
申请号：PCT/IB2006050088
申请日：2006-01-10
申请人： KONINKL PHILIPS ELECTRONICS NV , COMPTER JOHAN C , FRISSEN PETRUS C M , VAN EIJK JAN
发明人： COMPTER JOHAN C , FRISSEN PETRUS C M , VAN EIJK JAN
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , Y10S414/135
摘要： Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X- direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
摘要翻译：特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 - 方向和Y方向。每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每一列逆时针旋转90°。第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。对于第一部分的高精度定位，提供了干涉仪系统（731,730）。

5. 发明申请

WO2006054258A3 DETECTION SYSTEM FOR DETECTING TRANSLATIONS OF A BODY 审中-公开
标题翻译：用于检测身体翻译的检测系统
公开(公告)号：WO2006054258A3
公开(公告)日：2006-09-14
申请号：PCT/IB2005053800
申请日：2005-11-17
申请人： KONINKL PHILIPS ELECTRONICS NV , KLAVER RENATUS G , COMPTER JOHAN C , VAN DER MEER PIET
发明人： KLAVER RENATUS G , COMPTER JOHAN C , VAN DER MEER PIET
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： The invention relates to a system (1) for detecting a translation (T) of a body (2) with, a diffraction pattern (3) applied to said body. The system comprises means (4) for providing an incident light beam (I) to said diffraction pattern and to obtain a diffracted light beam (D) from said diffraction pattern; means (4) for measuring a phase difference by interference between said incident light beam and said diffracted beam and means (4) for detecting said translation on the basis of said measured phase difference. The invention further relates to a method for detecting a translation of a body (2) ; a redirection arrangement 6 and a frequency multiplexing system.
摘要翻译：本发明涉及一种用于通过施加到所述身体的衍射图案（3）来检测身体（2）的平移（T）的系统（1）。该系统包括用于向所述衍射图案提供入射光束（I）并从所述衍射图案获得衍射光束（D）的装置（4）用于通过所述入射光束和所述衍射光束之间的干涉来测量相位差的装置（4）和用于基于所述测量的相位差检测所述平移的装置（4）。本发明还涉及一种用于检测身体（2）的平移的方法。重定向装置6和频率复用系统。

6. 发明申请

WO2007013016A3 HYBRID COILS HAVING AN IMPROVED HEAT TRANSFER CAPABILITY 审中-公开
标题翻译：具有改进的热传递能力的混合线圈
公开(公告)号：WO2007013016A3
公开(公告)日：2007-05-31
申请号：PCT/IB2006052511
申请日：2006-07-21
申请人： KONINKL PHILIPS ELECTRONICS NV , PHILIPS CORP , COMPTER JOHAN C
发明人： COMPTER JOHAN C
IPC分类号： H01F27/22 , H01F27/32
CPC分类号： H01F27/22 , H01F27/323
摘要： A hybrid coil (11) employs a wire layer (22), a wire layer (23) adjacent the wire layer (22), and a wire layer (24) adjacent the wire layer (23). The hybrid coil (11) further employs a thermal conductive insulator (42) physically disposed within a space between the wire layer (22) and the wire layer (23), and a thermal conductive insulator (43) physically disposed within a space between the wire layer (23) and the wire layer (24). The thermal conductive insulators (42, 43) can be electrically disconnected, and each thermal conductive insulator (42, 43) can consists of an aluminum foil (42a, 43a) having oxide layers (42b, 43b, 42c, 43c) on each side thereof.
摘要翻译：混合线圈（11）采用导线层（22），邻近导线层（22）的导线层（23）和邻近导线层（23）的导线层（24）。混合线圈（11）还采用物理地设置在导线层（22）和导线层（23）之间的空间内的导热绝缘体（42），以及物理地设置在导线绝缘体线层（23）和线层（24）。导电绝缘体（42,43）可以电断开，并且每个导热绝缘体（42,43）可以由在每一侧上具有氧化物层（42b，43b，42c，43c）的铝箔（42a，43a）它们。

7. 发明申请

WO0191204A2 DISPLACEMENT DEVICE 审中-公开
标题翻译：位移装置
公开(公告)号：WO0191204A2
公开(公告)日：2001-11-29
申请号：PCT/EP0104933
申请日：2001-05-01
申请人： KONINKL PHILIPS ELECTRONICS NV
发明人： COMPTER JOHAN C , FRISSEN PETRUS C M
IPC分类号： H01L21/027 , G03F7/20 , H01L21/00 , H02K41/03 , H01L100
CPC分类号： G03F7/70758 , H02K41/031 , H02K2201/18
摘要： Positioning device with a first part and a second part which are movable relative to each other in at least one direction. Said first part comprises a carrier on which a system of magnets with N and Z magnets are arranged in an alternating manner and having a flux density B(x) = B(x + 2 tau ), tau being the magnetic pole pitch. Said second part comprises an electric coil system with at least one coil block unit, each unit having k coil blocks with k]2, said coil blocks having conductors, all conductors belonging to the same coil block being oriented in the same direction and fed by a n-phase system with n]2. Seen in a direction perpendicular to the conductors, the flux varies according to PHI = sin pi (x + xo)/2 tau . During the desired movement of the parts relative to each other, there is a small undesired up and down movement perpendicular to the desired movement. To avoid this undesired movement, the distance between the mass centers of the coil blocks belonging to a coil block unit, seen in a direction perpendicular to the conductors, is equal to tau /k +px tau , with p=2,3, .
摘要翻译：具有第一部分和第二部分的定位装置可以在至少一个方向上相对于彼此移动。所述第一部分包括载体，具有N和Z磁体的磁体系统以交替的方式布置并且具有磁通密度B（x）= B（x +2τ），τ是磁极间距。所述第二部分包括具有至少一个线圈块单元的电线圈系统，每个单元具有k个具有k] 2的k个线圈块，所述线圈块具有导体，属于相同线圈块的所有导体沿相同方向定向并被馈送具有n] 2的n相系统。从与导体垂直的方向看，磁通量根据PHI = sin（x + xo）/ 2 tau而变化。在部件相对于彼此的期望运动期间，垂直于期望的运动存在小的不希望的上下运动。为了避免这种不期望的移动，属于线圈块单元的线圈块的质量中心之间的距离在与导体垂直的方向上看到的等于τ/ k + px tau，p = 2,3。

8. 发明专利

AU2003288583A8 Apparatus for processing an object with high position accurancy 未知
公开(公告)号：AU2003288583A8
公开(公告)日：2004-07-09
申请号：AU2003288583
申请日：2003-12-15
申请人： KONINKL PHILIPS ELECTRONICS NV
发明人： EIJK JAN VAN , BOS DENNIS E , COMPTER JOHAN C , VROOMEN HUBERT G J J A , KLERK ANGELO C P DE , BAKKER ARJAN F , WARMERDAM THOMAS P H , ROES FRANCISCUS M
IPC分类号： F16C39/06 , G03F7/20 , G03F9/00 , H01J37/20 , H01J37/317 , H01L21/68 , H02K11/00 , H02K41/03
摘要： A apparatus processes an object ( 19 ), such as a semi-conductor wafer at accurately controlled positions. The object ( 19 ) is supported by a working platform ( 12 ) that is moveable along a path. A suspension actuator part ( 14 ) attached to the working platform ( 12 ), contains a soft magnetic core ( 24 ) with poles facing the surface of a soft magnetic element ( 34 ) on the support structure along the path and a winding ( 20 ) for application of a current to generate a magnetic field that runs through the core ( 24 ) v the poles and returns via the soft magnetic element ( 34 ). A sensor ( 17 ) senses a measured position of the suspension actuator part ( 14 ) relative to the position reference element ( 16 ). A control circuit comprises an outer control circuit ( 40 ) and an inner control circuit ( 42 ). The outer control circuit ( 40 ) receives a sensing result and determines force set point information to regulate the measured position of the actuator part ( 14 ) to a required value. The inner control circuit ( 42 ) receives the force set point information and controls the current to realize a force between the actuator part ( 14 ) and the support structure ( 10 ) according to the force set point information.

9. 发明专利

AU2003303413A1 METHOD FOR DRIVING AN ACTUATOR, ACTUATOR DRIVE, AND APPARATUS COMPRISING AN ACTUATOR 未知
公开(公告)号：AU2003303413A1
公开(公告)日：2004-07-22
申请号：AU2003303413
申请日：2003-12-04
申请人： KONINKL PHILIPS ELECTRONICS NV
发明人： OTTE ROB , COMPTER JOHAN C , CREMERS FRANCISCUS L M
IPC分类号： G11B7/085 , G11B7/09 , G11B21/02 , G11B21/08
摘要： An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a drive signal source output to a driver circuit output, in order to selectively change the electrical damping of an actuator. For example, the electrical damping of a radial actuator or a focus actuator of an optical disc drive is increased in case of loss of track or loss of focus.

10. 发明专利

AU2003288583A1 APPARATUS FOR PROCESSING AN OBJECT WITH HIGH POSITION ACCURANCY 未知
公开(公告)号：AU2003288583A1
公开(公告)日：2004-07-09
申请号：AU2003288583
申请日：2003-12-15
申请人： KONINKL PHILIPS ELECTRONICS NV
发明人： EIJK JAN VAN , BAKKER ARJAN F , BOS DENNIS E , COMPTER JOHAN C , KLERK ANGELO C P DE , ROES FRANCISCUS M , VROOMEN HUBERT G J J A , WARMERDAM THOMAS P H
IPC分类号： F16C39/06 , G03F7/20 , G03F9/00 , H01J37/20 , H01J37/317 , H01L21/68 , H02K11/00 , H02K41/03 , G05B19/00
摘要： A apparatus processes an object ( 19 ), such as a semi-conductor wafer at accurately controlled positions. The object ( 19 ) is supported by a working platform ( 12 ) that is moveable along a path. A suspension actuator part ( 14 ) attached to the working platform ( 12 ), contains a soft magnetic core ( 24 ) with poles facing the surface of a soft magnetic element ( 34 ) on the support structure along the path and a winding ( 20 ) for application of a current to generate a magnetic field that runs through the core ( 24 ) v the poles and returns via the soft magnetic element ( 34 ). A sensor ( 17 ) senses a measured position of the suspension actuator part ( 14 ) relative to the position reference element ( 16 ). A control circuit comprises an outer control circuit ( 40 ) and an inner control circuit ( 42 ). The outer control circuit ( 40 ) receives a sensing result and determines force set point information to regulate the measured position of the actuator part ( 14 ) to a required value. The inner control circuit ( 42 ) receives the force set point information and controls the current to realize a force between the actuator part ( 14 ) and the support structure ( 10 ) according to the force set point information.

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