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    • 4. 发明申请
    • METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE OBTAINED IN THIS WAY AND SUITABLE SUPPORT PLATE FOR THIS SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法,以这种方式获得的半导体器件和适用于该半导体器件的支持板
    • WO02089184A2
    • 2002-11-07
    • PCT/IB0201446
    • 2002-04-22
    • KONINKL PHILIPS ELECTRONICS NVDE SAMBER MARC AVAN VEEN NICOLAAS J AWEEKAMP JOHANNUS WVAN GRUNSVEN ERIK C E
    • DE SAMBER MARC AVAN VEEN NICOLAAS J AWEEKAMP JOHANNUS WVAN GRUNSVEN ERIK C E
    • H01L23/12H01L21/00H01L21/56H01L21/673H01L21/68H01L21/683
    • H01L21/6835H01L24/33
    • The invention relates to a method of manufacturing a semiconductor device (10) comprising a semiconductor element (1), with two or more elements (1) being attached to a support plate (2). It is often desired in such a case that the elements(1) are positioned on the support plate (2) or on a further support plate (22) at a larger mutual distance than in the semiconductor body (100) in which the elements (1) are formed. According to the invention, the support plate (2) is formed as an array of rigid subplates (2A) to which the elements (1) are attached, and the rigid subplates (2A) are interconnected within the plate (2) by means of one or more flexible elements (3). In this way the elements (1) - after they have been attached to the support plate (2) and after they have been separated from each other within the semiconductor body (100) and after stretching of the flexible elements (3) - can be positioned in an accurate manner at a larger mutual distance. Subsequently - or after having been transferred to a further plate (22) - the elements (1) may be provided with an encapsulation (20) and can be mounted on to individual semiconductor devices (10).
    • 本发明涉及一种制造包括半导体元件(1)的半导体器件(10)的方法,其中两个或多个元件(1)附接到支撑板(2)。 通常希望在这样的情况下,元件(1)以比半导体本体(100)中的相互距离更大的相互距离定位在支撑板(2)上或另一个支撑板(22)上,其中元件 1)。 根据本发明,支撑板(2)形成为刚性基板(2A)的阵列,元件(1)附接到其上,并且刚性基板(2A)通过以下方式互连在板(2)内:借助于 一个或多个柔性元件(3)。 以这种方式,元件(1)在它们已经被附接到支撑板(2)之后并且在半导体本体(100)中彼此分离之后并且在柔性元件(3)的拉伸之后可以是 以更大的相互距离以准确的方式定位。 随后 - 或者在已经转移到另一个板(22)之后 - 元件(1)可以设置有封装(20),并且可以安装到单个半导体器件(10)上。