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1. 发明申请

WO1997043784A1 WAFER CASSETTE MOUNTING DEVICE AND WAFER INSPECTION DEVICE EQUIPPED WITH THE SAME 审中-公开
标题翻译： WAFER CASSETTE安装设备和与此相同的WAFER检查设备
公开(公告)号：WO1997043784A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001518
申请日：1997-05-02
申请人： KOMATSU LTD. , NARA, Hisashi , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： H01L21/68
CPC分类号： H01L21/67766 , H01L21/67772
摘要： In a wafer cassette mounting device composed of a base on which a wafer cassette is mounted and a cover which covers the cassette, has a wafer cassette port for taking the wafer cassette in and out of the cover on one side and an opening through which the arm of a center robot can access inside the cover on the other side, a door is provided to the cover so that the wafer cassette port and opening on the other side can be opened and closed alternately.
摘要翻译：在由安装有晶片盒的基座和覆盖盒的盖构成的晶片盒安装装置中，具有用于将晶片盒在盖的一侧和外部带入的晶片盒端口，通过该开口，中心机器人的臂可以进入另一侧的盖内，门被提供到盖，使得另一侧的晶片盒端口和开口可以交替地打开和关闭。

2. 发明申请

WO1997043597A1 OPTICAL THREE-DIMENSIONAL MEASURING INSTRUMENT, AND HOLOGRAM EXPOSURE METHOD AND OPTICAL AXIS ADJUSTMENT METHOD IN THE MEASURING INSTRUMENT 审中-公开
标题翻译：光学三维测量仪器和测量仪器中的霍尔姆森曝光方法和光轴调整方法
公开(公告)号：WO1997043597A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001644
申请日：1997-05-15
申请人： KOMATSU LTD. , WAKAI, Hideyuki , NARA, Hisashi , ANDO, Manabu , NAKAIKE, Takanori , ABE, Shinichi , SEKI, Masanobu , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： An optical three-dimensional measuring instrument in which confocal optical system comprising a hologram (3), a pinhole array (4) and a photodetector array (8) is provided two dimensionally and a light source (1) having coherence, comprising an inspection stage for supporting an object to be measured, a projection unit (22) for supporting an objective lens (5a) and the hologram to an optical axis portion and having a reference light incidence optical system (A) for causing reference light to be incident on the hologram, a pinhole array unit (22) for supporting the objective lens and the pinhole array to the optical axis portion, a measuring unit (24) for supporting relay lenses (7a, 7b) and the photodetector array to the optical axis portion, an object light incidence optical system (B) for causing object light to be incident on the hologram, and an exposure unit (34) having a reference light incidence optical system at the time of exposure, for causing reference light at the time of exposure, which branches from the object light incidence optical system, to be incident on the hologram. The projection unit, the pinhole array unit and the measuring unit are stacked from below in this order named on the inspection stage. The measuring unit and the exposure unit are exchangeable.
摘要翻译：一种光学三维测量仪器，其中包括全息图（3），针孔阵列（4）和光电检测器阵列（8）的共焦光学系统二维地提供并具有相干性的光源（1），包括检查台用于支撑待测物体的投影单元（22），用于将物镜（5a）和所述全息图支撑到光轴部分，并具有参考光入射光学系统（A），用于使参考光入射到所述光轴上全息图，用于将物镜支撑并将针孔阵列支撑到光轴部分的针孔阵列单元（22），用于将中继透镜（7a，7b）和光电检测器阵列支撑到光轴部分的测量单元（24），对象光入射光学系统（B），用于使物体光入射到全息图上;以及曝光单元，其在曝光时具有参考光入射光学系统，用于在e时引起参考光从物体光入射光学系统分支的曝光将入射到全息图上。投影单元，针孔阵列单元和测量单元从下方按照在检查台上命名的顺序堆叠。测量单元和曝光单元是可更换的。

3. 发明申请

WO1997042537A1 PEAK PROCESSING METHOD FOR CONFOCAL OPTICAL APPARATUSES 审中-公开
标题翻译：共焦光学装置的峰值处理方法
公开(公告)号：WO1997042537A1
公开(公告)日：1997-11-13
申请号：PCT/JP1997001517
申请日：1997-05-02
申请人： KOMATSU LTD. , OKAMOTO, Takeshi , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G02B21/36
CPC分类号： G02B21/008 , G02B21/0056
摘要： A peak processing method for a confocal optical apparatus which has a plurality of confocal optical systems arranged two-dimensionally, and a light source of a high coherence, comprising the step of determining the height of a peak by sampling in the direction of the height thereof an actual output waveform Vs of Z-V profile, in which a periodic vibration waveform Vc of the above-mentioned light source is superposed on a theorical confocal output waveform Vt, characterized in that the sampling period is an integral multiple of the height Zt of the actual output waveform Vs of the Z-V profile, and the value of the height of the peak of this intermittently outputted Z-V output is found.
摘要翻译：一种共焦光学装置的峰值处理方法，其具有二维布置的多个共焦光学系统和高相干度的光源，包括以下步骤：通过在其高度方向上的取样来确定峰的高度 ZV曲线的实际输出波形Vs，其中上述光源的周期性振动波形Vc叠加在理论共聚焦输出波形Vt上，其特征在于，采样周期是实际的高度Zt的整数倍找到ZV曲线的输出波形Vs，并且发现该间歇输出的ZV输出的峰值的高度值。

4. 发明申请

WO1997037378A1 VISUAL INSPECTION DEVICE FOR WAFER BUMP AND HEIGHT MEASURING DEVICE 审中-公开
标题翻译：用于防水和高度测量装置的视觉检测装置
公开(公告)号：WO1997037378A1
公开(公告)日：1997-10-09
申请号：PCT/JP1997001078
申请日：1997-03-28
申请人： KOMATSU LTD. , TERADA, Keiji , TADA, Shigeyuki , MORIYA, Masato , TANAKA, Hiroshi , WAKAI, Hideyuki , OKAMOTO, Takeshi
发明人： KOMATSU LTD.
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , H01L22/12
摘要： A device corrects a positioning error of a wafer with accuracy in a short period of time and performs visual inspection of bumps with accuracy at high speed. In the device, a wafer is positioned in coordinate axes of a predetermined coordinate system. A coordinate position on the coordinate system, to which a measuring visual field should move, is set so that all the bumps on the wafer is imaged by visual means. When the wafer is positioned, a rotating dislocation of the wafer with an origin of coordinates of the coordinate system as the center of rotation is detected. Respective set coordinate positions of the measuring visual field are subjected to rotating conversion as much as the detected rotating dislocation in the coordinate system and are corrected. Further, relative positions and attitudes of the wafer and the visual means are changed so that the measuring visual field is successively moved to the respective corrected coordinate positions.
摘要翻译：设备在短时间内精确地校正晶片的定位误差，并以高速精确地进行凸块的目视检查。在该装置中，晶片位于预定坐标系的坐标轴上。设置测量视野应该移动的坐标系上的坐标位置，使得通过视觉方式对晶片上的所有凸块进行成像。当晶片定位时，检测到具有作为旋转中心的坐标系的坐标原点的晶片的旋转位错。对测量视野的各设定坐标位置进行与坐标系中所检测的旋转位错一样多的旋转变换并进行校正。此外，改变晶片和视觉装置的相对位置和态度，使得测量视野被连续地移动到相应的校正坐标位置。

5. 发明申请

WO1996010728A1 CONFOCUS OPTICAL APPARATUS 审中-公开
标题翻译：配镜光学装置
公开(公告)号：WO1996010728A1
公开(公告)日：1996-04-11
申请号：PCT/JP1995002006
申请日：1995-10-02
申请人： KOMATSU LTD. , WAKAI, Hideyuki , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： A confocus optical apparatus includes an aperture array having a plurality of apertures disposed two-dimensionally, an object of measurement disposed on a predetermined inspection surface, optical means for guiding light so that the aperture array position can b a first condensing position and the inspection surface position can be a second focusing position, a light source for reference light of a hologram, the hologram disposed at a predetermined position between the aperture array and the inspection surface, for reproducing light equivalent to light emitted from each spot light source through each aperture of the aperture array to this predetermined position, by using light from the light source as reference light, and an optical detector array having a plurality of optical detectors for detecting light passing through each aperture of the aperture array, disposed on the opposite side to the optical means while interposing the aperture array between them, wherein reproducing light of the hologram scattered by the measured article is allowed to be incident into each optical detector of the optical detector array through the hologram, the optical means and the aperture array. In this way, the size and weight of the apparatus can be reduced, three-dimensional shape measurement can be made highly accurately and at a high speed, positioning of each portion can be made easily, and utilization efficiency of light source light can be improved.
摘要翻译：焦点光学装置包括孔径阵列，其具有二维布置的多个孔，设置在预定检查表面上的测量对象，用于引导光的光学装置，使得孔径阵列位置可以第一聚光位置和检查表面位置可以是第二聚焦位置，用于全息图的参考光的光源，设置在孔径阵列和检查表面之间的预定位置处的全息图，用于再现与每个点光源发射的光通过孔径阵列通过使用来自光源的光作为参考光;以及光学检测器阵列，具有多个光学检测器，用于检测通过孔径阵列的每个孔的光，该光检测器阵列设置在与光学装置相反的一侧同时在它们之间插入孔径阵列，其中再现光o f所测量的物品散射的全息图被允许通过全息图，光学装置和孔径阵列入射到光学检测器阵列的每个光学检测器中。以这种方式，可以减小装置的尺寸和重量，可以高精度地，高速地进行三维形状的测量，能够容易地进行各部位的定位，能够提高光源光的利用效率。

6. 发明申请

WO1997043678A1 TELECENTRIC OPTICAL DEVICE 审中-公开
标题翻译：电光设备
公开(公告)号：WO1997043678A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001560
申请日：1997-05-09
申请人： KOMATSU LTD. , WAKAI, Hideyuki , TERADA, Keiji , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G02B21/00
CPC分类号： G01B11/2441 , G02B13/22
摘要： A telecentric optical device comprising an object provided on a predetermined test face, a telecentric optical means in which a first lens and a second lens are spaced from each other at a distance equal to the sum of the focal lengths of the first and second lenses and the focal point of the second lens is on the test face, a hologram reference light source, a hologram which is placed in a predetermined position between the first and second lenses and apart from the first lens by the focal length of the first lens and which is exposed so as to diffract the light from the reference light source and reproduce light equivalent to the light which is produced by one or a plurality of point source, emitted from the focal point of the first lens and passes through the predetermined position, a photodetector which is placed near the focal point of the first lens and detects the hologram reproducing light which is reflected by the object and made to pass through the telecentric optical means. Exposure of the hologram resulting in reproduction of the hologram reproducing light from a part of the hologram is performed to restrict a light passing region in the telecentric optical system without lowering the light utilization efficiency and the numerical aperture of the photodetecting system.
摘要翻译：一种远心光学装置，包括设置在预定测试面上的物体，远心光学装置，其中第一透镜和第二透镜彼此间隔开等于第一透镜和第二透镜的焦距之和的距离;以及第二透镜的焦点位于测试面上，全息参考光源，全息图被放置在第一透镜和第二透镜之间的预定位置，并且与第一透镜分离第一透镜的焦距，并且其中被曝光以衍射来自参考光源的光，并且再现与从第一透镜的焦点发射并通过预定位置的一个或多个点光源产生的光相当的光，光电检测器其放置在第一透镜的焦点附近，并且检测被物体反射并使其通过远心光学装置的全息图再现光。执行导致从全息图的一部分再现全息图的全息图的曝光，以限制远心光学系统中的光通过区域，而不降低光利用效率和光电检测系统的数值孔径。

7. 发明申请

WO1997037264A1 CONFOCAL OPTICAL APPARATUS 审中-公开
标题翻译：共焦光学装置
公开(公告)号：WO1997037264A1
公开(公告)日：1997-10-09
申请号：PCT/JP1997001095
申请日：1997-03-28
申请人： KOMATSU LTD. , WAKAI, Hideyuki , MIZUKAMI, Hiroyuki , SUZUKI, Toru , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G02B21/36
CPC分类号： G01B11/24 , G01B9/04 , G02B21/004
摘要： A confocal optical apparatus provided with a confocal optical system including relay lenses (7, 7a, 7b), a pinhole array (4) in which pinholes (4a) are linearly or two-dimensionally arranged, and a photodetector array (8), and adapted to measure the intensities of light beams reflected from an object and passing through the pinholes, via the relay lenses. A diffusion member (20) adapted to diffuse at random the reflected light which has passed through the pinholes, is disposed in the vicinity of the reflected light focal point, whereby the reflected light which has passed through the pinholes is directed to the photodetecting portion of the photodetector array uniformly with a constant probability.
摘要翻译：一种具有包括中继透镜（7,7a，7b）的共焦光学系统的共焦光学装置，其中针孔（4a）线性或二维排列的针孔阵列（4）和光电检测器阵列（8），以及适于测量从物体反射并经由中继透镜穿过针孔的光束的强度。适于随机地扩散已经穿过针孔的反射光的漫射构件（20）设置在反射光焦点附近，由此已经穿过针孔的反射光被引导到光检测部分光电检测器阵列以一致的概率统一。

8. 发明申请

WO1997040412A1 CONFOCAL OPTICAL APPARATUS AND HOLOGRAM EXPOSURE APPARATUS 审中-公开
标题翻译：共焦光学装置和全息曝光装置
公开(公告)号：WO1997040412A1
公开(公告)日：1997-10-30
申请号：PCT/JP1997001408
申请日：1997-04-23
申请人： KOMATSU LTD. , MORIYA, Masato , MIZUKAMI, Hiroyuki , SUZUKI, Toru , WAKAI, Hideyuki , NAKAIKE, Takanori , SEKI, Masanobu
发明人： KOMATSU LTD.
IPC分类号： G02B21/00
CPC分类号： G03F7/70483 , G01B11/2441 , G02B21/004 , G02B21/0052 , G03H1/04
摘要： A confocal optical apparatus where reference light beam is directed diagonally to a hologram (3), the reference light is diffracted by the hologram (3), light beams equivalent to the light beams emitted from point light sources and outgoing from pinholes of a pinhole array (4) are produced, the light beams are projected onto an object, and object light, i.e., reflected light therefrom is focused at the pinholes. An incident light beam shaping means for shaping the cross section of the reference light beam into a generally circular shape is provided in the light path of the reference light beam.
摘要翻译：一种共焦光学装置，其中参考光束对角地对准全息图（3），参考光被全息图（3）衍射，等效于从点光源发射并从针孔阵列的针孔射出的光束（4），光束被投射到物体上，并且物体光，即其上的反射光聚焦在针孔处。在参考光束的光路中设置用于将参考光束的横截面成大致圆形的入射光束整形装置。

9. 发明申请

WO1997048968A1 CONFOCAL OPTICAL APPARATUS 审中-公开
标题翻译：共焦光学装置
公开(公告)号：WO1997048968A1
公开(公告)日：1997-12-24
申请号：PCT/JP1997001944
申请日：1997-06-06
申请人： KOMATSU LTD. , TADA, Shigeyuki , TANAKA, Hiroshi , ENDOH, Takayoshi , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G01B11/24
CPC分类号： G01B11/026 , G01B11/24 , G02B21/004
摘要： A confocal optical system is disposed one-dimensionally or two-dimensionally. Reflected light from an object (11, 12) is detected by a photodetector array (4) through a light receiving pin-hole array and the peak processing of the luminous intensity of the light received by the photodetector array is performed to measure the height of the object. If the received luminous intensity of the photodetector array exceeds a luminous power which is fixed within the dynamic range (Vs) of the photodetector array, the peak processing is made ineffective.
摘要翻译：共焦光学系统被一维或二维地设置。通过光接收针孔阵列由光电检测器阵列（4）检测来自物体（11,12）的反射光，并且执行由光电检测器阵列接收的光的发光强度的峰值处理，以测量物体。如果光电检测器阵列的接收到的发光强度超过光电检测器阵列的动态范围（Vs）内的光功率，则峰值处理无效。

10. 发明申请

WO1998029664A1 APPARATUS FOR RECOVERING PRESSURE OIL RETURNED FROM ACTUATORS 审中-公开
标题翻译：用于恢复从执行机构返回的压力油的装置
公开(公告)号：WO1998029664A1
公开(公告)日：1998-07-09
申请号：PCT/JP1997004844
申请日：1997-12-25
申请人： KOMATSU LTD. , ENDO, Hiroshi , YOSHIDA, Nobumi , MARUTA, Kazuhiro
发明人： KOMATSU LTD.
IPC分类号： F15B11/00
CPC分类号： E02F9/2267 , E02F9/2207 , E02F9/2217 , E02F9/2228 , E02F9/2271 , E02F9/2285 , E02F9/2292 , E02F9/2296 , F15B11/02 , F15B11/16 , F15B21/14 , F15B2211/20553 , F15B2211/20569 , F15B2211/20576 , F15B2211/212 , F15B2211/30515 , F15B2211/3111 , F15B2211/31541 , F15B2211/31576 , F15B2211/329 , F15B2211/351 , F15B2211/353 , F15B2211/40515 , F15B2211/428 , F15B2211/45 , F15B2211/613 , F15B2211/633 , F15B2211/6333 , F15B2211/6346 , F15B2211/6355 , F15B2211/7052 , F15B2211/7058 , F15B2211/71
摘要： An apparatus for recovering a pressure oil returned from actuators which comprises a plurality of recovery circuits (15, 19, 25, 27), into which a return pressure oil from a plurality of actuators flows, a main recovery circuit (36), and selection means (30, 31, 32, 33, 34, 35, 37) for selectively allowing communication between at least one of the plurality of recovery circuits and the main recovery circuit. Upon communication of at least one of the plurality of recovery circuits to the main recovery circuit, a return pressure oil from at least one actuator can be recovered. Accordingly, the apparatus can be applied as an apparatus for recovering a return pressure oil in a work machine provided with a plurality of actuators.
摘要翻译：一种用于回收从致动器返回的压力油的装置，包括多个致动器返回压力油流过的多个回收回路（15,19,25,27），主回路（36）和选择用于选择性地允许所述多个恢复电路和所述主恢复电路中的至少一个之间的通信的装置（30,31,32,33,34,35,37）。在将多个恢复电路中的至少一个通信到主恢复电路时，可以恢复来自至少一个致动器的返回压力油。因此，该装置可以用作在设置有多个致动器的作业机械中回收返回压力油的装置。

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