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1. 发明申请

WO2007079344A2 METHODS AND SYSTEMS FOR BINNING DEFECTS DETECTED ON A SPECIMEN 审中-公开
标题翻译：用于在样本上检测缺陷的方法和系统
公开(公告)号：WO2007079344A2
公开(公告)日：2007-07-12
申请号：PCT/US2006/062100
申请日：2006-12-14
申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , LIN, Jason Z. , CHU, Xing , WU, Kenong , MCCAULEY, Sharon
发明人： LIN, Jason Z. , CHU, Xing , WU, Kenong , MCCAULEY, Sharon
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/8854 , G06T2207/30148
摘要： Methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen. The reference images include images of one or more patterned features associated with different regions of interest within a device being formed on the specimen. If the one or more patterned features of the test image match the one or more patterned features of one of the reference images, the method includes assigning the defect to a bin corresponding to the region of interest associated with the reference image.
摘要翻译：提供了在样本上检测到的合并缺陷的方法和系统。一种方法包括将测试图像与参考图像进行比较。测试图像包括形成在样本上的接近于在样本上检测到的缺陷的一个或多个图案特征的图像。参考图像包括在形成在样本上的装置内的与感兴趣的不同区域相关联的一个或多个图案特征的图像。如果测试图像的一个或多个图案特征与参考图像之一的一个或多个图案特征匹配，则该方法包括将缺陷分配给对应于与参考图像相关联的感兴趣区域的区域。

2. 发明申请

WO2009033188A1 MEMORY CELL AND PAGE BREAK INSPECTION 审中-公开
标题翻译：记忆体和页面检查
公开(公告)号：WO2009033188A1
公开(公告)日：2009-03-12
申请号：PCT/US2008/075650
申请日：2008-09-08
申请人： KLA-TENCOR CORPORATION , LIN, Jason, Z. , CHU, Xing
发明人： LIN, Jason, Z. , CHU, Xing
IPC分类号： H04N7/18
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： A method of inspecting an array of memory blocks with page breaks disposed between them. The memory array is imaged with a sensor. Pixels of the image within a boundary distance of a horizontal single line of pixels are inspected to determine horizontal edges of the memory blocks to an accuracy of a single pixel. Pixels of the image within a boundary distance of a vertical single line of pixels are inspected to determine vertical edges of the memory blocks to an accuracy of a single pixel. An image of a first and second memor block are compared on a pixel by pixel basis to determine differences and the differences are flagged as potential memory block defects. Images of the page breaks are compared and the differences are flagged as potential page break defects.
摘要翻译：一种检查存储块阵列的方法，它们之间布置有分页符。存储器阵列用传感器成像。检查在水平单行像素的边界距离内的图像的像素，以将存储块的水平边缘确定为单个像素的精度。检查在垂直单行像素的边界距离内的图像的像素，以将存储块的垂直边缘确定为单个像素的精度。在逐个像素的基础上比较第一和第二存储器块的图像，以确定差异，并将差异标记为潜在的存储器块缺陷。比较分页符的图像，并将差异标记为潜在的分页缺陷。

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