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1. 发明申请

WO2006133258A3 MEASURING OVERLAY AND PROFILE ASYMMETRY USING SYMMETRIC AND ANTI-SYMMETRIC SCATTEROMETRY SIGNALS 审中-公开
标题翻译：使用对称和对称分析信号测量覆盖和轮廓不对称
公开(公告)号：WO2006133258A3
公开(公告)日：2007-03-29
申请号：PCT/US2006022059
申请日：2006-06-06
申请人： KLA TENCOR TECH CORP , KANDEL DANIEL , GROSS KEN , FRIEDMANN MICHAEL , FU JIYOU , KRISHNAN SHANKAR , GOLOVANEVSKY BORIS
发明人： KANDEL DANIEL , GROSS KEN , FRIEDMANN MICHAEL , FU JIYOU , KRISHNAN SHANKAR , GOLOVANEVSKY BORIS
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/9501 , G01N21/956 , G03F7/70633
摘要： Systems and methods are disclosed for using ellipsometer configurations to measure the partial Mueller matrix and the complete Jones matrix of a system that may be isotropic or anisotropic. In one embodiment two or more signals, which do not necessarily satisfy any symmetry assumptions individually, are combined into a composite signal which satisfies a symmetry assumption. The individual signals are collected at two or more analyzer angles. Symmetry properties of the composite signals allow easy extraction of overlay information for any relative orientation of the incident light beam with respect to a ID grating target, as well as for targets comprising general 2D gratings. Signals of a certain symmetry property also allow measurement of profile asymmetry in a very efficient manner. In another embodiment a measurement methodology is defined to measure only signals which satisfy a symmetry assumption. An optional embodiment comprises a single polarization element serving as polarizer (111) and analyzer (115). Another optional embodiment uses an analyzing prism (144) to simultaneously collect two polarization components of reflected light.
摘要翻译：公开了使用椭偏仪配置来测量可能是各向同性或各向异性的系统的部分Mueller矩阵和完整琼斯矩阵的系统和方法。在一个实施例中，不一定满足任何对称假设的两个或更多个信号被组合成满足对称假设的复合信号。各个信号以两个或多个分析器角度收集。复合信号的对称属性允许容易地提取用于入射光束相对于ID光栅目标的任何相对取向以及包括通用2D光栅的目标的覆盖信息。具有某种对称性质的信号也可以以非常有效的方式测量轮廓不对称。在另一个实施例中，测量方法被定义为仅测量满足对称假设的信号。可选实施例包括用作偏振器（111）和分析器（115）的单个偏振元件。另一个可选实施例使用分析棱镜（144）同时收集反射光的两个偏振分量。

2. 发明公开

EP1896811A4 MEASURING OVERLAY AND PROFILE ASYMMETRY USING SYMMETRIC AND ANTI-SYMMETRIC SCATTEROMETRY SIGNALS 审中-公开
标题翻译：叠加，PROFILE非对称性测量使用平衡和抗平衡扩频测量信号
公开(公告)号：EP1896811A4
公开(公告)日：2012-03-28
申请号：EP06772390
申请日：2006-06-06
申请人： KLA TENCOR TECH CORP
发明人： KANDEL DANIEL , GROSS KEN , FRIEDMANN MICHAEL , FU JIYOU , KRISHNAN SHANKAR , GOLOVANEVSKY BORIS
IPC分类号： G01J4/00 , G01N21/21 , G01N21/95 , G03F7/20
CPC分类号： G01N21/211 , G01N21/9501 , G01N21/956 , G03F7/70633

3. 发明申请

WO2012177404A3 OPTICAL SYSTEM POLARIZER CALIBRATION 审中-公开
标题翻译：光学系统偏振器校准
公开(公告)号：WO2012177404A3
公开(公告)日：2013-05-10
申请号：PCT/US2012041258
申请日：2012-06-07
申请人： KLA TENCOR CORP , DE VEER JOHANNES D , POSLAVSKY LEONID , ZHUANG GUORONG V , KRISHNAN SHANKAR
发明人： DE VEER JOHANNES D , POSLAVSKY LEONID , ZHUANG GUORONG V , KRISHNAN SHANKAR
IPC分类号： G02B27/62 , G02B5/30
CPC分类号： G01N21/21 , G01J3/504 , G01N21/274
摘要： A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.
摘要翻译：一种通过提供校准装置来校准偏振光学系统中任何入射角的偏振器的方法，通过提供校准装置，该校准装置包括具有设置在其表面上的偏振器的衬底，用于指示偏振器的偏振取向的衬底，将校准装置装载在具有指示器的期望位置的偏振光学系统中，确定极化取向和偏振光学系统的基准之间的初始角度，使用偏振光光学系统以偏振方向和偏振光学系统的基准之间的多个已知角度，使用光谱绘制指示偏振器在偏振光学系统中的角度的曲线，以及当偏振器的角度在期望的范围，调整偏振器的角度，并重复以下步骤获取光谱，并绘制一个指示偏振片角度的曲线。

4. 发明申请

WO2009038706A3 COOLING HOT-SPOTS BY LATERAL ACTIVE HEAT TRANSPORT 审中-公开
标题翻译：横向主动传热冷却热点
公开(公告)号：WO2009038706A3
公开(公告)日：2009-05-14
申请号：PCT/US2008010792
申请日：2008-09-16
申请人： LUCENT TECHNOLOGIES INC , HODES MARC SCOTT , KRISHNAN SHANKAR
发明人： HODES MARC SCOTT , KRISHNAN SHANKAR
IPC分类号： H01L23/38
CPC分类号： H01L23/38 , H01L2924/0002 , H01L2924/00
摘要： An apparatus includes a thermoelectric cooler adjacent to a surface of a device substrate and including a first set of one or more metal electrodes, a second set of one or more metal electrodes, and one or more semiconductor members. Each member includes a material different from the device substrate and physically joins a corresponding one electrode of the first set to a corresponding one electrode of the second set. The electrodes and at least one member are configured to transport heat to or from a thermal load in a direction parallel to the surface of the device substrate.
摘要翻译：一种装置包括与器件衬底的表面相邻并包括第一组一个或多个金属电极，第二组一个或多个金属电极以及一个或多个半导体部件的热电冷却器。每个构件包括与器件衬底不同的材料并物理地将第一组的对应的一个电极接合到第二组的对应的一个电极。电极和至少一个构件被配置为在平行于器件衬底的表面的方向上将热量传递至热负载或从热负载传递热量。

5. 发明申请

WO2012158279A3 RECONFIGURABLE SPECTROSCOPIC ELLIPSOMETER 审中-公开
标题翻译：可重构光谱仪
公开(公告)号：WO2012158279A3
公开(公告)日：2013-01-17
申请号：PCT/US2012032792
申请日：2012-04-09
申请人： KLA TENCOR CORP , KRISHNAN SHANKAR , WANG HAIMING
发明人： KRISHNAN SHANKAR , WANG HAIMING
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/956
摘要： A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
摘要翻译：具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧上的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。

6. 发明申请

WO2008092121A3 PURGE GAS FLOW CONTROL FOR HIGH-PRECISION FILM MEASUREMENTS USING ELLIPSOMETRY AND REFLECTOMETRY 审中-公开
标题翻译：用ELLIPSOMETRY和REFLECTOMETRY进行高精度薄膜测量的净化气体流量控制
公开(公告)号：WO2008092121A3
公开(公告)日：2008-09-25
申请号：PCT/US2008052118
申请日：2008-01-25
申请人： KLA TENCOR CORP , KWAK HIDONG , KRISHNAN SHANKAR
发明人： KWAK HIDONG , KRISHNAN SHANKAR
IPC分类号： H01H27/00 , G01J4/00
CPC分类号： G01B11/0625 , G01B11/0633 , G01B11/0641 , G01J3/02 , G01J3/0224 , G01J3/0294 , G01J3/447 , G01N21/211 , G01N21/33 , G01N2021/213 , G01N2201/0233
摘要： A method and system for measuring sample characteristics using a broadband metrology tool in a purge gas flow environment are disclosed. A beam path for the tool is purged with gas at a first flow rate. The sample surface is illuminated by source radiation having a vacuum ultraviolet (VUV) and/or ultraviolet-visible (UV-Vis) component. The gas flow rate is adjusted between the first flow rate for measurements made with VUV radiation and a second flow rate for measurements made UV-Vis radiation. The system includes a light source, illumination optics, collection optics, detector, gas source and a controller. The gas source can supply gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller can control a flow rate of the gas in response to an output signal from the detector.
摘要翻译：公开了一种用于在吹扫气体流动环境中使用宽带度量工具来测量样本特性的方法和系统。用第一流速的气体吹扫工具的光束路径。样品表面由具有真空紫外（VUV）和/或紫外 - 可见（UV-Vis）组分的源辐射照射。气体流速在用VUV辐射进行测量的第一流速与用于进行UV-Vis辐射测量的第二流速之间调整。该系统包括光源，照明光学器件，收集光学器件，检测器，气源和控制器。气体源可将气体供应到光源和/或照明光学器件和/或样品和/或收集光学器件和/或检测器中的光束路径。控制器可以响应于来自检测器的输出信号来控制气体的流量。

7. 发明申请

WO2013006248A2 MEASUREMENT OF CRITICAL DIMENSION 审中-公开
标题翻译：关键维度的测量
公开(公告)号：WO2013006248A2
公开(公告)日：2013-01-10
申请号：PCT/US2012042071
申请日：2012-06-12
申请人： KLA TENCOR CORP , KRISHNAN SHANKAR , WANG HAIMING
发明人： KRISHNAN SHANKAR , WANG HAIMING
CPC分类号： G01N21/55 , G01B11/065 , G01B2210/56 , G01J3/021 , G01J3/0229 , G01J3/42 , G01N21/00 , G01N21/211 , G01N2021/213 , G01N2021/214 , G01N2201/0675
摘要： A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angles-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discrete combinations of azimuth angle and angle-of-incident, a detector for receiving the discrete combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.
摘要翻译：一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，所述仪器具有用于产生照明光束的宽带光源，用于将照明引导到多个方位角的衬底上的物镜从而产生反射光束，具有照射孔径和形成在其中的多个收集孔径的孔径板，用于选择性地通过具有方位角和角度的所需离散组合的反射光束的部分 - 事件，用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

8. 发明申请

WO2010005501A3 MONOLITHIC STRUCTURALLY COMPLEX HEAT SINK DESIGNS 审中-公开
标题翻译：单片结构复杂的散热设计
公开(公告)号：WO2010005501A3
公开(公告)日：2010-04-08
申请号：PCT/US2009003847
申请日：2009-06-29
申请人： ALCATEL LUCENT USA INC , HERNON DOMHNAILL , HODES MARC SCOTT , KRISHNAN SHANKAR , LYONS ALAN MICHAEL , O'LOUGHLIN ALAN
发明人： HERNON DOMHNAILL , HODES MARC SCOTT , KRISHNAN SHANKAR , LYONS ALAN MICHAEL , O'LOUGHLIN ALAN
IPC分类号： H01L23/34 , G06F1/20 , H05K7/20
CPC分类号： H05K7/20009 , B22D25/02 , B33Y80/00 , F28F13/003 , F28F2255/00 , H01L23/367 , H01L23/3672 , H01L23/467 , H01L2924/0002 , Y10T29/4935 , H01L2924/00
摘要： A heat sink includes a base and a heat exchange element monolithically connected to the base. The heat exchange element has a surface that at least partially bounds first and second paths through the heat exchange element. The surface forms an upper boundary of the first and second paths and includes an opening therethrough connecting the first and second paths.
摘要翻译：散热器包括基座和整体连接到基座的热交换元件。热交换元件具有至少部分地界定穿过热交换元件的第一路径和第二路径的表面。该表面形成第一和第二路径的上边界并且包括连接第一和第二路径的穿过其中的开口。

9. 发明申请

WO2009154767A3 A HEAT-TRANSFER STRUCTURE 审中-公开
标题翻译：传热结构
公开(公告)号：WO2009154767A3
公开(公告)日：2010-04-01
申请号：PCT/US2009003651
申请日：2009-06-18
申请人： ALCATEL LUCENT USA INC , KEMPERS ROGER SCOTT , KRISHNAN SHANKAR , LYONS ALAN MICHAEL , SALAMON TODD RICHARD
发明人： KEMPERS ROGER SCOTT , KRISHNAN SHANKAR , LYONS ALAN MICHAEL , SALAMON TODD RICHARD
IPC分类号： B32B37/10 , B32B15/01
CPC分类号： B23P15/26 , B21D53/02 , B21D53/022 , B21D53/04 , F28F21/00 , F28F21/081 , H01L23/367 , H01L23/3677 , H01L23/3736 , H01L23/42 , H01L24/64 , H01L24/66 , H01L24/69 , H01L25/0657 , H01L2225/06527 , H01L2225/06575 , H01L2225/06589 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01057 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/14 , Y10T29/4935 , Y10T428/12396 , Y10T428/24562 , Y10T428/24851
摘要： An apparatus 100 comprising a first substrate 130 having a first surface 125, a second substrate 132 having a second surface 127 facing the first surface and an array 170 of metallic raised features 170 being located on the first surface, each raised feature being in contact with the first surface to the second surface, a portion of the raised features being deformed via a compressive force 305.
摘要翻译：装置100包括具有第一表面125的第一基底130，具有面向第一表面的第二表面127的第二基底132和位于第一表面上的金属凸起特征170的阵列170，每个凸起特征与第一表面到第二表面，凸起特征的一部分经由压缩力305变形。

10. 发明申请

WO2009105411A2 THERMALLY CONDUCTIVE PERIODICALLY STRUCTURED GAP FILLERS AND METHOD FOR UTILIZING SAME 审中-公开
标题翻译：导热周期性结构的带隙填料及其使用方法
公开(公告)号：WO2009105411A2
公开(公告)日：2009-08-27
申请号：PCT/US2009034246
申请日：2009-02-17
申请人： ALCATEL LUCENT USA INC , BOROWIEC JOSEPH A , KEMPERS ROGER SCOTT , KRISHNAN SHANKAR , LAGROTTA RICHARD THOMAS , PICOT WALTER J
发明人： BOROWIEC JOSEPH A , KEMPERS ROGER SCOTT , KRISHNAN SHANKAR , LAGROTTA RICHARD THOMAS , PICOT WALTER J
IPC分类号： H01L23/373
CPC分类号： H01L23/3733 , H01L23/433 , H01L23/522 , H01L2224/29
摘要： A method for conducting heat between a heat source and a heat sink includes disposing under a compressive force therebetween a plurality of thermally conducting unit cell structures that mechanically cooperate to form thereby a body structure having an aggregate thermal conductivity that changes in response to a compressive force exerted thereon, wherein an amount of said plurality of thermally conducting unit cell structures disposed therein is selectable to affect thereby a desired aggregate thermal conductivity in response to the compressive force.
摘要翻译：用于在热源和散热器之间传导热量的方法包括在其之间的压缩力处设置多个导热单元电池结构，所述多个导热单元电池结构机械配合以形成具有响应于压缩力而变化的聚集导热率的主体结构施加在其上，其中设置在其中的所述多个导热单元结构的量可选择，从而影响响应于压缩力的期望的聚集体热导率。

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