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1. 发明授权

EP0358464B1 Laser devices and laser system including the laser devices 失效
标题翻译：激光设备和激光系统，这些设备。
公开(公告)号：EP0358464B1
公开(公告)日：1994-06-15
申请号：EP89308994.6
申请日：1989-09-05
申请人： KAWASAKI STEEL CORPORATION
发明人： Nakano, Noboru , Kubota, Naoki , Miyazaki, Yoshihisa
IPC分类号： H01S3/093 , H01S3/23 , H01S3/08
CPC分类号： H01S3/2308 , H01S3/0071 , H01S3/08059 , H01S3/093

2. 发明公开

EP0522296A2 Plasma processing system and method 失效
标题翻译： Anordnung und Verfahren zur Plasmabearbeitung。
公开(公告)号：EP0522296A2
公开(公告)日：1993-01-13
申请号：EP92109655.8
申请日：1992-06-09
申请人： KAWASAKI STEEL CORPORATION
发明人： Kinoshita, Osamu , Murakawa, Shigemi , Kubota, Naoki
IPC分类号： H01J37/32 , H05H3/02 , G21K1/14
CPC分类号： H01J37/32357 , G21K1/14 , H01J37/32633 , H01J2237/334 , H05H3/00
摘要： An etching system comprises a plasma chamber (20), a charge exchange chamber (22) and a processing chamber (24), and the charge exchange chamber and the processing chamber are partitioned with a porous plate (34) provided with a number of fine linear microchannel holes (34A). Positive ions generated by the plasma chamber are accelerated by an accelerating electrode (26) in the charge exchange chamber, charge-exchanged and introduced as neutral particles into the processing chamber through the microchannel holes. Neutral particles are vertically entered into an object (S) to be processed as neutral particle beams of which directions are completely aligned by the microchannel holes. Even an object with a large area can be etched with high accuracy by making the porous plate in a size which meets the object. Thus, the plasma processing only with neutral particles is carried out with high accuracy even when the area of the object is large.
摘要翻译：蚀刻系统包括等离子体室（20），电荷交换室（22）和处理室（24），并且电荷交换室和处理室由设置有多个细孔的多孔板（34）分隔开线性微通道孔（34A）。由等离子体室产生的正离子通过电荷交换室中的加速电极（26）加速，通过微通道孔进行电荷交换并作为中性粒子引入处理室。中性颗粒垂直进入待处理的物体（S），作为中性粒子束，其方向由微通道孔完全对准。通过使多孔板的尺寸达到目标，即使是具有大面积的物体也可以高精度地蚀刻。因此，即使当物体的面积大时，仅以中性粒子进行的等离子体处理也以高精度进行。

3. 发明公开

EP0358464A3 Laser devices and laser system including the laser devices 失效
标题翻译：激光装置，激光系统，包括激光装置和激光系统的输出镜
公开(公告)号：EP0358464A3
公开(公告)日：1990-05-02
申请号：EP89308994.6
申请日：1989-09-05
申请人： KAWASAKI STEEL CORPORATION
发明人： Nakano, Noboru , Kubota, Naoki , Miyazaki, Yoshihisa
IPC分类号： H01S3/093 , H01S3/23 , H01S3/08
CPC分类号： H01S3/2308 , H01S3/0071 , H01S3/08059 , H01S3/093
摘要： As a beam converger (10), one having reflective surfaces including partial cylindrical curved surfaces and partial plain surfaces, which surround laser rod (12, 14, 16, 17) and pump lamp (11, 13, 15, 18, 19) plane-parallelly and substantially uniformly in the axial direction thereof, is adopted, so as to make a high beam converging property in the case of adoption of an elliptic cylinder moderate. The axes (31, 33, 35, 38, 39) (32, 34, 36, 37) of the pump lamp and/or the laser rod are shifted to positions closer to the partial cylindrical curved surfaces than the center lines (21, 22, 23, 24, 25, 26, 27, 28, 29) of the partial cylindrical curved surfaces, so as to increase energy of light exciting the laser rod by the pump lamp, thus improving the efficiency. A laser system obtained by combining a resonant type laser device comprising two laser rods (12, 14) and one or two pump lamps (11, 15) with a prism (101a) having a regular equilateral triangle shape in cross section, highly contributes to the compactness and simplification of the laser system.

4. 发明公开

EP0522296A3 Plasma processing system and method 失效
标题翻译：等离子体处理系统和方法
公开(公告)号：EP0522296A3
公开(公告)日：1993-03-10
申请号：EP92109655.8
申请日：1992-06-09
申请人： KAWASAKI STEEL CORPORATION
发明人： Kinoshita, Osamu , Murakawa, Shigemi , Kubota, Naoki
IPC分类号： H01J37/32 , H05H3/02 , G21K1/14
CPC分类号： H01J37/32357 , G21K1/14 , H01J37/32633 , H01J2237/334 , H05H3/00
摘要： An etching system comprises a plasma chamber (20), a charge exchange chamber (22) and a processing chamber (24), and the charge exchange chamber and the processing chamber are partitioned with a porous plate (34) provided with a number of fine linear microchannel holes (34A). Positive ions generated by the plasma chamber are accelerated by an accelerating electrode (26) in the charge exchange chamber, charge-exchanged and introduced as neutral particles into the processing chamber through the microchannel holes. Neutral particles are vertically entered into an object (S) to be processed as neutral particle beams of which directions are completely aligned by the microchannel holes. Even an object with a large area can be etched with high accuracy by making the porous plate in a size which meets the object. Thus, the plasma processing only with neutral particles is carried out with high accuracy even when the area of the object is large.

5. 发明公开

EP0358464A2 Laser devices and laser system including the laser devices 失效
标题翻译： Laservorrichtungen und Lasersystem mit diesen Vorrichtungen。
公开(公告)号：EP0358464A2
公开(公告)日：1990-03-14
申请号：EP89308994.6
申请日：1989-09-05
申请人： KAWASAKI STEEL CORPORATION
发明人： Nakano, Noboru , Kubota, Naoki , Miyazaki, Yoshihisa
IPC分类号： H01S3/093 , H01S3/23 , H01S3/08
CPC分类号： H01S3/2308 , H01S3/0071 , H01S3/08059 , H01S3/093
摘要： As a beam converger (10), one having reflective surfaces including partial cylindrical curved surfaces and partial plain surfaces, which surround laser rod (12, 14, 16, 17) and pump lamp (11, 13, 15, 18, 19) plane-parallelly and substantially uniformly in the axial direction thereof, is adopted, so as to make a high beam converging property in the case of adoption of an elliptic cylinder moderate. The axes (31, 33, 35, 38, 39) (32, 34, 36, 37) of the pump lamp and/or the laser rod are shifted to positions closer to the partial cylindrical curved surfaces than the center lines (21, 22, 23, 24, 25, 26, 27, 28, 29) of the partial cylindrical curved surfaces, so as to increase energy of light exciting the laser rod by the pump lamp, thus improving the efficiency. A laser system obtained by combining a resonant type laser device comprising two laser rods (12, 14) and one or two pump lamps (11, 15) with a prism (101a) having a regular equilateral triangle shape in cross section, highly contributes to the compactness and simplification of the laser system.
摘要翻译：作为光束会聚器（10），其具有包括部分圆柱形曲面和部分平面表面的反射表面，其包围激光棒（12,14,16,17）和泵灯（11,13,15,18,19）的平面在其轴向方向上平行且基本上均匀地被采用，以便在采用椭圆柱的情况下使其具有高光束会聚性。泵灯和/或激光棒的轴线（31,33,35,38,39）（32,34,36,37）被移动到比中心线（21， 22,23,24,25,26,27,28,29,29,28,29,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,29,28,29,2 通过将包括两个激光棒（12,14）和一个或两个泵灯（11,15）的共振型激光装置与横截面具有规则等边三角形形状的棱镜（101a）组合而获得的激光系统高度有助于激光系统的紧凑性和简化性。

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