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    • 8. 发明专利
    • DEVICE FOR UNIDIRECTIONAL SOLIDIFICATION OF SILICON
    • JPH11199216A
    • 1999-07-27
    • JP381698
    • 1998-01-12
    • KAWASAKI STEEL CO
    • HAMADA SHUNJIKATO YOSHIHIDEABE MASAMICHI
    • B22D27/04C01B33/037H01L21/208H01L31/04
    • PROBLEM TO BE SOLVED: To provide the subject device capable of maintaining the solidification rate to be constant as compared with any conventional device for the same purpose. SOLUTION: This device is provided with: a casting mold 3 disposed on a support base that is placed inside a casting chamber 15; a melt supply means 2 for pouring a silicon melt 4 to be cast, into the casting mold 3; a heating means 10 for heating the upper side of the melt 4 in the casting mold 3; a water-cooled copper plate 12 for cooling the bottom of the casting mold 3; and an insulating material 9 placed between the water-cooled copper plate 12 and the bottom of the casting mold 3; wherein the melt supply means 2 and the heating means 10 are placed apart from each other in the upper part of the casting chamber 15, at positions which are the same distance apart from the central axis of the casting chamber 15 in the radial direction. Further, the device is provided with two disks, i.e., an upper disk 5 and a lower disk 6, which overlap each other and are rotatable independently from each other with their center shafts as the rotary shafts, respectively, and also, function as the support base for the casting mold 3 and the support base for the insulating material 9, respectively.