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    • 6. 发明专利
    • CLEAN ROOM PARTIALLY HAVING DIFFERENT CLEANING DEGREES
    • JPS625031A
    • 1987-01-12
    • JP14176085
    • 1985-06-28
    • KAJIMA CORP
    • SUZUKI MASAMIYAMAGUCHI HIROKIKATAYAMA HISATOMUTA KOREYOSHIOKUBO MASAKUNIMOCHIZUKI AKIRAADACHI HIROSHI
    • F24F7/06F24F3/16F24F7/10
    • PURPOSE:To facilitate change of layout, to reduce costs for equipment and operation and to facilitate the maintenance of the clean room by partitioning a dustless chamber with a suspending wall, putting a section requiring a high cleaning degree into a full surface laminar flow type, and putting other sections into a turbulent flow system. CONSTITUTION:A dustless chamber R is partitioned by a glass made partitioning wall 8. A wafer intake portion 9A of a device requiring a high cleaning degree such as a semiconductor manufacturing device 9 and a section R1 where an automatic transporting robot 10 are provided on the full surface of the ceiling with high efficiency particle arresting (HEPA) filters 1, and an air flow is sent from a supply chamber 2 to form a full surface laminar flow system. Also, a section R2 is partially provided at its ceiling with HEPA filters 1 and an air flow is sent from the supply chamber 2 to form a turbulent flow system. The full surface of the floor of each of sections R1 and R2 is of a grating structure 12 having shutters 13 with filters. The section R3 where the operator exists is provided partially with filters 1 and shutters 13. By this organization, the dustless chamber is constituted of the supply chamber 2 and a return chamber 3, and the change of the layout is facilitated and various expenses can be saved.
    • 10. 发明专利
    • Connection control system of electronic device
    • 电子设备连接控制系统
    • JPS57123404A
    • 1982-07-31
    • JP892981
    • 1981-01-26
    • Kajima Corp
    • SUZUKI MASAMIKIMATA NOBUYUKIFUJIMOTO YASUHIRO
    • G05B15/02H02J13/00
    • H02J13/002Y02B70/3266Y02E60/7815Y04S20/242Y04S40/121
    • PURPOSE:To realize the decrease of the length of an electric line, the simplification of the system, the reduction of the space, etc., by transmitting and receiving the control word formed by the specific pulse between a control board connected to a power supply line via a capacitor and a switch controller. CONSTITUTION:Plural electric devices 3 containing a switch controller 5 having a device code respectively are connected to a power supply line 1 like the branches of a tree. At the same time, a control board 9 is connected to the line with a capacitor 8, and the controller 5 is connected to the line with the capacitor 8. Then a control word including the device code and the working code is formed with plural pulses which are transmitted and received by one and every cycle of the commerical frequency voltage via the line plus both capacitors 8 and 8. The controller 5 consists of, for example, a transmitter/receiver 11, a processor 12, a flip-flop 21, an amplifier 22, an electromagnetic contact 20, etc.
    • 目的:通过在连接到电源的控制板之间发送和接收由特定脉冲形成的控制字来实现电线长度的减小,系统的简化,空间的减少等 通过电容器和开关控制器。 构成:具有分别具有设备代码的开关控制器5的多个电气设备3分别与树的分支连接到电源线1。 同时,控制板9与电容器8连接在一起,并且控制器5与电容器8连接在一起。然后,包括器件代码和工作代码的控制字形成有多个脉冲 其经由线路加上电容器8和8的商业频率电压的一个和每个周期发送和接收。控制器5由例如发送器/接收器11,处理器12,触发器21, 放大器22,电磁触点20等