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    • 3. 发明申请
    • METHOD OF CONTROL OF MOVING ELEMENT OF MAGNETIC LEVITATION CARRIER APPARATUS
    • 控制运动元件运动装置的方法
    • WO1991002663A1
    • 1991-03-07
    • PCT/JP1990001074
    • 1990-08-23
    • KABUSHIKI KAISHA YASKAWA DENKI SEISAKUSHOOGURO, Ryuichi
    • KABUSHIKI KAISHA YASKAWA DENKI SEISAKUSHO
    • B60L13/08
    • B61B13/08B60L13/08
    • A magnetic levitation carrier apparatus of the type wherein a plate-like moving element (SFT) is moved by a linear motor disposed inside a fixing element (STT), wherein when the moving element is supported in a vertical direction by first to fourth electromagnet devices (MGV10 SIMILAR MGV41) and force is allowed to act on the moving element in a horizontal direction perpendicular to the moving direction by fifth and sixth electromagnet devices (MGH10 SIMILAR MGH21), the gap between the moving element and each electromagnet device is detected by a gap sensor so as to output gap data. As to the vertical direction, for example, an attraction command (fv1 SIMILAR fv2) is obtained from the output value of a feedback quantity calculation circuit (10) to which the gap data (Xv1 SIMILAR Xv4) are inputted and the output value of a variable gain gv (l) generation circuit (60) to which the position (l) of the centroid of the moving element is inputted and is linearized by a linearilization circuit (71 SIMILAR 74) and then outputted to each electromagnet. In this manner, the variable gain can be accomplished easily by an analog circuit and the control gain in each control direction can be given independently.
    • 一种磁悬浮载体装置,其中板状移动元件(SFT)由设置在固定元件(STT)内部的线性电机移动,其中当通过第一至第四电磁体装置沿垂直方向支撑移动元件时 (MGV10 SIMILAR MGV41),并且通过第五和第六电磁体装置(MGH10 SIMILAR MGH21),允许力在与移动方向垂直的水平方向上作用于移动元件,移动元件和每个电磁体装置之间的间隙由 间隙传感器,以输出间隙数据。 对于垂直方向,例如,从输入了间隙数据(Xv1 SIMILAR XV4)的反馈量计算电路(10)的输出值获得吸引指令(fv1 SIMILAR fv2),输出值 可变增益gv(l)生成电路(60),运动元件的质心的位置(1)被输入并通过线性化电路(71类型74)线性化,然后输出到每个电磁体。 以这种方式,可以通过模拟电路容易地实现可变增益,并且可以独立地给出每个控制方向上的控制增益。