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    • 4. 发明申请
    • DRIVER FOR MEMS SPATIAL LIGHT MODULATOR
    • MEMS空间光调制器的驱动器
    • WO2013131071A1
    • 2013-09-06
    • PCT/US2013/028778
    • 2013-03-02
    • SILICON LIGHT MACHINES CORPORATIONYEUNG, Michael
    • YEUNG, Michael
    • G02B26/00
    • G02B26/00G02B26/0808G09G3/2011G09G3/3473G09G2300/0426G09G2310/0272
    • A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.
    • 提供了空间光调制器(SLM)模块及其设计,制造和使用的方法。 在一个实施例中,SLM模块包括形成在衬底上的衍射衍射SLM,SLM包括多个像素,每个像素包括多个可静电偏转的致动器,以及驱动器,其包括多个驱动通道,每个驱动通道耦合到多个 的静电偏转致动器。 每个驱动通道包括与SLM一体形成在同一衬底上的至少一个内部数模转换器(DAC)。 在一个实施例中,DAC是多斜率电荷积分DAC。 在其他实施例中,驱动器包括用于测试每个驱动通道的电路和可以被切换以替换有缺陷的驱动通道的备用驱动通道。