专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO1997035370A1 LASER AND METHOD OF CONTROLLING LASER 审中-公开
标题翻译：激光和控制激光的方法
公开(公告)号：WO1997035370A1
公开(公告)日：1997-09-25
申请号：PCT/JP1997000849
申请日：1997-03-17
申请人： KABUSHIKI KAISHA TOPCON
发明人： KABUSHIKI KAISHA TOPCON , OHISHI, Masahiro , KOIZUMI, Hiroshi , OHTOMO, Fumio , MOMIUCHI, Masayuki , GOTO, Yoshiaki
IPC分类号： H01S03/109
CPC分类号： H01S3/109 , H01S3/042 , H01S3/09415 , H01S3/1312 , H01S5/024
摘要： A nonlinear optical medium is inserted into an optical resonator containing a laser crystal, and a laser oscillator pumped by a laser beam source is operated with a high efficiency. The nonlinear optical medium (400) is heated/cooled by a temperature control unit (700) provided in the laser oscillator (1000), the temperature of the nonlinear optical medium (400) is measured with a temperature sensing means (4100), the power consumptions of the temperature control unit (700) and a driving means (600) are measured using a power consumption measuring unit (3000), and the temperature control unit (700) is controlled and driven by a computing means (5000) in accordance with the summation of the power consumptions of the temperature control unit (700) and the driving means (600).

2. 发明公开

EP3009807A1 DISPLACEMENT MEASURING METHOD AND DISPLACEMENT MEASURING DEVICE 有权
标题翻译： WEGMESSVERFAHREN UND WEGMESSVORRICHTUNG
公开(公告)号：EP3009807A1
公开(公告)日：2016-04-20
申请号：EP15186810.6
申请日：2015-09-25
申请人： Kabushiki Kaisha TOPCON
发明人： OHTOMO, Fumio , KUMAGAI, Kaoru , MOMIUCHI, Masayuki , OSARAGI, Kazuki
IPC分类号： G01D5/347 , G01C15/02 , G06T7/00
CPC分类号： G01B11/254 , G01B11/002 , G01B11/26 , G01D5/34715 , G06K9/52 , G06T7/60
摘要： A displacement measuring device, comprising a pattern projecting unit, a pattern image pickup unit provided so as to be capable of relatively displacing with respect to the pattern projecting unit and a control unit, wherein the pattern projecting unit is capable of projecting a displacement detecting pattern to the pattern image pickup unit, the pattern image pickup unit is capable of picking up the displacement detecting pattern as projected, the control unit is adopted to circulate image of the displacement detecting pattern picked up by the pattern image pickup unit to the pattern projecting unit, to update the displacement detecting pattern projected by the pattern projecting unit to the displacement detecting pattern as circulated, and further to project the displacement detecting pattern as updated to the pattern image pickup unit, wherein a relative displacement between the pattern projecting unit and the pattern image pickup unit is obtained by dividing a displacement amount of the displacement detecting pattern in the image acquired by circulation by the number of circulations.
摘要翻译：一种位移测量装置，包括图案投影单元，设置成能够相对于图案投影单元相对移位的图案图像拾取单元和控制单元，其中图案投影单元能够将位移检测图案图案图像拾取单元能够拾取投影时的位移检测图案，采用控制单元将由图案图像拾取单元拾取的位移检测图案的图像循环到图案投影单元将由图案投影单元投影的位移检测图案更新为位移检测图案，并且进一步将更新后的位移检测图案投影到图案图像拾取单元，其中，图案投影单元和图案之间的相对位移通过除位移量o获得图像拾取单元 f通过循环次数获得的图像中的位移检测图案。

3. 发明授权

EP3009807B1 DISPLACEMENT MEASURING METHOD AND DISPLACEMENT MEASURING DEVICE 有权
标题翻译： WEGMESSVERFAHREN和位移测量装置
公开(公告)号：EP3009807B1
公开(公告)日：2017-03-22
申请号：EP15186810.6
申请日：2015-09-25
申请人： Kabushiki Kaisha TOPCON
发明人： OHTOMO, Fumio , KUMAGAI, Kaoru , MOMIUCHI, Masayuki , OSARAGI, Kazuki
IPC分类号： G01D5/347 , G01B11/26 , G01B11/25 , G06K9/52 , G06T7/60 , G01C15/02 , G06T7/00
CPC分类号： G01B11/254 , G01B11/002 , G01B11/26 , G01D5/34715 , G06K9/52 , G06T7/60

4. 发明公开

EP2463616A1 INTERFERENCE MICROSCOPE AND MEASURING APPARATUS 审中-公开
标题翻译：莫斯科的INTERFERENZMIKROSKOP
公开(公告)号：EP2463616A1
公开(公告)日：2012-06-13
申请号：EP09848074.2
申请日：2009-09-11
申请人： Kabushiki Kaisha TOPCON
发明人： OOTOMO, Fumio , NUNOKAWA, Kazuo , MOMIUCHI, Masayuki , ISOZAKI, Hisashi , MIYAKAWA, Kazuhiro
IPC分类号： G01B9/02 , G01B11/24 , G01N21/956
CPC分类号： G01B9/02032 , G01B9/02007 , G01B9/0209 , G01B9/04 , G01B11/2441 , G01B2290/45 , G01N21/9501 , G02B21/0016
摘要： In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces.
摘要翻译：在干涉显微镜和测量装置中，通过对样品施加激光并使用干涉仪来观察和检查诸如晶片的样品的表面和内部的测量装置，在分束器和光束分离器之间提供用于导光的参考光路在分束器和试样之间设置参考反射镜和用于导光的测量光路，从而在参考光路和测量光路之间提供光程差。此外，参考镜稍微倾斜，从而在检测装置上形成干涉条纹。通过简单的结构，可以通过稍微倾斜参考镜来测量诸如晶片的样品（测量对象）的表面形状，并且定位异物和极片的精确坐标位置。

5. 发明公开

EP3029547A1 THREE-DIMENSIONAL INPUT DEVICE AND INPUT SYSTEM 审中-公开
标题翻译：梦幻EINGABEVORRICHTUNG UND EINGABESYSTEM
公开(公告)号：EP3029547A1
公开(公告)日：2016-06-08
申请号：EP15194015.2
申请日：2015-11-11
申请人： Kabushiki Kaisha Topcon
发明人： OSARAGI, Kazuki , OHTOMO, Fumio , MOMIUCHI, Masayuki
IPC分类号： G06F3/01 , G06F3/0481
CPC分类号： G06F3/011 , G06F3/0304 , G06F3/03542 , G06F3/04815
摘要： A three-dimensional input device, which comprises two optical measuring means as set at a predetermined interval from each other, and for measuring a three-dimensional position of an object to be measured at a real time based on a direction of an object to be measured as obtained individually by the two optical measuring means and the predetermined interval and also has a three-dimensional position detecting device which is capable of being mounted on a human body, and a control unit, wherein the control unit generates input information based on change and mode of change of three-dimensional position of the object to be measured.
摘要翻译：一种三维输入装置，其包括彼此以预定间隔设置的两个光学测量装置，并且用于基于物体的方向实时地测量待测物体的三维位置通过两个光学测量装置和预定间隔单独获得测量，并且还具有能够安装在人体上的三维位置检测装置和控制单元，其中控制单元基于变化产生输入信息以及要测量对象的三维位置的变化模式。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式