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1. 发明授权

US07109727B2 Capacitive physical quantity sensor 有权
标题翻译：电容式物理量传感器
公开(公告)号：US07109727B2
公开(公告)日：2006-09-19
申请号：US11227983
申请日：2005-09-16
申请人： Junji Hayakawa , Norio Kitao , Akinobu Umemura , Hirokazu Ito , Takaaki Kawai
发明人： Junji Hayakawa , Norio Kitao , Akinobu Umemura , Hirokazu Ito , Takaaki Kawai
IPC分类号： G01R27/26 , G01P21/00
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0814
摘要： In a capacitive physical quantity sensor, a C-V converter converts a variation in a capacitance between a movable electrode and a fixed electrode into a voltage to output the converted voltage in a first operating mode. The C-V converter also outputs a constant voltage in a second operating mode. An amplifier amplifies the converted voltage to output a first voltage, and amplifies the constant voltage to output a second voltage. A first sample and hold circuit operates in the first operating mode to sample and hold the first voltage. A second sample and hold circuit operates in the second operating mode to sample and hold the second voltage. A first differential amplifier obtains a difference voltage between the first voltage held by the first sample and hold circuit and the second voltage held by the second sample and hold circuit.
摘要翻译：在电容物理量传感器中，C-V转换器将可移动电极和固定电极之间的电容变化转换成电压，以在第一操作模式下输出转换的电压。 C-V转换器还在第二操作模式下输出恒定电压。放大器放大转换的电压以输出第一电压，并放大恒定电压以输出第二电压。第一采样和保持电路在第一操作模式下工作以采样和保持第一电压。第二采样和保持电路在第二操作模式下工作以采样和保持第二电压。第一差分放大器获得由第一采样和保持电路保持的第一电压与由第二采样和保持电路保持的第二电压之间的差分电压。

2. 发明申请

US20060061372A1 Capacitive physical quantity sensor 有权
公开(公告)号：US20060061372A1
公开(公告)日：2006-03-23
申请号：US11227983
申请日：2005-09-16
申请人： Junji Hayakawa , Norio Kitao , Akinobu Umemura , Hirokazu Ito , Takaaki Kawai
发明人： Junji Hayakawa , Norio Kitao , Akinobu Umemura , Hirokazu Ito , Takaaki Kawai
IPC分类号： G01R27/26
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0814
摘要： In a capacitive physical quantity sensor, a C-V converter converts a variation in a capacitance between a movable electrode and a fixed electrode into a voltage to output the converted voltage in a first operating mode. The C-V converter also outputs a constant voltage in a second operating mode. An amplifier amplifies the converted voltage to output a first voltage, and amplifies the constant voltage to output a second voltage. A first sample and hold circuit operates in the first operating mode to sample and hold the first voltage. A second sample and hold circuit operates in the second operating mode to sample and hold the second voltage. A first differential amplifier obtains a difference voltage between the first voltage held by the first sample and hold circuit and the second voltage held by the second sample and hold circuit.

3. 发明授权

US07456731B2 Capacitive-type physical quantity sensor 有权
标题翻译：电容式物理量传感器
公开(公告)号：US07456731B2
公开(公告)日：2008-11-25
申请号：US11415230
申请日：2006-05-02
申请人： Akinobu Umemura , Junji Hayakawa , Takaaki Kawai
发明人： Akinobu Umemura , Junji Hayakawa , Takaaki Kawai
IPC分类号： G01P15/125
CPC分类号： G01P15/131 , G01P15/125
摘要： A substrate forming a sensor element is connected to a non-inverting input terminal of an operational amplifier, and a common voltage is applied thereto from a reference voltage supply circuit to fix them to the same potential. Thus, the impedances of the non-inverting input terminal and of the inverting input terminal of the operational amplifier are matched with respect to the power source. Therefore, noise superposed on a power source line can be greatly decreased by noise-removing characteristics determined by CMRR characteristics of the operational amplifier. As a result, a capacitive-type acceleration sensor exhibits sensor characteristics of frequency noise suppressing effect.
摘要翻译：形成传感器元件的基板连接到运算放大器的非反相输入端子，并且从参考电压供给电路向其施加公共电压以将它们固定为相同的电位。因此，运算放大器的非反相输入端子和反相输入端子的阻抗相对于电源是匹配的。因此，通过由运算放大器的CMRR特性确定的噪声去除特性，可以大大降低叠加在电源线上的噪声。结果，电容型加速度传感器具有频率噪声抑制效果的传感器特性。

4. 发明申请

US20060250267A1 Capacitive-type physical quantity sensor 有权
标题翻译：电容式物理量传感器
公开(公告)号：US20060250267A1
公开(公告)日：2006-11-09
申请号：US11415230
申请日：2006-05-02
申请人： Akinobu Umemura , Junji Hayakawa , Takaaki Kawai
发明人： Akinobu Umemura , Junji Hayakawa , Takaaki Kawai
IPC分类号： G08B21/00
CPC分类号： G01P15/131 , G01P15/125
摘要： A substrate forming a sensor element is connected to a non-inverting input terminal of an operational amplifier, and a common voltage is applied thereto from a reference voltage supply circuit to fix them to the same potential. Thus, the impedances of the non-inverting input terminal and of the inverting input terminal of the operational amplifier are matched with respect to the power source. Therefore, noise superposed on a power source line can be greatly decreased by noise-removing characteristics determined by CMRR characteristics of the operational amplifier. As a result, a capacitive-type acceleration sensor exhibits sensor characteristics of frequency noise suppressing effect.
摘要翻译：形成传感器元件的基板连接到运算放大器的非反相输入端子，并且从参考电压供给电路向其施加公共电压以将它们固定为相同的电位。因此，运算放大器的非反相输入端子和反相输入端子的阻抗相对于电源是匹配的。因此，通过由运算放大器的CMRR特性确定的噪声去除特性，可以大大降低叠加在电源线上的噪声。结果，电容型加速度传感器具有频率噪声抑制效果的传感器特性。

5. 发明授权

US07339265B2 Capacitance type semiconductor sensor 失效
标题翻译：电容式半导体传感器
公开(公告)号：US07339265B2
公开(公告)日：2008-03-04
申请号：US11178303
申请日：2005-07-12
申请人： Norio Kitao , Akinobu Umemura
发明人： Norio Kitao , Akinobu Umemura
IPC分类号： H01L23/48 , H01L23/52
CPC分类号： G01P1/023 , G01P15/125 , H01L2224/32145 , H01L2224/48091 , H01L2924/01068 , H01L2924/01078 , H01L2924/00014
摘要： In a capacitance type semiconductor dynamic quantity sensor, a sensor chip and a circuit are connected to each other through adhesive film having an elasticity of 200 MPa or less to reduce the temperature characteristic. Four bonding wires for connecting the sensor chip and the circuit chip are arranged so that each of the bonding wires is located at the center portion of each side portion of the sensor chip or at each corner portion of the sensor chip, thereby sufficiently increasing the interval between the bonding wires and thus sufficiently reducing the absolute value of the parasitic capacitance thus occurring. Therefore, even when the parasitic capacitance between the four bonding wires is varied, the variation is very small, and thus the influence on the sensor characteristic can be reduced.
摘要翻译：在电容型半导体动态量传感器中，传感器芯片和电路通过具有200MPa以下的弹性的粘合膜彼此连接，以降低温度特性。布置用于连接传感器芯片和电路芯片的四个接合线，使得每个接合线位于传感器芯片的每个侧部的中心部分或传感器芯片的每个拐角部分处，从而充分增加间隔从而充分降低由此发生的寄生电容的绝对值。因此，即使四根接合线之间的寄生电容变化，变化也非常小，因此可以降低对传感器特性的影响。

6. 发明申请

US20060049506A1 Capacitance type semiconductor sensor 失效
标题翻译：电容式半导体传感器
公开(公告)号：US20060049506A1
公开(公告)日：2006-03-09
申请号：US11178303
申请日：2005-07-12
申请人： Norio Kitao , Akinobu Umemura
发明人： Norio Kitao , Akinobu Umemura
IPC分类号： H01L23/48 , H01L23/52
CPC分类号： G01P1/023 , G01P15/125 , H01L2224/32145 , H01L2224/48091 , H01L2924/01068 , H01L2924/01078 , H01L2924/00014
摘要： In a capacitance type semiconductor dynamic quantity sensor, a sensor chip and a circuit are connected to each other through adhesive film having an elasticity of 200 MPa or less to reduce the temperature characteristic. Four bonding wires for connecting the sensor chip and the circuit chip are arranged so that each of the bonding wires is located at the center portion of each side portion of the sensor chip or at each corner portion of the sensor chip, thereby sufficiently increasing the interval between the bonding wires and thus sufficiently reducing the absolute value of the parasitic capacitance thus occurring. Therefore, even when the parasitic capacitance between the four bonding wires is varied, the variation is very small, and thus the influence on the sensor characteristic can be reduced.
摘要翻译：在电容型半导体动态量传感器中，传感器芯片和电路通过具有200MPa以下的弹性的粘合膜彼此连接，以降低温度特性。布置用于连接传感器芯片和电路芯片的四个接合线，使得每个接合线位于传感器芯片的每个侧部的中心部分或传感器芯片的每个拐角部分处，从而充分增加间隔从而充分降低由此发生的寄生电容的绝对值。因此，即使四根接合线之间的寄生电容变化，变化也非常小，因此能够降低对传感器特性的影响。

7. 发明申请

US20070159183A1 Capacitive physical quantity sensor 失效
标题翻译：电容式物理量传感器
公开(公告)号：US20070159183A1
公开(公告)日：2007-07-12
申请号：US11642714
申请日：2006-12-21
申请人： Akinobu Umemura , Junji Hayakawa
发明人： Akinobu Umemura , Junji Hayakawa
IPC分类号： G01R27/26
CPC分类号： G01R27/2605 , G01D5/24 , G01D5/2417 , G01P15/125
摘要： A capacitive physical quantity sensor includes a sensor element and a detecting element. The sensor element includes first and second fixed electrodes facing a movable electrode. A first voltage is applied to the first fixed electrode and a second voltage is applied to the second fixed electrode. The detecting circuit includes a capacitance-voltage conversion circuit, in which an operational amplifier, a capacitor and a switch including a P-channel MOS transistor and a N-channel MOS transistor are disposed. The transistors have a back gate potential, which is approximately equal to an average voltage of the first voltage and the second voltage.
摘要翻译：电容式物理量传感器包括传感器元件和检测元件。传感器元件包括面向可动电极的第一和第二固定电极。向第一固定电极施加第一电压，并向第二固定电极施加第二电压。检测电路包括电容电压转换电路，其中设置有运算放大器，电容器和包括P沟道MOS晶体管和N沟道MOS晶体管的开关。晶体管具有大约等于第一电压和第二电压的平均电压的背栅电位。

8. 发明授权

US07640806B2 Capacitive physical quantity sensor 失效
标题翻译：电容式物理量传感器
公开(公告)号：US07640806B2
公开(公告)日：2010-01-05
申请号：US11642714
申请日：2006-12-21
申请人： Akinobu Umemura , Junji Hayakawa
发明人： Akinobu Umemura , Junji Hayakawa
IPC分类号： G01P15/125
CPC分类号： G01R27/2605 , G01D5/24 , G01D5/2417 , G01P15/125
摘要： A capacitive physical quantity sensor includes a sensor element and a detecting element. The sensor element includes first and second fixed electrodes facing a movable electrode. A first voltage is applied to the first fixed electrode and a second voltage is applied to the second fixed electrode. The detecting circuit includes a capacitance-voltage conversion circuit, in which an operational amplifier, a capacitor and a switch including a P-channel MOS transistor and a N-channel MOS transistor are disposed. The transistors have a back gate potential, which is approximately equal to an average voltage of the first voltage and the second voltage.
摘要翻译：电容式物理量传感器包括传感器元件和检测元件。传感器元件包括面向可动电极的第一和第二固定电极。向第一固定电极施加第一电压，并向第二固定电极施加第二电压。检测电路包括电容电压转换电路，其中设置有运算放大器，电容器和包括P沟道MOS晶体管和N沟道MOS晶体管的开关。晶体管具有大约等于第一电压和第二电压的平均电压的背栅电位。

9. 发明申请

US20050210980A1 Capacitive acceleration sensor system 失效
标题翻译：电容式加速度传感器系统
公开(公告)号：US20050210980A1
公开(公告)日：2005-09-29
申请号：US11073600
申请日：2005-03-08
申请人： Akinobu Umemura , Hirokazu Ito
发明人： Akinobu Umemura , Hirokazu Ito
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor system includes: a first and a second fixed electrodes; a movable electrode for providing a first and a second capacitors; a detection capacitor for detecting a capacitance difference between the first and the second capacitors; a charge voltage conversion circuit for converting a capacitance change of the detection capacitor to an output voltage; a detection bias voltage applying means; a vibrating means for vibrating the movable electrode such that a displacement bias voltage is applied in a first period and no displacement bias voltage is applied in a second period; a sampling means for sampling the output voltage during the second period when the movable electrode is stationarily vibrated; and an acceleration signal generating and outputting means for generating an acceleration signal on the basis of a sampling result.
摘要翻译：加速度传感器系统包括：第一和第二固定电极; 用于提供第一和第二电容器的可移动电极; 检测电容器，用于检测第一和第二电容器之间的电容差; 用于将检测电容器的电容变化转换为输出电压的充电电压转换电路; 检测偏压施加装置; 用于振动可动电极的振动装置，使得在第一周期中施加位移偏置电压，并且在第二周期中不施加位移偏置电压; 采样装置，用于在可动电极静止振动的第二周期期间对输出电压进行采样; 以及加速度信号生成和输出装置，用于根据采样结果产生加速度信号。

10. 发明授权

US07287429B2 Capacitive acceleration sensor system 失效
标题翻译：电容式加速度传感器系统
公开(公告)号：US07287429B2
公开(公告)日：2007-10-30
申请号：US11073600
申请日：2005-03-08
申请人： Akinobu Umemura , Hirokazu Ito
发明人： Akinobu Umemura , Hirokazu Ito
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor system includes: a first and a second fixed electrodes; a movable electrode for providing a first and a second capacitors; a detection capacitor for detecting a capacitance difference between the first and the second capacitors; a charge voltage conversion circuit for converting a capacitance change of the detection capacitor to an output voltage; a detection bias voltage applying circuit; a vibrating circuit for vibrating the movable electrode such that a displacement bias voltage is applied in a first period and no displacement bias voltage is applied in a second period; a sampling circuit for sampling the output voltage during the second period when the movable electrode is constantly vibrated; and an acceleration signal generating and outputting circuit for generating an acceleration signal on the basis of a sampling result.
摘要翻译：加速度传感器系统包括：第一和第二固定电极; 用于提供第一和第二电容器的可移动电极; 检测电容器，用于检测第一和第二电容器之间的电容差; 用于将检测电容器的电容变化转换为输出电压的充电电压转换电路; 检测偏压施加电路; 用于振动可动电极的振动电路，使得在第一周期中施加位移偏置电压，并且在第二周期中不施加位移偏置电压; 用于在可动电极不断地振动的第二时段期间对输出电压进行采样的采样电路; 以及加速度信号生成和输出电路，用于根据采样结果产生加速度信号。

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