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1. 发明授权

US08644647B2 Optical control device 有权
标题翻译：光控装置
公开(公告)号：US08644647B2
公开(公告)日：2014-02-04
申请号：US12225787
申请日：2007-03-30
申请人： Junichiro Ichikawa , Futoshi Yamamoto , Yuhki Kinpara , Katsutoshi Kondou , Satoshi Oikawa
发明人： Junichiro Ichikawa , Futoshi Yamamoto , Yuhki Kinpara , Katsutoshi Kondou , Satoshi Oikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0356 , G02F1/2255 , G02F2201/063 , G02F2201/066 , G02F2201/121
摘要： It is an object to provide an optical control device capable of realizing speed matching between a microwave and a light wave or impedance matching of microwaves and of reducing a driving voltage. An optical control device including a thin plate 1 (11) which has an electro-optical effect and has a thickness of 10 μm or less, an optical waveguide 2 formed in the thin plate, and control electrodes for controlling light passing through the optical waveguide is characterized in that the control electrodes are configured to include a first electrode and a second electrode disposed to interpose the thin plate therebetween, the first electrode has a coplanar type electrode including at least a signal electrode 4 and a ground electrode 5, and the second electrode has at least a ground electrode 54 (55, 56) and is configured to apply an electric field to the optical waveguide in cooperation with the signal electrode of the first electrode.
摘要翻译：本发明的目的是提供一种能够实现微波和光波之间的速度匹配或微波的阻抗匹配以及降低驱动电压的光学控制装置。一种光学控制装置，包括具有电光效应并且具有10μm或更小的厚度的薄板1（11），形成在薄板中的光波导2和用于控制通过光波导的光的控制电极其特征在于，控制电极被配置为包括第一电极和设置成将薄板夹在其间的第二电极，第一电极具有至少包括信号电极4和接地电极5的共面型电极，第二电极电极至少具有接地电极54（55,56），并且被配置为与第一电极的信号电极协作地向光波导施加电场。

2. 发明申请

US20100232736A1 Optical Control Device 有权
标题翻译：光控装置
公开(公告)号：US20100232736A1
公开(公告)日：2010-09-16
申请号：US12225787
申请日：2007-03-30
申请人： Junichiro Ichikawa , Futoshi Yamamoto , Yuhki Kinpara , Katsutoshi Kondou , Satoshi Oikawa
发明人： Junichiro Ichikawa , Futoshi Yamamoto , Yuhki Kinpara , Katsutoshi Kondou , Satoshi Oikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0356 , G02F1/2255 , G02F2201/063 , G02F2201/066 , G02F2201/121
摘要： It is an object to provide an optical control device capable of realizing speed matching between a microwave and a light wave or impedance matching of microwaves and of reducing a driving voltage. An optical control device including a thin plate 1 (11) which has an electro-optical effect and has a thickness of 10 μm or less, an optical waveguide 2 formed in the thin plate, and control electrodes for controlling light passing through the optical waveguide is characterized in that the control electrodes are configured to include a first electrode and a second electrode disposed to interpose the thin plate therebetween, the first electrode has a coplanar type electrode including at least a signal electrode 4 and a ground electrode 5, and the second electrode has at least a ground electrode 54 (55, 56) and is configured to apply an electric field to the optical waveguide in cooperation with the signal electrode of the first electrode.
摘要翻译：本发明的目的是提供一种能够实现微波和光波之间的速度匹配或微波的阻抗匹配以及降低驱动电压的光学控制装置。一种光学控制装置，包括具有电光效应并且具有10μm以下的厚度的薄板1（11），形成在薄板中的光波导2，以及控制电极，用于控制通过光波导的光其特征在于，控制电极被配置为包括第一电极和设置成将薄板夹在其间的第二电极，第一电极具有至少包括信号电极4和接地电极5的共面型电极，第二电极电极至少具有接地电极54（55,56），并且被配置为与第一电极的信号电极协作地向光波导施加电场。

3. 发明授权

US07831122B2 Optical control device and manufacturing method thereof 有权
标题翻译：光控装置及其制造方法
公开(公告)号：US07831122B2
公开(公告)日：2010-11-09
申请号：US12225781
申请日：2007-03-05
申请人： Katsutoshi Kondou , Yuhki Kinpara , Futoshi Yamamoto , Junichiro Ichikawa
发明人： Katsutoshi Kondou , Yuhki Kinpara , Futoshi Yamamoto , Junichiro Ichikawa
IPC分类号： G02B6/10
CPC分类号： G02B6/1228 , G02B6/136 , G02B2006/1204 , G02B2006/12042 , G02B2006/12097 , G02F1/035 , G02F1/377
摘要： The purpose of present inventions is to provide an optical control device having a single-mode waveguide in the optical control device having the ridge waveguide, and to stably manufacture and provide the optical control device having the single-mode waveguide with high precision even when the substrate is a thin plate with the thickness of 10 μm or less. An optical control device having a substrate 1 formed with an optical waveguide, in which the substrate is a thin plate with a thickness of 10 μm or less, at least a portion of the optical waveguide is configured as a ridge waveguide 21, a trench 20 having a width of 10 μm or less is formed on both sides of at least portions of the ridge waveguide, and a taper waveguide section (area B) continuously changes a light propagation mode of the waveguide between a single-mode and a multi-mode by continuously changing the width or depth of the trench. Additionally, it is desirable that the taper waveguide section is disposed at least in one of a light input section and a light output section, and light propagating through the waveguide is in the single-mode in a section in which the taper waveguide section is disposed.
摘要翻译：本发明的目的是提供一种在具有脊形波导的光学控制装置中具有单模波导的光学控制装置，并且即使当具有单模波导的光学控制装置也可以高精度地稳定地制造和提供具有高精度的光学控制装置基板是厚度为10μm以下的薄板。一种光学控制装置，具有形成有光波导的基板1，其中基板为厚度为10μm以下的薄板，光波导的至少一部分构成为脊波导21，沟槽20 在脊形波导的至少一部分的两侧形成宽度为10μm以下的锥形波导部（区域B），在单模和多模之间连续地改变波导的光传播模式通过连续地改变沟槽的宽度或深度。此外，希望锥形波导部分至少设置在光输入部分和光输出部分中的一个中，并且通过波导传播的光在其中设置锥形波导部分的部分中处于单模式。

4. 发明申请

US20090116802A1 Optical Control Device and Manufacturing Method Thereof 有权
标题翻译：光控装置及其制造方法
公开(公告)号：US20090116802A1
公开(公告)日：2009-05-07
申请号：US12225781
申请日：2007-03-05
申请人： Katsutoshi Kondou , Yuhki Kinpara , Futoshi Yamamoto , Junichiro Ichikawa
发明人： Katsutoshi Kondou , Yuhki Kinpara , Futoshi Yamamoto , Junichiro Ichikawa
IPC分类号： G02B6/10 , B23K26/00
CPC分类号： G02B6/1228 , G02B6/136 , G02B2006/1204 , G02B2006/12042 , G02B2006/12097 , G02F1/035 , G02F1/377
摘要： The purpose of present inventions is to provide an optical control device having a single-mode waveguide in the optical control device having the ridge waveguide, and to stably manufacture and provide the optical control device having the single-mode waveguide with high precision even when the substrate is a thin plate with the thickness of 10 μm or less. An optical control device having a substrate 1 formed with an optical waveguide, in which the substrate is a thin plate with a thickness of 10 μm or less, at least a portion of the optical waveguide is configured as a ridge waveguide 21, a trench 20 having a width of 10 μm or less is formed on both sides of at least portions of the ridge waveguide, and a taper waveguide section (area B) continuously changes a light propagation mode of the waveguide between a single-mode and a multi-mode by continuously changing the width or depth of the trench. Additionally, it is desirable that the taper waveguide section is disposed at least in one of a light input section and a light output section, and light propagating through the waveguide is in the single-mode in a section in which the taper waveguide section is disposed.
摘要翻译：本发明的目的是提供一种在具有脊形波导的光学控制装置中具有单模波导的光学控制装置，并且即使当具有单模波导的光学控制装置也可以高精度地稳定地制造和提供具有高精度的光学控制装置衬底是厚度为10μm或更小的薄板。一种光控制装置，具有形成有光波导的基板1，其中基板为厚度为10μm以下的薄板，光波导的至少一部分构成为脊波导21，沟槽20 在脊状波导的至少一部分的两侧形成有10μm以下的宽度，并且锥形波导部（区域B）在单模与多模之间连续地改变波导的光传播模式通过连续地改变沟槽的宽度或深度。此外，希望锥形波导部分至少设置在光输入部分和光输出部分中的一个中，并且通过波导传播的光在其中设置锥形波导部分的部分中处于单模式。

5. 发明授权

US09081214B2 Optical control element 有权
标题翻译：光控元件
公开(公告)号：US09081214B2
公开(公告)日：2015-07-14
申请号：US13881634
申请日：2010-10-25
申请人： Satoshi Oikawa , Yuhki Kinpara , Yasuhiro Ishikawa , Katsutoshi Kondou
发明人： Satoshi Oikawa , Yuhki Kinpara , Yasuhiro Ishikawa , Katsutoshi Kondou
IPC分类号： G02F1/035 , G02F1/01 , G02F1/225 , G02F1/21
CPC分类号： G02F1/011 , G02F1/035 , G02F1/225 , G02F2001/212 , G02F2201/05 , G02F2201/08
摘要： An optical control element capable of efficiently removing unnecessary higher mode light without complicating a manufacturing process of the optical control element is provided. The optical control element includes a substrate having an electro-optical effect, optical waveguides that are formed on the substrate, and a control electrode that controls light waves propagating through the optical waveguides, and the optical waveguides include an output waveguide portion which derives fundamental mode light, and a subsidiary waveguide portion which is connected to the output waveguide portion and derives higher mode light, and removal means is formed in contact with the subsidiary waveguide portion, for removing the higher mode light propagating through the subsidiary waveguide portion.
摘要翻译：提供一种能够有效地去除不必要的更高模式光而不使光学控制元件的制造过程复杂化的光学控制元件。光控制元件包括具有电光效应的基板，形成在基板上的光波导和控制光通过光波导传播的控制电极，并且光波导包括导出基模的输出波导部分光和辅助波导部分，其连接到输出波导部分并导出较高模式光，并且去除装置形成为与辅助波导部分接触，用于去除通过辅助波导部分传播的较高模式光。

6. 发明申请

US20130251301A1 OPTICAL CONTROL ELEMENT 有权
标题翻译：光控元件
公开(公告)号：US20130251301A1
公开(公告)日：2013-09-26
申请号：US13881634
申请日：2010-10-25
申请人： Satoshi Oikawa , Yuhki Kinpara , Yasuhiro Ishikawa , Katsutoshi Kondou
发明人： Satoshi Oikawa , Yuhki Kinpara , Yasuhiro Ishikawa , Katsutoshi Kondou
IPC分类号： G02F1/01
CPC分类号： G02F1/011 , G02F1/035 , G02F1/225 , G02F2001/212 , G02F2201/05 , G02F2201/08
摘要： An optical control element capable of efficiently removing unnecessary higher mode light without complicating a manufacturing process of the optical control element is provided. The optical control element includes a substrate having an electro-optical effect, optical waveguides that are formed on the substrate, and a control electrode that controls light waves propagating through the optical waveguides, and the optical waveguides include an output waveguide portion which derives fundamental mode light, and a subsidiary waveguide portion which is connected to the output waveguide portion and derives higher mode light, and removal means is formed in contact with the subsidiary waveguide portion, for removing the higher mode light propagating through the subsidiary waveguide portion.
摘要翻译：提供一种能够有效地去除不必要的更高模式光而不使光学控制元件的制造过程复杂化的光学控制元件。光控制元件包括具有电光效应的基板，形成在基板上的光波导和控制光通过光波导传播的控制电极，并且光波导包括导出基模的输出波导部分光和辅助波导部分，其连接到输出波导部分并导出较高模式光，并且去除装置形成为与辅助波导部分接触，用于去除通过辅助波导部分传播的较高模式光。

7. 发明授权

US07985294B2 Optical device and method of manufacturing the same 有权
标题翻译：光学装置及其制造方法
公开(公告)号：US07985294B2
公开(公告)日：2011-07-26
申请号：US11367261
申请日：2006-03-03
申请人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
发明人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
IPC分类号： C30B29/30
CPC分类号： G02B6/1342
摘要： An optical device and a method of manufacturing the optical device, with the method including the steps of forming a dopant layer on a stoichiometric lithium niobate single crystal substrate with Li to Nb mole composition ratio of 49.5% to 50.5%, and diffusing a dopant in the dopant layer into at least a portion of the stoichiometric lithium niobate single crystal substrate. The stoichiometric lithium niobate single crystal substrate includes 0.5 to 5 mol % of Mg. In the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. for a diffusion time of 3 hours to 24 hours in a dry atmosphere of at least one of O2, N2, Ar and He gas having a dew-point temperature of −35° C. or less.
摘要翻译：一种光学器件和光学器件的制造方法，其特征在于包括以下步骤：在化学计量比的铌酸锂单晶衬底上形成掺杂剂层，其中Li与Nb的摩尔组成比为49.5％至50.5％，并将掺杂剂扩散到该掺杂剂层至少部分化学计量的铌酸锂单晶衬底。化学计量的铌酸锂单晶衬底包含0.5-5mol％的Mg。在扩散步骤中，在O2，N2，Ar和He中的至少一种的干燥气氛中，在1000℃至1200℃的扩散温度下进行3小时至24小时的扩散时间的热处理露点温度为-35℃以下的气体。

8. 发明申请

US20070053625A1 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US20070053625A1
公开(公告)日：2007-03-08
申请号：US11389726
申请日：2006-03-27
申请人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
发明人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0311 , G02F1/035 , G02F1/225 , G02F2201/08
摘要： An optical modulator using a thin plate capable of improving an S/N ratio of an output light is provided. The optical modulator including a thin plate 1 having an electrooptic effect and having a thickness of 20 μm or less, an optical waveguide 4 formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein a stray light removing member 10 is disposed within the thin plate or in a vicinity of the thin plate.
摘要翻译：提供一种使用能够提高输出光的S / N比的薄板的光调制器。光调制器包括具有电光效应并且厚度为20μm或更小的薄板1，形成在薄板的顶表面或底表面上的光波导4和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中杂散光去除构件10设置在薄板内或薄板附近。

9. 发明授权

US07362924B2 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US07362924B2
公开(公告)日：2008-04-22
申请号：US11389726
申请日：2006-03-27
申请人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
发明人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0311 , G02F1/035 , G02F1/225 , G02F2201/08
摘要： An optical modulator using a thin plate capable of improving an S/N ratio of an output light is provided. The optical modulator including a thin plate 1 having an electrooptic effect and having a thickness of 20 μm or less, an optical waveguide 4 formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein a stray light removing member 10 is disposed within the thin plate or in a vicinity of the thin plate.
摘要翻译：提供一种使用能够提高输出光的S / N比的薄板的光调制器。光调制器包括具有电光效应并且厚度为20μm或更小的薄板1，形成在薄板的顶表面或底表面上的光波导4和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中杂散光去除构件10设置在薄板内或薄板附近。

10. 发明申请

US20070014014A1 Optical device and method of manufacturing the same 有权
标题翻译：光学装置及其制造方法
公开(公告)号：US20070014014A1
公开(公告)日：2007-01-18
申请号：US11367261
申请日：2006-03-03
申请人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
发明人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
IPC分类号： G02B5/18 , G02B27/44
CPC分类号： G02B6/1342
摘要： An object of the present invention is to provide an optical device having high quality, excellent productivity and optical characteristics, and capable of suppressing a refractive index of a substrate surface from increasing when a dopant is thermally diffused into, or a heat treatment is performed in order to compensate of process distortion in stoichiometric lithium niobate crystal or a crystal substrate in which Mg is doped into the crystal, and a method of manufacturing the same. According to the present invention, there is provided a method of manufacturing an optical device including the steps of: forming a dopant layer on a substantial stoichiometric lithium niobate single crystal substrate; and diffusing a dopant in the dopant layer into at least a portion of the substantial stoichiometric lithium niobate single crystal substrate, wherein, in the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. in an atmosphere in which a gas having a dew-point temperature of 0° C. or less is introduced, preferably for a diffusion time of 3 hours or more, and more preferably 3 hours to 24 hours.
摘要翻译：本发明的目的是提供一种具有高质量，优异的生产率和光学特性的光学器件，并且能够抑制当掺杂剂热扩散时衬底表面的折射率增加，或者在为了补偿化学计量比的铌酸锂晶体或其中Mg掺杂到晶体中的晶体衬底的工艺失真及其制造方法。根据本发明，提供了一种制造光学器件的方法，包括以下步骤：在基本上化学计量的铌酸锂单晶衬底上形成掺杂剂层; 并且将掺杂剂层中的掺杂剂扩散到至少一部分实质上的化学计量的铌酸锂单晶衬底中，其中在扩散步骤中，在1000℃至1200℃的扩散温度下进行热处理引入露点温度为0℃以下的气体的气氛，优选扩散时间为3小时以上，更优选为3小时〜24小时。

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