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    • 3. 发明授权
    • Semiconductor device, memory system and electronic apparatus
    • 半导体器件,存储器系统和电子设备
    • US06747322B2
    • 2004-06-08
    • US10154423
    • 2002-05-21
    • Junichi KarasawaKunio Watanabe
    • Junichi KarasawaKunio Watanabe
    • H01L2976
    • H01L27/1104
    • A semiconductor device having a memory cell including first and second load transistors, first and second driver transistors, and first and second transfer transistors. The semiconductor device includes first and second gate—gate electrode layers, first and second drain—drain wiring layers, and first and second drain-gate wiring layers. The first drain-gate wiring layer and the second drain-gate wiring layer are located in different layers. The first drain-gate wiring layer is located below the first drain—drain wiring layer, and the second drain-gate wiring layer is located in above the first drain—drain wiring layer. This structure provides a semiconductor device that has reduced cell area. The invention also provides a memory system and electronic apparatus that include the above semiconductor device.
    • 具有包括第一和第二负载晶体管,第一和第二驱动晶体管以及第一和第二转移晶体管的存储单元的半导体器件。 半导体器件包括第一和第二栅极 - 栅极电极层,第一和第二漏极 - 漏极布线层以及第一和第二漏极 - 栅极布线层。 第一漏极 - 栅极布线层和第二漏极 - 栅极布线层位于不同的层中。 第一漏极 - 栅极布线层位于第一漏极 - 漏极布线层的下方,第二漏极 - 栅极布线层位于第一漏极 - 漏极布线层的上方。 该结构提供了具有减小的单元面积的半导体器件。 本发明还提供了包括上述半导体器件的存储器系统和电子设备。
    • 5. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US06300229B1
    • 2001-10-09
    • US09563130
    • 2000-05-02
    • Kazuo TanakaTakashi KumagaiJunichi KarasawaKunio Watanabe
    • Kazuo TanakaTakashi KumagaiJunichi KarasawaKunio Watanabe
    • H01L2120
    • H01L27/11H01L21/28518H01L21/76895H01L21/76897H01L27/1104
    • A method of manufacturing a semiconductor device comprising the following steps: forming first, second, and third wiring layers on a semiconductor substrate; forming first, second, and third cover dielectric layers for covering these wiring layers; forming a first impurity diffusion layer of a P type and a second impurity diffusion layer of an N type in an active region, and forming a third impurity diffusion layer of a P type and a fourth impurity diffusion layer of an N type in an active region; self-alignably forming a first local wiring layer for connecting the first impurity diffusion layer with the second wiring layer, and self-alignably forming a second local wiring layer for connecting the fourth impurity diffusion layer with the third wiring layer; in an interlayer dielectric layer, self-alignably forming a first contact hole by using the first and third cover dielectric layers as masking layers, and self-alignably forming a second contact hole by using the second cover dielectric layer as a masking layer; and forming fourth and fifth wiring layers in these contact holes, respectively.
    • 一种制造半导体器件的方法,包括以下步骤:在半导体衬底上形成第一,第二和第三布线层; 形成用于覆盖这些布线层的第一,第二和第三覆盖电介质层; 在有源区中形成P型和N型的第二杂质扩散层的第一杂质扩散层,在有源区中形成P型的第三杂质扩散层和N型的第四杂质扩散层 ; 自对准地形成用于将第一杂质扩散层与第二布线层连接的第一局部布线层,并自对准地形成用于将第四杂质扩散层与第三布线层连接的第二局部布线层; 在层间电介质层中,通过使用第一和第三覆盖电介质层作为掩蔽层自对准地形成第一接触孔,并且通过使用第二覆盖电介质层作为掩蔽层自对准地形成第二接触孔; 并且在这些接触孔中分别形成第四和第五布线层。
    • 6. 发明授权
    • Semiconductor devices, memory systems and electronic apparatuses with improved latch up suppression
    • 具有改进的闭锁抑制的半导体器件,存储器系统和电子设备
    • US06730974B2
    • 2004-05-04
    • US10150498
    • 2002-05-16
    • Junichi KarasawaKunio Watanabe
    • Junichi KarasawaKunio Watanabe
    • H01L2976
    • H01L27/1104Y10S257/903
    • Semiconductor devices are provided that include a memory cell having load transistors, driver transistors, and transfer transistors. The semiconductor device has a first element-forming region that can be provided in, for example, a p-well region. The first element-forming region can include includes a first active region, a second active region, a third active region, a fourth active region and a fifth active region. The third active region, the fourth active region and the fifth active region can be provided between the first active region and the second active region. The first active region and the second active region can be continuous with the third active region, the fourth active region and the fifth active region, respectively. Thus, semiconductor devices can be provided having element-forming regions that can be readily formed. Memory systems and electronic equipment that include such semiconductor devices can also be provided.
    • 提供了包括具有负载晶体管,驱动晶体管和转移晶体管的存储单元的半导体器件。 半导体器件具有第一元件形成区域,其可以设置在例如p阱区域中。 第一元件形成区域可以包括第一有源区,第二有源区,第三有源区,第四有源区和第五有源区。 第三有源区,第四有源区和第五有源区可以设置在第一有源区和第二有源区之间。 第一有源区和第二有源区可以分别与第三有源区,第四有源区和第五有源区连续。 因此,可以提供具有易于形成的元件形成区域的半导体器件。 还可以提供包括这种半导体器件的存储器系统和电子设备。
    • 9. 发明授权
    • CMOS device with improved wiring density
    • 具有改善布线密度的CMOS器件
    • US6081016A
    • 2000-06-27
    • US282035
    • 1999-03-30
    • Kazuo TanakaTakashi KumagaiJunichi KarasawaKunio Watanabe
    • Kazuo TanakaTakashi KumagaiJunichi KarasawaKunio Watanabe
    • H01L21/28H01L21/285H01L21/60H01L21/768H01L21/8238H01L21/8244H01L27/092H01L27/11H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L27/11H01L21/28518H01L21/76895H01L21/76897H01L27/1104
    • A method of manufacturing a semiconductor device comprising the following steps: forming first, second, and third wiring layers on a semiconductor substrate; forming first, second, and third cover dielectric layers for covering these wiring layers; forming a first impurity diffusion layer of a P type and a second impurity diffusion layer of an N type in an active region, and forming a third impurity diffusion layer of a P type and a fourth impurity diffusion layer cf an N type in an active region; self-alignably forming a first local wiring layer for connecting the first impurity diffusion layer with the second wiring layer, and self-alignably forming a second local wiring layer for connecting the fourth impurity diffusion layer with the third wiring layer; in an interlayer dielectric layer, self-alignably forming a first contact hole by using the first and third cover dielectric layers as masking layers, and self-alignably forming a second contact hole by using the second cover dielectric layer as a masking layer; and forming fourth and fifth wiring layers in these contact holes, respectively.
    • 一种制造半导体器件的方法,包括以下步骤:在半导体衬底上形成第一,第二和第三布线层; 形成用于覆盖这些布线层的第一,第二和第三覆盖电介质层; 在有源区中形成P型和N型的第二杂质扩散层的第一杂质扩散层,在有源区中形成N型的P型和第四杂质扩散层的第三杂质扩散层 ; 自对准地形成用于将第一杂质扩散层与第二布线层连接的第一局部布线层,并自对准地形成用于将第四杂质扩散层与第三布线层连接的第二局部布线层; 在层间电介质层中,通过使用第一和第三覆盖电介质层作为掩蔽层自对准地形成第一接触孔,并且通过使用第二覆盖电介质层作为掩蔽层自对准地形成第二接触孔; 并且在这些接触孔中分别形成第四和第五布线层。
    • 10. 发明授权
    • Thin film transistors and connecting structure for semiconductors and a
method of manufacturing the same
    • 薄膜晶体管和半导体的连接结构及其制造方法
    • US6034432A
    • 2000-03-07
    • US750760
    • 1997-03-10
    • Junichi KarasawaKunio Watanabe
    • Junichi KarasawaKunio Watanabe
    • H01L21/8244H01L27/11H01L23/48H01L23/52H01L29/40
    • H01L27/11H01L27/1108Y10S257/903
    • A metallic layer (10), a thin-film first polycrystalline silicon layer (14), a first contact hole for connecting the metallic layer and first polycrystalline silicon layer, a second polycrystalline silicon layer (18) which becomes an etching stopper layer for the prevention of penetration in the first contact hole area, and a second contact hole which connects the second polycrystalline silicon layer and the first polycrystalline silicon layer are included. P-type impurities are introduced into the first polycrystalline silicon layer, and the second polycrystalline silicon layer is non-doped in the first contact hole area. By a heating step, the P-type impurities in the first polycrystalline silicon layer are diffused to the second polycrystalline silicon layer. The second polycrystalline silicon layer is N-type in a memory cell area. An insulating layer may be formed into a concave shape in the first contact hole area to lower the height of the first polycrystalline silicon layer in the first contact hole area.
    • PCT No.PCT / JP96 / 01047 Sec。 371日期1997年3月10日 102(e)1997年3月10日PCT PCT 1996年4月17日PCT公布。 第WO96 / 33512号公报 日期:1996年10月24日金属层(10),薄膜第一多晶硅层(14),用于连接金属层和第一多晶硅层的第一接触孔,第二多晶硅层(18) 用于防止在第一接触孔区域中穿透的蚀刻阻挡层,以及连接第二多晶硅层和第一多晶硅层的第二接触孔。 P型杂质被引入到第一多晶硅层中,并且第二多晶硅层在第一接触孔区域中未被掺杂。 通过加热步骤,第一多晶硅层中的P型杂质扩散到第二多晶硅层。 第二多晶硅层是存储单元区域中的N型。 绝缘层可以在第一接触孔区域中形成为凹形,以降低第一接触孔区域中的第一多晶硅层的高度。