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1. 发明授权

US08809821B2 Holder device, chamber apparatus, and extreme ultraviolet light generation system 有权
标题翻译：持有器，腔室装置和极紫外光发生系统
公开(公告)号：US08809821B2
公开(公告)日：2014-08-19
申请号：US13620589
申请日：2012-09-14
申请人： Junichi Fujimoto , Hidenobu Kameda , Osamu Wakabayashi , Kouji Ashikawa
发明人： Junichi Fujimoto , Hidenobu Kameda , Osamu Wakabayashi , Kouji Ashikawa
IPC分类号： G02B7/02
CPC分类号： G02B7/02 , G02B7/028 , G02B7/1815 , H05G2/005 , H05G2/008
摘要： A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.
摘要翻译：用于保持光学元件的保持装置包括具有夹持光学元件的第一和第二构件的保持器，以及用于在第二构件和光学元件之间形成密封的密封构件。

2. 发明申请

US20110309270A1 LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES 审中-公开
标题翻译：激光装置，极光紫外线发光装置和用于维持装置的方法
公开(公告)号：US20110309270A1
公开(公告)日：2011-12-22
申请号：US13120998
申请日：2011-02-16
申请人： Yohichi Yamanouchi , Takashi Suganuma , Junichi Fujimoto , Osamu Wakabayashi , Hiroaki Nakarai , Hidenobu Kameda , Hitoshi Oga
发明人： Yohichi Yamanouchi , Takashi Suganuma , Junichi Fujimoto , Osamu Wakabayashi , Hiroaki Nakarai , Hidenobu Kameda , Hitoshi Oga
IPC分类号： G01J3/10 , H01S3/091
CPC分类号： G03F7/70975 , G03F7/70033 , H01S3/0071 , H01S3/03
摘要： Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.
摘要翻译：提供一种激光装置，其安装在预定空间内并在预定的地板区域上，激光装置可包括：主振荡器; 至少一个放大单元，放大从主振荡器输出的激光束; 至少一个电源单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。

3. 发明授权

US08742379B2 Window unit, window device, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：窗单元，窗装置，激光装置和极紫外光发生系统
公开(公告)号：US08742379B2
公开(公告)日：2014-06-03
申请号：US13636038
申请日：2011-07-05
申请人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
发明人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
IPC分类号： H01S3/04
CPC分类号： H01S3/0401 , G02B7/008 , H01S3/005 , H01S3/2316 , H05G2/008 , Y10T137/6851
摘要： A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
摘要翻译：窗口单元可以包括：被配置为允许激光束透过其中的窗口; 以及用于在其周边保持窗口的保持器，所述保持器设置有配置成允许流体流动的内部的流动通道。

4. 发明申请

US20130020499A1 WINDOW UNIT, WINDOW DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权
标题翻译： WINDOW单元，WINDOW设备，激光设备，以及超高亮度发光系统
公开(公告)号：US20130020499A1
公开(公告)日：2013-01-24
申请号：US13636038
申请日：2011-07-05
申请人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
发明人： Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
IPC分类号： G21K5/04 , F16L3/00 , H01S3/13
CPC分类号： H01S3/0401 , G02B7/008 , H01S3/005 , H01S3/2316 , H05G2/008 , Y10T137/6851
摘要： A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
摘要翻译：窗口单元可以包括：被配置为允许激光束透过其中的窗口; 以及用于在其周边保持窗口的保持器，所述保持器设置有配置成允许流体流动的内部的流动通道。

5. 发明申请

US20130020511A1 MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开
标题翻译：镜子，镜子装置，激光装置和极光紫外线发光装置
公开(公告)号：US20130020511A1
公开(公告)日：2013-01-24
申请号：US13638002
申请日：2011-10-07
申请人： Hidenobu Kameda , Osamu Wakabayashi
发明人： Hidenobu Kameda , Osamu Wakabayashi
IPC分类号： G02B7/182 , G21K5/04 , H01S3/04
CPC分类号： G02B7/1815 , G03F7/70033 , G03F7/70891 , G21K1/06 , G21K2201/065
摘要： A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base.
摘要翻译：反射镜包括设置有流动通道的反射镜基座，热介质通过该流动通道用于冷却反射镜。流路包括用于调节流路中的热介质的流量的缓冲罐部。反射膜设在镜底座上。

6. 发明申请

US20110297852A1 MIRROR AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
标题翻译：镜子和极光超紫外光发生系统
公开(公告)号：US20110297852A1
公开(公告)日：2011-12-08
申请号：US13124063
申请日：2011-03-22
申请人： Hidenobu Kameda , Osamu Wakabayashi , Masato Moriya
发明人： Hidenobu Kameda , Osamu Wakabayashi , Masato Moriya
IPC分类号： G21K5/00 , G02B7/192
CPC分类号： G21K1/062 , B82Y10/00 , G02B5/0891 , G03F7/70891 , G03F7/70983 , G21K2201/067
摘要： A mirror is provided which may include: a substrate; a thermal diffusion layer provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.
摘要翻译：提供了一种可以包括：基底的反射镜; 设置在所述基板的主表面上的热扩散层，所述热扩散层具有比所述基板更高的热导率; 以及设置在所述热扩散层上的反射层，所述反射层具有比所述热扩散层低的热导率。

7. 发明申请

US20100294473A1 Tube for heat exchanger and method for manufacturing the same 审中-公开
标题翻译：热交换器用管及其制造方法
公开(公告)号：US20100294473A1
公开(公告)日：2010-11-25
申请号：US12311863
申请日：2007-10-17
申请人： Hidenobu Kameda , Hiroyuki Yoshida
发明人： Hidenobu Kameda , Hiroyuki Yoshida
IPC分类号： F28F1/20 , B23P15/26
CPC分类号： F28D1/05383 , B21D53/04 , F25B39/00 , F28F1/022 , F28F1/128 , F28F1/34 , Y10T29/49378
摘要： A tube for a heat exchanger includes a tube main body (10) with a long plate shape in an extrusion direction and formed with a plurality of fluid paths (1a) through which a fluid for heat exchange flows internally along the extrusion direction, a plurality of concave parts formed with intervals in a pressing direction in which either an upper surface part (1c) of the tube, that is, a surface of one side in a thickness direction of the tube main body (10) or a lower surface part (1d) of the tube, that is, a surface of a reverse direction to the upper surface part (1c) is pressed in the direction, convex parts (1b) projected in a direction that narrows a cross sectional area of the fluid paths (1a) are formed by the pressed concave parts in the fluid path (1a).
摘要翻译：一种用于热交换器的管包括沿挤出方向具有长板形的管主体（10），并且形成有多个流体通道（1a），用于热交换的流体沿着挤出方向在内部流动，多个形成有按压方向间隔的凹部，其中，管的上表面部分（1c），即管主体（10）的厚度方向上的一侧的表面或下表面部分（ 1d的方向，沿着使上述流体路径（1a）的横截面积变窄的方向突出的凸部（1b）被按压，）由流体路径（1a）中的压缩凹部形成。

8. 发明申请

US20050082048A1 Heat exchanger 失效
标题翻译：热交换器
公开(公告)号：US20050082048A1
公开(公告)日：2005-04-21
申请号：US10916680
申请日：2004-08-11
申请人： Kazue Yoshida , Hidenobu Kameda
发明人： Kazue Yoshida , Hidenobu Kameda
IPC分类号： B60H1/32 , F25B39/02 , F28D9/00 , F28F3/02 , F28F3/08 , F28D7/02
CPC分类号： F28F3/027 , F28D9/005
摘要： A heat exchanger includes a plurality of plate-shaped heat exchanger units and a plurality of flat fins arranged on the units, respectively. Each of the units has a first planar fluid communication chamber for receiving the flat fin. The flat fin has a first end provided with a first recess and a second end opposing to the first end and provided with a second recess. The first recess includes a circular opening and a cutout part. The second recess includes a circular opening and a cutout part. A clearance is defined between an edge of the first end and an inner periphery of the chamber, while another clearance is defined between an edge of the second end and the inner periphery. Consequently, a fluid can flow along the edge of the first end after being introduced into the first planar fluid communication chamber through the first recess.
摘要翻译：热交换器包括分别布置在所述单元上的多个板状热交换器单元和多个扁平翅片。每个单元具有用于接收扁平翅片的第一平面流体连通室。扁平翅片具有设置有第一凹部的第一端和与第一端相对的第二端，并且设置有第二凹部。第一凹部包括圆形开口和切口部分。第二凹部包括圆形开口和切口部。在第一端的边缘和室的内周边之间限定间隙，而在第二端的边缘和内周之间限定另一间隙。因此，流体可以在通过第一凹槽引入第一平面流体连通腔室之后沿着第一端的边缘流动。

9. 发明授权

US08742378B2 Target supply unit 有权
标题翻译：目标供应单位
公开(公告)号：US08742378B2
公开(公告)日：2014-06-03
申请号：US13401389
申请日：2012-02-21
申请人： Hidenobu Kameda , Hakaru Mizoguchi
发明人： Hidenobu Kameda , Hakaru Mizoguchi
IPC分类号： H05G2/00
CPC分类号： G03F7/70025
摘要： A target supply unit may include: a reservoir for storing a target material; a heater provided inside the reservoir for heating the target material stored in the reservoir; a heater power supply for supplying current to the heater; and a target outlet for outputting the target material stored inside the reservoir.
摘要翻译：目标供应单元可以包括：用于存储目标材料的储存器; 设置在所述储存器内的用于加热存储在所述储存器中的所述目标材料的加热用于向加热器供应电流的加热器电源; 以及用于输出存储在储存器内的目标材料的目标出口。

10. 发明授权

US07121331B2 Heat exchanger 失效
标题翻译：热交换器
公开(公告)号：US07121331B2
公开(公告)日：2006-10-17
申请号：US10916680
申请日：2004-08-11
申请人： Kazue Yoshida , Hidenobu Kameda
发明人： Kazue Yoshida , Hidenobu Kameda
IPC分类号： F28F3/00 , F28F13/12
CPC分类号： F28F3/027 , F28D9/005
摘要： A heat exchanger includes a plurality of plate-shaped heat exchanger units and a plurality of flat fins arranged on the units, respectively. Each of the units has a first planar fluid communication chamber for receiving the flat fin. The flat fin has a first end provided with a first recess and a second end opposing to the first end and provided with a second recess. The first recess includes a circular opening and a cutout part. The second recess includes a circular opening and a cutout part. A clearance is defined between an edge of the first end and an inner periphery of the chamber, while another clearance is defined between an edge of the second end and the inner periphery. Consequently, a fluid can flow along the edge of the first end after being introduced into the first planar fluid communication chamber through the first recess.
摘要翻译：热交换器包括分别布置在所述单元上的多个板状热交换器单元和多个扁平翅片。每个单元具有用于接收扁平翅片的第一平面流体连通室。扁平翅片具有设置有第一凹部的第一端和与第一端相对的第二端，并且设置有第二凹部。第一凹部包括圆形开口和切口部分。第二凹部包括圆形开口和切口部。在第一端的边缘和室的内周边之间限定间隙，而在第二端的边缘和内周之间限定另一间隙。因此，流体可以在通过第一凹槽引入第一平面流体连通腔室之后沿着第一端的边缘流动。

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