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    • 9. 发明授权
    • Resistance variable memory device and method of fabricating the same
    • 电阻可变存储器件及其制造方法
    • US08168479B2
    • 2012-05-01
    • US12717219
    • 2010-03-04
    • Daewon Ha
    • Daewon Ha
    • H01L21/82
    • G11C13/0004G11C2213/72H01L27/2409H01L27/2472H01L45/06H01L45/1233H01L45/126H01L45/144
    • A method of fabricating a resistance variable device includes forming selection devices on a substrate, forming a conductive layer on the selection devices, patterning the conductive layer in a first direction to form conductive patterns spaced apart from each other in the first direction and connecting a pair of adjacent selection devices to each other in the first direction, forming a resistance-variable-material-layer on the conductive patterns, and patterning the resistance-variable-material-layer and the conductive patterns in a second direction to form rows of resistance-variable material extending in the second direction and to form electrodes spaced apart from one another, such that each electrode corresponds to a separate selection device.
    • 一种制造电阻可变器件的方法包括在衬底上形成选择器件,在选择器件上形成导电层,在第一方向上形成导电层,以形成在第一方向上彼此间隔的导电图案,并将一对 在第一方向上彼此相邻的选择装置,在导电图案上形成电阻可变材料层,并且在第二方向上对电阻变化材料层和导电图案进行图案化以形成电阻 - 可变材料在第二方向上延伸并且形成彼此间隔开的电极,使得每个电极对应于单独的选择装置。