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    • 6. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20160163877A1
    • 2016-06-09
    • US14953769
    • 2015-11-30
    • Jae-Yup ChungHee-Soo KangHee-Don JeongSe-Wan Park
    • Jae-Yup ChungHee-Soo KangHee-Don JeongSe-Wan Park
    • H01L29/786
    • H01L29/7848H01L27/0886H01L29/785
    • A semiconductor device includes a first multi-channel active pattern, a field insulation layer disposed on the first multi-channel active pattern and including a first region and a second region, the first region having a top surface protruding from a top surface of the second region to a top surface of the first multi-channel active pattern, a first gate electrode crossing the first multi-channel active pattern, the first gate electrode being disposed on the field insulation layer, and a first source or drain disposed between the first gate electrode and the first region of the field insulation layer and including a first facet, the first facet being disposed adjacent to the first region of the field insulation layer at a point lower than the top surface of the first multi-channel active pattern.
    • 半导体器件包括第一多通道有源图案,设置在第一多通道有源图案上并包括第一区域和第二区域的场绝缘层,第一区域具有从第二多通道有源图案的顶表面突出的顶表面 区域到第一多通道有源图案的顶表面,与第一多通道有源图案交叉的第一栅电极,设置在场绝缘层上的第一栅极电极和设置在第一栅极之间的第一栅极或漏极 电极和场绝缘层的第一区域并且包括第一小面,第一面在比第一多通道活性图案的顶表面低的点处邻近场绝缘层的第一区域设置。