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    • 10. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08850888B2
    • 2014-10-07
    • US13409039
    • 2012-02-29
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • G01C19/56G01P15/09
    • G01C19/56G01P15/09G01P15/14G01P2015/084
    • Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括:膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140,以便垂直地与质量体120的驱动方向相遇。 通过这种构造,通过在压电体130的厚度方向上收缩形成沟槽,以提供方向性,同时保持压电体130的刚性,以防止波在不必要的方向上传播,从而驱动惯性传感器100 在所需的特定方向。