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1. 发明专利

JP2009179885A Amorphous carbon film forming apparatus 有权
标题翻译：非晶碳膜成型设备
公开(公告)号：JP2009179885A
公开(公告)日：2009-08-13
申请号：JP2009123347
申请日：2009-05-21
申请人： Jtekt Corp , Nippon Denshi Kogyo Kk , Toyota Central R&D Labs Inc , 日本電子工業株式会社 , 株式会社ジェイテクト , 株式会社豊田中央研究所
发明人： ANDO JUNJI , SAKAI NAOYUKI , SAITO TOSHIYUKI , NAKANISHI KAZUYUKI , MORI HIROYUKI , TACHIKAWA HIDEO , ITO KYOJI , FUJIOKA MIKIO , FUNAKI YOSHIYUKI
IPC分类号： C23C16/509 , C23C16/26 , C23C16/44 , C23C16/455 , C23C16/458
CPC分类号： C23C16/4583 , C23C16/272 , C23C16/277 , C23C16/45563 , C23C16/45578 , C23C16/4587 , C23C16/509 , C23C16/52 , F16D13/64 , F16D2250/0046 , H01J37/3244 , H01J37/32779
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of forming amorphous carbon films at a low cost.
SOLUTION: An amorphous carbon film forming apparatus is characterized by being provided with a film forming furnace 11; a plurality of workpiece fixtures 23 for supporting a plurality of plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plurality of workpiece fixtures 23 being annularly arranged within the furnace chamber of the film forming furnace 11 at equal intervals and being connected to a negative electrode; nozzles 31, 32 provided for supplying a supply gas, one or more of which are disposed in the centers of the annularly disposed workpiece fixtures 23, the rest being annularly disposed at equal intervals on the centrifugal side; and a plasma power supply 16 connected to at least the workpiece fixture 23. Since the plurality of plate-like workpieces are vertically supported in a piled-up state to the workpiece fixtures, a film forming area remarkably increases. Further, the ununiformity of a film distribution and a film composition distribution is suppressed, and uniform film forming can be performed to all the plate-like workpieces.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够以低成本形成无定形碳膜的技术。解决方案：无定形碳膜形成装置的特征在于设置有成膜炉11; 多个工件固定件23用于支撑多个板状工件22，其状态与垂直于板状工件22的两个垂直相邻的相对表面之间的间隔垂直堆叠，处于一定范围内 2〜30毫米，多个工件固定件23以相等的间隔环形地布置在成膜炉11的炉室内并连接到负极; 用于供应供气的喷嘴31,32，其一个或多个设置在环形设置的工件固定件23的中心，其余部分以相等的间隔环形设置在离心侧; 以及与至少工件夹具23连接的等离子体电源16.由于多个板状工件以堆叠状态垂直地支撑在工件夹具上，所以成膜区域显着增加。此外，膜分布和膜组成分布的不均匀性被抑制，并且可以对所有的板状工件进行均匀的成膜。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2012001789A Method and apparatus for depositing film 有权
标题翻译：沉积膜的方法和装置
公开(公告)号：JP2012001789A
公开(公告)日：2012-01-05
申请号：JP2010139602
申请日：2010-06-18
申请人： Nippon Denshi Kogyo Kk , Toyota Central R&D Labs Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 日本電子工業株式会社 , 株式会社豊田中央研究所
发明人： NAKANISHI KAZUYUKI , IZEKI TAKASHI , OZAWA YASUHIRO , YAMADA YUKA , MIZUNO SEIJI , SATO KATSUMI , KOIZUMI MASAFUMI , FUNAKI YOSHIYUKI , KONDO KYOJI , KIKUCHI TAKAYUKI
IPC分类号： C23C16/54 , C23C16/50
CPC分类号： C23C16/26 , C23C16/503 , C23C16/545
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for depositing a film which achieve uniform film deposition and an increase in an area where the film is deposited, and achieve simultaneous film deposition on the entire surface of a substrate.SOLUTION: The method for depositing a film adopts plasma-enhanced CVD (Chemical Vapor Deposition) using the apparatus for depositing a film which includes a film depositing furnace 1, a pair of rotary electrode reels 2 comprising a feed-out reel 21 and a take-up reel 22, a plasma source 3, a material gas supplying means 4, and an exhausting means 5. The method includes: applying a negative voltage to the rotary electrode reels 2 from the plasma source 3 while a conductive substrate 6 is fed out from the feed-out reel 21 and is wound on the take-up reel 22 so that the entire surface of the substrate portion 63 between reels contacts the material gas, whereby plasma sheath P is formed along the surface of the substrate portion 63 between reels; and activating the material gas in the plasma sheath P and thus contacting the surface of the substrate, thus depositing the film on the surface of the substrate.
摘要翻译：要解决的问题：提供一种沉积膜的方法和装置，其实现均匀的膜沉积和膜的沉积面积的增加，并且在基板的整个表面上实现同时的膜沉积。解决方案：用于沉积薄膜的方法采用等离子体增强CVD（化学气相沉积），其使用沉积薄膜的装置，该装置包括薄膜沉积炉1，一对旋转电极卷轴2，包括一个馈送卷轴21 卷取卷轴22，等离子体源3，原料气体供给装置4以及排出装置5.该方法包括：从等离子体源3向旋转电极卷轴2施加负电压，同时导电基板6 从送出卷轴21送出，卷绕在收带卷轴22上，使得卷轴与材料气体接触的基板部63的整个表面，沿着基板部的表面形成等离子体护套卷轴之间63; 并激活等离子体鞘P中的原料气体，从而接触衬底表面，从而将膜沉积在衬底的表面上。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2006283134A Amorphous carbon film deposition method 有权
标题翻译：非晶碳膜沉积法
公开(公告)号：JP2006283134A
公开(公告)日：2006-10-19
申请号：JP2005105005
申请日：2005-03-31
申请人： Jtekt Corp , Nippon Denshi Kogyo Kk , Toyota Central Res & Dev Lab Inc , 日本電子工業株式会社 , 株式会社ジェイテクト , 株式会社豊田中央研究所
发明人： ANDO JUNJI , SAKAI NAOYUKI , SAKAI TOSHIBUMI , SAITO TOSHIYUKI , FUKAMI HAJIME , NAKANISHI KAZUYUKI , MORI HIROYUKI , TACHIKAWA HIDEO , KONDO KYOJI , FUJIOKA MIKIO , FUNAKI YOSHIYUKI
IPC分类号： C23C16/26 , F16D13/62 , F16D69/00
摘要： PROBLEM TO BE SOLVED: To provide a film deposition method by which satisfactory amorphous carbon films can be deposited using a DC plasma CVD process by suppressing the occurrence of sooting.
SOLUTION: The amorphous carbon film deposition method is provided by which each amorphous carbon film is deposited on a plurality of electrically conductive works by a DC plasma CVD process, wherein the plurality of works are fixed to a work fixing tool in such a manner that the spacing between the confronted faces in the confronted surfaces of the adjoining two works reaches 5 to 40 mm, the work fixing tool being arranged inside a film deposition furnace and connected to a minus pole, and wherein treatment gas is fed in such a manner that the amount of Si to be fed per unit film deposition time and unit film deposition area reaches ≥0.0006 mol×h
-1 ×m
-2 , and the film deposition is performed.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过抑制烟灰的发生使用DC等离子体CVD工艺可以沉积令人满意的无定形碳膜的成膜方法。解决方案：提供通过DC等离子体CVD工艺将每个非晶碳膜沉积在多个导电工件上的非晶碳膜沉积方法，其中多个工件固定到这样的工件固定工具中相邻的两个工件的相对表面中的面对面之间的间隔达到5至40mm的方式，工件固定工具布置在成膜炉内并连接到负极，并且其中处理气体被供给到每单位成膜时间和单位膜沉积面积供给的Si的量达到≥0.0006mol×h -1 ×m -2 ，并且膜沉积被执行。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2014098214A Method of producing amorphous carbon coating film member 有权
标题翻译：生产非晶碳涂层薄膜的方法
公开(公告)号：JP2014098214A
公开(公告)日：2014-05-29
申请号：JP2014006396
申请日：2014-01-17
申请人： Jtekt Corp , 株式会社ジェイテクト , Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： SAITO TOSHIYUKI , ANDO JUNJI , NAKANISHI KAZUYUKI , MORI HIROYUKI , TACHIKAWA HIDEO
IPC分类号： C23C16/27 , C23C16/02 , C23C16/503 , C23C16/52
CPC分类号： C23C16/26 , C23C16/029 , Y10T428/265 , Y10T428/30
摘要： PROBLEM TO BE SOLVED: To provide an amorphous carbon coating film member combining excellent wear resistance and low counterpart aggressiveness.SOLUTION: An amorphous carbon coating film consists of a conductive substrate and an amorphous carbon coating film fixed to at least a part of the surface of the substrate, the amorphous carbon coating film is based on carbon and is a gradient composition coating film containing silicon whose concentration is continuously gradient in such a manner that the concentration silicon is highest on the substrate side and hydrogen whose concentration is continuously gradient in such a manner that the concentration of hydrogen is lowest on the substrate side. Since the amorphous carbon coating film is a gradient composition coating film containing silicon whose concentration is continuously gradient in such a manner that the concentration of silicon is highest on the substrate side, the substrate side has high hardness, securing strength of the amorphous carbon coating film. In addition, since the amorphous carbon coating film is a gradient composition coating film containing hydrogen whose concentration is continuously gradient in such a manner that the concentration of hydrogen is lowest on the substrate side, the hardness of the amorphous carbon coating film is low on the front surface side, resulting in reduction of counterpart aggressiveness.
摘要翻译：要解决的问题：提供一种具有优异的耐磨性和低对应物侵蚀性的无定形碳涂膜构件。解决方案：无定形碳涂膜由导电基材和固定在表面的至少一部分的无定形碳涂层基体，无定形碳涂膜基于碳，是含有浓度连续梯度的硅的梯度组合物涂膜，其浓度硅在基板侧最高，浓度为浓度连续梯度的氢氢的浓度在衬底侧最低的方式。由于无定形碳涂膜是含有浓度连续梯度的硅的梯度组合物涂膜，因此在基板侧硅的浓度最高，基板侧具有高硬度，确保无定形碳涂膜的强度。此外，由于无定形碳涂膜是含有氢的梯度组合物涂膜，其浓度以基板侧的氢浓度最低的浓度连续梯度，因此无定形碳涂膜的硬度低前表面侧，导致对应的侵蚀性降低。

5. 发明专利

JP2004263292A Method and apparatus for depositing amorphous carbon film 有权
公开(公告)号：JP2004263292A
公开(公告)日：2004-09-24
申请号：JP2003379077
申请日：2003-11-07
申请人： Nippon Denshi Kogyo Kk , Toyoda Mach Works Ltd , Toyota Central Res & Dev Lab Inc , 日本電子工業株式会社 , 株式会社豊田中央研究所 , 豊田工機株式会社
发明人： ANDO JUNJI , SAKAI NAOYUKI , SAITO TOSHIYUKI , NAKANISHI KAZUYUKI , MORI HIROYUKI , TACHIKAWA HIDEO , ITO KYOJI , FUJIOKA MIKIO , FUNAKI YOSHIYUKI
IPC分类号： F16D13/62 , C23C16/26 , C23C16/50
摘要： PROBLEM TO BE SOLVED: To provide a technique for efficiently forming an amorphous carbon film at a low cost. SOLUTION: This apparatus for forming the amorphous carbon film is characteristically provided with a deposition furnace 11, plurality of work fixing tools 23, which hold plurality of the platy works 22 in a layered state in the vertical direction in the range of 2-30 mm interval between the facing surfaces of the abutted two platy works 22 at parallel in the vertical direction and are disposed like a ring at the equal interval in the furnace chamber of the deposition furnace 11 and energized as a negative electrode, nozzles 31, 32 which are constituted of the plurality pieces disposed in one or more and as the ring-state in the equal interval at a centrifugal direction side at the center of the work fixing tools 23 disposed like the ring, and a plasma electric source 16 connected to at least the work fixing tools 23. The supplied gas pressure, ranges 13-1330 Pa and the plasma electric source is operated so that a sheath width becomes 2-30 mm and thus, the stable discharge can be obtained. COPYRIGHT: (C)2004,JPO&NCIPI

6. 发明专利

JP2011151015A Separator for fuel cell and method of manufacturing the same 有权
标题翻译：用于燃料电池的分离器及其制造方法
公开(公告)号：JP2011151015A
公开(公告)日：2011-08-04
申请号：JP2010288502
申请日：2010-12-24
申请人： Toyota Central R&D Labs Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人： IZEKI TAKASHI , NAKANISHI KAZUYUKI , OZAWA YASUHIRO , YAMADA YUKA , HASEGAWA HAJIME , KOIZUMI MASAFUMI , FUJISAWA KATSUTOSHI , UEDA NAOKI , KUNO HIROHIKO
IPC分类号： H01M8/02 , C23C16/26 , C23C24/08 , H01M8/10
CPC分类号： C01B31/02 , B82Y30/00 , C01B32/05 , H01M8/021 , H01M8/0228 , H01M8/0234 , Y02P70/56
摘要： PROBLEM TO BE SOLVED: To provide a separator for a fuel cell having high conductivity and high corrosion resistance even under a condition conformed to an actually using environment of the fuel cell, and to provide a method of manufacturing the same.
SOLUTION: The separator 40 for the fuel cell includes: a substrate 41 formed of stainless steel; an oriented amorphous carbon film 42 formed on at least the surface facing an electrode of the substrate mainly formed of C, containing 3-20 atom% of N more than 0 to 20 atom% of H, 70 to less than 100 atom% of carbon having an sp
2 hybrid orbital (Csp
2 ) when the total content of C is 100 atom%, and in which the (002) plane of graphite is oriented in the thickness direction; a mixture layer 43 formed at an interface between the substrate and the oriented amorphous carbon film and containing one or more kinds of respective constituent atoms of the substrate and the oriented amorphous carbon film; and a plurality of projections 44 protruding from the mixture layer into the oriented amorphous carbon film and having an average length of 10-150 nm.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：即使在符合燃料电池的实际使用环境的条件下，也提供具有高导电性和高耐腐蚀性的燃料电池用隔膜，并提供其制造方法。解决方案：用于燃料电池的分离器40包括：由不锈钢形成的基底41; 至少形成在面向主要由C形成的基板的电极的表面上的取向非晶碳膜42，其含有3-20原子％的N为0至20原子％的H，70至小于100原子％的碳当C的总含量为100原子％时，具有sp 2 混合轨道（Csp 2 ），并且其中石墨的（002）面取向为厚度方向; 在基板和取向非晶碳膜之间的界面处形成并含有基板和取向非晶碳膜的一种或多种各自的组成原子的混合层43; 以及从混合层突出到定向非晶碳膜中并具有10-150nm平均长度的多个突起44。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2010248570A Titanium-based material and fuel cell separator 有权
标题翻译：基于钛的材料和燃料电池分离器
公开(公告)号：JP2010248570A
公开(公告)日：2010-11-04
申请号：JP2009099094
申请日：2009-04-15
申请人： Toyota Central R&D Labs Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人： MAEDA KURATO , IZEKI TAKASHI , YAMADA YUKA , NAKANISHI KAZUYUKI
IPC分类号： C23C28/04 , H01M8/02
CPC分类号： H01M8/0206 , C22F1/00 , C22F1/008 , C22F1/18 , C22F1/183 , C23C8/44 , C23C8/80 , C23C16/0272 , C23C16/26 , C23C28/042 , H01M8/0213 , H01M8/0228 , H01M2008/1095 , Y02P70/56 , Y10T428/265 , Y10T428/31678
摘要： PROBLEM TO BE SOLVED: To provide a titanium-based material for inexpensively forming a carbon film with high adhesion strength, and to provide a method for producing the material. SOLUTION: The method of producing a titanium-based material includes a step of: forming a rolling-altered layer 12 that includes titanium carbide on a surface of the base material 11 by rolling a titanium base material 11 via rolling oil that includes carbon; and depositing a carbon film on the surface on which the rolling-altered layer has been formed. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于低成本地形成具有高粘合强度的碳膜的钛基材料，并提供一种生产该材料的方法。解决方案：钛基材料的制造方法包括以下步骤：通过轧制油轧制钛基材11，在基材11的表面上形成包含碳化钛的轧制变更层12，碳; 以及在已经形成有滚动变化层的表面上沉积碳膜。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2010031327A Hard amorphous carbon coated member and manufacturing method thereof 有权
标题翻译：硬质不饱和碳涂层成员及其制造方法
公开(公告)号：JP2010031327A
公开(公告)日：2010-02-12
申请号：JP2008195841
申请日：2008-07-30
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： MORI HIROYUKI , NAKANISHI KAZUYUKI , MATSUI MUNEHISA , IGARASHI SHINTARO
IPC分类号： C23C16/27 , F16C33/12
摘要： PROBLEM TO BE SOLVED: To provide a hard amorphous carbon coated member having a novel configuration excellent in adhesion to a rigid amorphous carbon film and a base material. SOLUTION: The hard amorphous carbon coated member is provided with the base material, an intermediate layer containing molybdenum and/or titanium formed on the surface of the base material, and a hard amorphous carbon film formed on the surface of the intermediate layer. In at least the interface between the intermediate layer and the hard amorphous carbon film, the intermediate layer contains oxygen and carbon and the hard amorphous carbon film contains silicon. The production of the hard amorphous carbon coated member is facilitated by forming an oxygen-containing metal layer containing molybdenum and/or titanium on the surface of the base material and containing oxygene in at least a surface region, and depositing carbon and silicon on the surface of the oxygen-containing metal layer to form the hard amorphous carbon film contained with silicon and causing the carbon to diffuse from the surface. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供具有对刚性无定形碳膜和基材的粘附性优异的新型构型的硬质无定形碳涂层构件。解决方案：硬质无定形碳涂层构件设置有基材，在基材表面上形成有钼和/或钛的中间层，以及形成在中间层的表面上的硬质无定形碳膜。至少在中间层和硬质无定形碳膜之间的界面中，中间层含有氧和碳，硬的非晶碳膜含有硅。通过在基材的表面上形成含有钼和/或钛的含氧金属层并在至少一个表面区域中含有氧基，并且在表面上沉积碳和硅来促进硬的无定形碳涂覆部件的生产的含氧金属层，以形成含有硅的硬质无定形碳膜，并使碳从表面扩散。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2008232877A Material for biomolecule immobilization, solid phase to which biomolecule is immobilized, and its manufacturing method 审中-公开
标题翻译：用于生物分子固定的材料，生物分子固定的固相及其制造方法
公开(公告)号：JP2008232877A
公开(公告)日：2008-10-02
申请号：JP2007073984
申请日：2007-03-22
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： MORI HIROYUKI , HOSHINO FUMIHIKO , NAKANISHI KAZUYUKI , WATANABE OSAMU
IPC分类号： G01N33/551 , C07K17/14 , G01N33/53 , G01N33/543 , G01N33/566
摘要： PROBLEM TO BE SOLVED: To provide a material for biomolecules immobilization having stable immobilizing power. SOLUTION: Silicon is made contained in a carbonaceous film to develop immobilizing power to biomolecules. In other words, the immobilizing power of the material for immobilization is made derived not from chemical modification but from the structure of the carbonaceous film itself. COPYRIGHT: (C)2009,JPO&INPIT

10. 发明专利

JP2013117059A Device and method for estimating temperature distribution and simulation device 有权
标题翻译：用于估计温度分布和模拟装置的装置和方法
公开(公告)号：JP2013117059A
公开(公告)日：2013-06-13
申请号：JP2011266026
申请日：2011-12-05
申请人： Toyota Motor Corp , トヨタ自動車株式会社 , Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： TOMIYASU JOJI , IDA ATSUMI , KOIZUMI MASAFUMI , NAKANISHI KAZUYUKI , IZEKI TAKASHI
IPC分类号： C23C16/02 , C23C14/02 , C23C16/46 , C23C16/52 , H05H1/00 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of estimating temperature distribution caused by heat generation of an object due to ion collision.SOLUTION: The device for estimating temperature distribution is provided, which estimates temperature distribution in a predetermined region based on heat generation of an object in ion gas, wherein electric potential, ion velocity, and ion density in the predetermined region are obtained, and based on these obtained values, the number of colliding ions which exist in the predetermined region and collide against the object per unit of time, collision energy which is given to the object when one ion collides against the object, and collision frequency which shows how often the ions existing in the predetermined region collide against the object per unit of time are calculated. Based on the calculated number of colliding ions, collision energy, and collision frequency, distribution of the amount of heat generation of the object due to the ion collision is calculated, the temperature distribution in the predetermined region is calculated based on the distribution of amount of heat generation, and the calculated temperature distribution is outputted to the outside.
摘要翻译：要解决的问题：提供一种能够估计由于离子碰撞导致的物体的发热引起的温度分布的技术。提供了一种用于估计温度分布的装置，其基于离子气体中的物体的发热来估计预定区域中的温度分布，其中获得了预定区域中的电位，离子速度和离子密度，并且基于这些获得的值，存在于预定区域中并且每单位时间碰撞物体的碰撞离子的数量，当一个离子与物体碰撞时给予物体的碰撞能量以及显示如何通常计算存在于预定区域中的离子与单位时间内的物体相撞。根据计算出的撞击离子数量，碰撞能量和碰撞频率，计算出由于离子碰撞导致的物体的发热量的分布，基于该离子碰撞的量的分布，计算预定区域内的温度分布产生热量，将计算出的温度分布输出到外部。版权所有（C）2013，JPO＆INPIT

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