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    • 3. 发明授权
    • Catadioptric lens barrel structure
    • 反射折射镜镜筒结构
    • US06549347B1
    • 2003-04-15
    • US09636066
    • 2000-08-10
    • Marc Spinali
    • Marc Spinali
    • G02B702
    • G02B17/0892G02B17/08G03F7/70225
    • A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels. Each of the lens barrels has an optical axis. The optical axes run parallel to each other. The lens barrel structure also includes a third lens barrel transversely connecting the first lens barrel to the second lens barrel. A reticle is placed in front of an entrance end of the first lens barrels and a wafer is placed in front of an exit end of the second lens barrel. Each lens barrel has a center plane perpendicular to the corresponding optical axis at a position half-way along the length of the corresponding lens barrel. A lens barrel support structure firmly secures the plurality of lens barrels. The lens barrel support structure is made of a material having a low coefficient of thermal expansion. The support structure includes first and second support platforms to support the first and second lens barrels, respectively, near the corresponding center planes to minimize errors due to temperature changes, vibrational motion, or other external forces.
    • 用于投影曝光装置的反射折射透镜镜筒结构包括第一和第二透镜筒。 每个镜筒都具有光轴。 光轴相互平行。 透镜镜筒结构还包括将第一透镜镜筒横向连接到第二透镜镜筒的第三镜筒。 将标线放置在第一透镜筒的入口端的前方,并且将晶片放置在第二透镜筒的出口端的前方。 每个透镜镜筒具有垂直于相应光轴的中心平面,位于相应镜筒长度的一半位置处。 透镜筒支撑结构牢固地固定多个透镜筒。 镜筒支撑结构由具有低热膨胀系数的材料制成。 支撑结构包括第一和第二支撑平台,用于分别在相应的中心平面附近支撑第一和第二透镜筒,以最小化由于温度变化,振动运动或其它外力引起的误差。
    • 4. 发明申请
    • Drive Mechanism for Articulation of a Surgical Instrument
    • 外科手术器械的驱动机制
    • US20110213363A1
    • 2011-09-01
    • US12714183
    • 2010-02-26
    • James S. CunninghamRichard CarlsonMarc Spinali
    • James S. CunninghamRichard CarlsonMarc Spinali
    • A61B18/14
    • A61B18/1445A61B2017/003A61B2017/00314A61B2017/00327A61B2017/2908A61B2017/2923A61B2017/2927A61B2018/1432
    • A surgical instrument includes a housing, an end effector and an elongated shaft extending therebetween. The shaft includes a distal portion movable between aligned and articulated configurations. First and second drive cables are coupled to the distal portion such that reciprocal longitudinal motion of the drive cables induces movement of the distal portion between the aligned and articulated configurations. An articulation drive mechanism is operable to induce reciprocal longitudinal motion of the drive cables. The drive mechanism includes an actuator and a pair pulleys operatively coupled to the actuator to rotate about an axle. The first and second drive cables are coupled to the pulleys such that the drive cables extend on opposite lateral sides of the axle. A biasing mechanism is configured to bias the first and second pulleys to at least one discrete orientation to maintain the distal portion of the elongated shaft in a discrete articulated position.
    • 手术器械包括壳体,端部执行器和在其间延伸的细长轴。 轴包括可在对准和铰接构型之间移动的远端部分。 第一和第二驱动电缆耦合到远端部分,使得驱动电缆的往复纵向运动引起远侧部分在对准和铰接构型之间的移动。 铰接驱动机构可操作以引起驱动电缆的往复纵向运动。 驱动机构包括致动器和可操作地联接到致动器以绕轴旋转的一对滑轮。 第一和第二驱动电缆联接到滑轮,使得驱动电缆在轴的相对侧面上延伸。 偏置机构构造成将第一和第二滑轮偏置到至少一个离散取向,以将细长轴的远端部分保持在离散的铰接位置。
    • 5. 发明授权
    • Optical assembly for an exposure apparatus
    • 用于曝光设备的光学组件
    • US06496246B1
    • 2002-12-17
    • US09526046
    • 2000-03-15
    • Marc Spinali
    • Marc Spinali
    • G03B2754
    • G03F7/70808G03F7/70241G03F7/70833G03F7/70883G03F7/70933
    • A optical assembly (10) for directing and/or focusing a beam of light energy (11) for an exposure apparatus (28) is provided herein. The optical assembly (10) includes one or more optical sections (12) which are assembled together. At least one of the optical sections (12) includes an optical housing (14) having an inner wall (15) which defines a optical chamber (16). One or more optical elements (18) can be secured to the optical housing (14) of each optical section (12). Additionally, each optical section (12) can include a plurality of outlet ports (20) and a plurality of inlet ports (22) for purging the optical chamber (16). The inlet ports (22) and the outlet ports (20) are uniquely positioned to minimize the time required to purge the optical assembly (10) and the amount of replacement fluid (24) used to purge the optical assembly (10).
    • 本文提供了用于引导和/或聚焦用于曝光设备(28)的光能束(11)的光学组件(10)。 光学组件(10)包括组装在一起的一个或多个光学部分(12)。 光学部分(12)中的至少一个包括具有限定光学室(16)的内壁(15)的光学壳体(14)。 一个或多个光学元件(18)可以固定到每个光学部分(12)的光学壳体(14)。 另外,每个光学部分(12)可以包括多个出口(20)和用于清洗光学室(16)的多个入口(22)。 入口端口(22)和出口端口(20)被独特地定位成使得清洗光学组件(10)所需的时间和用于清洗光学组件(10)的更换流体(24)的量最小化。
    • 6. 发明申请
    • Drive Mechanism for Articulation of a Surgical Instrument
    • 外科手术器械的驱动机制
    • US20110213362A1
    • 2011-09-01
    • US12714166
    • 2010-02-26
    • James S. CunninghamEric JonesMarc Spinali
    • James S. CunninghamEric JonesMarc Spinali
    • A61B18/14
    • A61B18/1445A61B34/71A61B2018/00345A61B2018/00404A61B2018/00619A61B2018/1861A61B2034/305
    • A surgical instrument includes a housing, an end effector and an elongated shaft extending therebetween. The elongated shaft includes a distal portion that is movable between aligned and articulated configurations. A pair of drive cables extends through the elongated shaft and is coupled to the distal portion such that reciprocal longitudinal motion of the drive cables induces movement of the distal portion between the aligned and articulated configurations. An articulation drive mechanism is operable to induce reciprocal longitudinal motion of the drive cables. The drive mechanism includes an actuator and a pair of torsion members that are rotatable about two distinct axes in response to movement of the actuator. A respective follower is operatively coupled to each torsion member to translate in a respective longitudinal direction in response to rotation of the torsion members, and each follower is coupled to a respective drive cable to impart translational motion thereto.
    • 手术器械包括壳体,端部执行器和在其间延伸的细长轴。 细长轴包括可在对准和铰接构型之间移动的远侧部分。 一对驱动电缆延伸穿过细长轴并且联接到远端部分,使得驱动电缆的往复纵向运动引起远侧部分在对准和铰接构型之间的运动。 铰接驱动机构可操作以引起驱动电缆的往复纵向运动。 驱动机构包括致动器和一对扭转构件,其可响应于致动器的移动而围绕两个不同的轴线旋转。 相应的从动件可操作地联接到每个扭转构件以响应于扭转构件的旋转在相应的纵向方向上平移,并且每个从动件联接到相应的驱动电缆以向其施加平移运动。
    • 7. 发明授权
    • Catadioptric lens barrel structure having a kinematic alignment structure and method for aligning two planar surfaces
    • 具有运动学对准结构的折反射镜镜筒结构和用于对准两个平面的方法
    • US06577457B1
    • 2003-06-10
    • US09636067
    • 2000-08-10
    • Marc Spinali
    • Marc Spinali
    • G02B702
    • G03F7/70258G02B7/022G03F7/70833
    • A kinematic alignment structure is provided for use as an attachment to a lens barrel. This kinematic alignment structure is well suited for controlling perpendicular orientation of a pair of mirrors carried in a lens barrel that is transversely connecting two parallel lens barrels. The transverse lens barrel carries the mirrors on each end of the transverse lens barrel. The mirrors have a substantially perpendicular orientation from each other. The alignment structure microscopically adjusts the perpendicular alignment of the couple of mirrors. The alignment structure comprises a set of three positioning knobs distributed on each end face of the lens barrel. The mirrors are positioned in direct contact with the lens barrel via the set of three positioning knobs. The positioning knobs comprise a platform, and have raised tubular bodies and spherical top surfaces. The spherical top surfaces may be polished to microscopically adjust the perpendicular orientation between the two mirrors.
    • 运动学对准结构提供用作透镜镜筒的附件。 这种运动学对准结构非常适合于控制在横向连接两个平行透镜筒的镜筒中承载的一对镜子的垂直取向。 横透镜镜筒在横透镜镜筒的每一端承载反射镜。 反射镜具有彼此基本上垂直的定向。 对准结构显微镜调整镜子对的垂直对准。 对准结构包括分布在镜筒的每个端面上的一组三个定位旋钮。 镜子通过一组三个定位旋钮定位成与镜筒直接接触。 定位旋钮包括平台,并且具有升高的管状体和球形顶表面。 可以抛光球形顶表面以显微地调节两个反射镜之间的垂直取向。
    • 8. 发明授权
    • Hybrid optical barrel
    • 混合光学镜筒
    • US06118599A
    • 2000-09-12
    • US184651
    • 1998-11-03
    • Marc Spinali
    • Marc Spinali
    • G02B7/02
    • G02B7/028
    • A hybrid optical barrel as a projection optical unit includes a plurality of cell groups disposed in series along an optical axis, each cell group including at least a cell unit and each cell unit including a lens and a cell holding the lens. The optical barrel also includes a connecting barrel member carrying the plurality of cell groups, the connecting barrel member being made of a material with a CTE
    • 作为投影光学单元的混合光学镜筒包括沿着光轴串联布置的多个单元组,每个单元组至少包括单元单元,并且每个单元单元包括透镜和保持透镜的单元。 光学镜筒还包括承载多个单元组的连接筒构件,连接筒构件由具有CTE <3.0ppm℃的材料制成,例如Invar,超低膨胀TM玻璃,Zerodur玻璃或碳化硅 。 连接筒构件可以包括沿着光轴串联布置的多个子管。 或者,连接筒构件可以包括多个间隔构件。 因此,在由温度变化引起的光学筒的轴向位移期间,副筒或间隔构件的相对轴向尺寸基本上保持不变,从而减小多个单元组内的透镜的总体位移。
    • 9. 发明授权
    • Drive mechanism for articulation of a surgical instrument
    • 用于关节外科器械的驱动机构
    • US08292889B2
    • 2012-10-23
    • US12714166
    • 2010-02-26
    • James S. CunninghamEric JonesMarc Spinali
    • James S. CunninghamEric JonesMarc Spinali
    • A61B18/14A61B1/008
    • A61B18/1445A61B34/71A61B2018/00345A61B2018/00404A61B2018/00619A61B2018/1861A61B2034/305
    • A surgical instrument includes a housing, an end effector and an elongated shaft extending therebetween. The elongated shaft includes a distal portion that is movable between aligned and articulated configurations. A pair of drive cables extends through the elongated shaft and is coupled to the distal portion such that reciprocal longitudinal motion of the drive cables induces movement of the distal portion between the aligned and articulated configurations. An articulation drive mechanism is operable to induce reciprocal longitudinal motion of the drive cables. The drive mechanism includes an actuator and a pair of torsion members that are rotatable about two distinct axes in response to movement of the actuator. A respective follower is operatively coupled to each torsion member to translate in a respective longitudinal direction in response to rotation of the torsion members, and each follower is coupled to a respective drive cable to impart translational motion thereto.
    • 手术器械包括壳体,端部执行器和在其间延伸的细长轴。 细长轴包括可在对准和铰接构型之间移动的远侧部分。 一对驱动电缆延伸穿过细长轴并且联接到远侧部分,使得驱动电缆的往复纵向运动引起远侧部分在对准和铰接构型之间的运动。 铰接驱动机构可操作以引起驱动电缆的往复纵向运动。 驱动机构包括致动器和一对扭转构件,其可响应于致动器的移动而围绕两个不同的轴线旋转。 相应的从动件可操作地联接到每个扭转构件以响应于扭转构件的旋转在相应的纵向方向上平移,并且每个从动件联接到相应的驱动电缆以向其施加平移运动。
    • 10. 发明授权
    • Catadioptric lens barrel structure having a plurality of split lens barrels and a support structure supporting the split lens barrels
    • 反射折射透镜镜筒结构具有多个分裂透镜筒和支撑分裂镜筒的支撑结构
    • US06639740B1
    • 2003-10-28
    • US09636063
    • 2000-08-10
    • Marc Spinali
    • Marc Spinali
    • G02B702
    • G02B17/0892G02B7/04G02B17/08
    • A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels, each having an optical axis that is parallel to the other, and a transverse lens barrel connecting the first lens barrel to the second lens barrel. The catadioptric lens barrel structure may be used in semiconductor fabrication by placing a reticle in front of the entrance of the first lens barrels and a wafer in front of the exit of the second lens barrel. The first and second lens barrels comprise a plurality of sub-barrels serially aligned along the corresponding optical axis. There is physical separation between each sub-barrel in the series to isolate each sub-barrel from thermal and vibrational effects propagated by the other sub-barrels in the series. A support structure is provided to support each of the plurality of sub-barrels and is made of a material having a low coefficient of thermal expansion. The support structure comprises a plurality of support platforms.
    • 用于投影曝光装置的反射折射透镜镜筒结构包括第一透镜筒和第二透镜筒,每个透镜筒具有平行于另一个的光轴和将第一透镜镜筒连接到第二透镜镜筒的横透镜镜筒。 反折射透镜镜筒结构可以在半导体制造中使用,在第一透镜筒的入口前方设置掩模版,在第二透镜镜筒的出口前方设置晶片。 第一和第二透镜筒包括沿对应的光轴串联排列的多个副筒。 串联中的每个子筒之间存在物理分离,以隔离每个子筒与由该系列中的其他子筒传播的热和振动效应。 提供支撑结构以支撑多个子筒中的每一个,并且由具有低热膨胀系数的材料制成。 支撑结构包括多个支撑平台。