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    • 10. 发明申请
    • COMPACT NANOFABRICATION APPARATUS
    • 紧凑的纳米装置
    • US20090023607A1
    • 2009-01-22
    • US12116908
    • 2008-05-07
    • Sergey V. RozhokMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • Sergey V. RozhokMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • C40B50/14C40B60/14
    • G03F7/0002G01Q80/00G03F7/70383G03F9/00
    • An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
    • 一种用于制造结构并从尖端到表面沉积材料的装置,用于以直写式模式进行图案化,提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑,并在实验台或台式机上使用。 一种装置,包括:至少一个多轴组件,其包括多个纳米定位阶段,至少一个笔组件,其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件,至少一个观察组件,至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体,以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。