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    • 4. 发明授权
    • Laser atom probe methods
    • 激光原子探针方法
    • US07652269B2
    • 2010-01-26
    • US11597080
    • 2004-08-19
    • Joseph Hale BuntonJesse D. Olson
    • Joseph Hale BuntonJesse D. Olson
    • G01B5/28H01J37/285H01J49/00
    • H01J37/3045G01N23/22
    • A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
    • 激光原子探针(100)将对电极置于样品座和检测器(106)之间,并且提供其对准的光束(122)的激光器(116),以通过孔(110)的孔(110)照射样品 对电极(108)。 检测器,样品座(102)和/或对电极可以被充电到一些升压电压,然后被脉冲以使样本电离。 激光脉冲的定时可用于确定离子离开和到达时间,从而确定离子的质荷比,因此确定它们的身份。 描述了自动对准方法,其中激光被自动导向到感兴趣的区域。