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    • 1. 发明授权
    • Apparatus and method for detecting tilt and vibration of a body
    • 用于检测身体倾斜和振动的装置和方法
    • US06640644B1
    • 2003-11-04
    • US10199570
    • 2002-07-19
    • Pedro G MirelesJose L Almaraz
    • Pedro G MirelesJose L Almaraz
    • G01L905
    • G01C9/12G01C9/06
    • Tilt and vibration sensor and method for forming the sensor with a piezoresistive membrane having a weight affixed proximate its center for detecting the tilt and vibration of a body. The membrane may include four piezoresistors placed proximate the edges of the membrane at the points of maximum stress when the membrane is subject to a uniform applied pressure. The piezoresistors may form a Wheatstone bridge circuit to generate a first and second output voltage in response to changes in resistance of the piezoresistors under the uniform applied pressure. The first output voltage may be indicative of the angle of inclination of a body and the second output voltage may be indicative of the vibration of the body. The membrane may be fabricated from a silicon wafer using known photolithography and etching processes. The membrane may be connected with a voltage source and secured within an appropriate housing to be placed in an operational environment.
    • 倾斜和振动传感器以及用压阻膜形成传感器的方法,其具有靠近其中心的重量,用于检测身体的倾斜和振动。 当膜受到均匀施加的压力时,膜可以包括在最大应力点处靠近膜的边缘放置的四个压敏电阻。 压敏电阻器可以形成惠斯通电桥电路,以响应于在均匀施加的压力下压敏电阻器的电阻变化而产生第一和第二输出电压。 第一输出电压可以指示身体的倾斜角,并且第二输出电压可以指示身体的振动。 膜可以使用已知的光刻和蚀刻工艺由硅晶片制造。 膜可以与电压源连接并固定在适当的壳体内以放置在操作环境中。
    • 2. 发明授权
    • Tilt sensor and method of forming such device
    • 倾斜传感器及其形成方法
    • US06634113B1
    • 2003-10-21
    • US10150707
    • 2002-05-17
    • Jose L AlmarazPedro G Mireles
    • Jose L AlmarazPedro G Mireles
    • G01C906
    • G01C9/12G01C9/06
    • Tilt sensor and method for forming the sensor with a piezoresistive membrane having a weight affixed proximate its center for detecting the tilt of a body. The membrane may include four piezoresistors placed proximate the edges of the membrane at the points of maximum stress when the membrane is subject to a uniform applied pressure. The piezoresistors may form a Wheatstone bridge circuit to generate an output voltage in response to changes in resistance of the piezoresistors under the uniform applied pressure. The output voltage may be indicative of the angle of inclination of a body. The membrane may be fabricated from a silicon wafer using known photolithography and etching processes. The membrane may be connected with a voltage source and secured within an appropriate housing to be placed in an operational environment.
    • 倾斜传感器和用于形成压阻膜的传感器的方法,其具有靠近其中心附近的重量,用于检测身体的倾斜。 当膜受到均匀施加的压力时,膜可以包括在最大应力点处靠近膜的边缘放置的四个压敏电阻。 压电电阻器可以形成惠斯登电桥电路,以在均匀施加的压力下响应于压敏电阻器的电阻变化而产生输出电压。 输出电压可以指示身体的倾斜角度。 膜可以使用已知的光刻和蚀刻工艺由硅晶片制造。 膜可以与电压源连接并固定在适当的壳体内以放置在操作环境中。